He aha te paninga CVD SiC?
Ko te whakatakotoranga kohu matū (CVD) he tukanga whakatakotoranga korehau e whakamahia ana hei whakaputa rauemi totoka parakore-teitei. He maha ngā wā ka whakamahia tēnei tukanga i roto i te mara hanga haurua-haurua hei hanga kiriata angiangi ki runga i te mata o ngā papa. I roto i te tukanga o te whakarite i te silicon carbide mā te CVD, ka whakaatuhia te papa ki tētahi, neke atu rānei o ngā matū whakapūmau, ka tauhohe matū ki runga i te mata o te papa hei whakatakotoranga i ngā putunga silicon carbide e hiahiatia ana. I roto i ngā tikanga maha mō te whakarite i ngā rauemi silicon carbide, he nui ake te ōritetanga me te parakore o ngā hua i whakaritea mā te whakatakotoranga kohu matū, ā, he kaha te whakahaere tukanga o tēnei tikanga. He huinga ahurei ngā āhuatanga wera, hiko me te matū o ngā rauemi silicon carbide CVD, ā, he tino pai mō te whakamahi i roto i te umanga semiconductor e hiahiatia ana ngā rauemi mahi-teitei. He whānuitia te whakamahinga o ngā wāhanga silicon carbide CVD i roto i ngā taputapu whakairo, ngā taputapu MOCVD, ngā taputapu epitaxial Si me ngā taputapu epitaxial SiC, ngā taputapu tukatuka wera tere me ētahi atu mara.
Ko te arotahi o tēnei tuhinga he tātari i te kounga o ngā kiriata angiangi i whakatōkia i ngā pāmahana tukanga rerekē i te wā e whakarite ana i tePaninga CVD SiC, kia taea ai te whiriwhiri i te pāmahana tukanga tino tika. Ka whakamahia e te whakamātautau te karāpeti hei papa me te trichloromethylsilane (MTS) hei pūtake hau tauhohenga. Ka whakatakotoria te paninga SiC mā te tukanga CVD pēhanga-iti, ā, ko te āhua iti o tePaninga CVD SiCka tirohia mā te karu hiko matawai hei tātari i tōna kiato hanganga.
Nā te mea he tino teitei te pāmahana o te mata o te papa graphite, ka mimitihia te hau waenga ka tukuna atu i te mata o te papa, ā, ko te C me te Si e toe ana i runga i te mata o te papa ka hanga i te SiC totoka hei hanga i te paninga SiC. E ai ki te tukanga tipu CVD-SiC i runga ake nei, ka kitea ka pā te pāmahana ki te horapa o te hau, te pirau o te MTS, te hanganga o ngā pata me te mimiti me te tukunga o te hau waenga, nō reira ka whai wāhi nui te pāmahana whakatakotoranga ki te āhua o te paninga SiC. Ko te āhua moroiti o te paninga te whakaaturanga tino mārama o te mātotoru o te paninga. Nō reira, me ako te pānga o ngā pāmahana whakatakotoranga rerekē ki te āhua moroiti o te paninga CVD SiC. Nā te mea ka taea e te MTS te pirau me te whakatakotoranga i te paninga SiC i waenga i te 900~1600℃, ka tīpakohia e tēnei whakamātautau e rima ngā pāmahana whakatakotoranga o te 900℃, 1000℃, 1100℃, 1200℃ me te 1300℃ hei whakarite i te paninga SiC hei ako i te pānga o te pāmahana ki te paninga CVD-SiC. Kei te Ripanga 3 ngā tawhā motuhake. E whakaatu ana te Pikitia 2 i te āhua moroiti o te paninga CVD-SiC i whakatipuria i ngā pāmahana whakatakotoranga rerekē.
Ina eke te pāmahana whakatakoto ki te 900℃, ka tipu katoa te SiC ki ngā āhua muka. Ka kitea ko te diameter o te muka kotahi he tata ki te 3.5μm, ā, ko tōna ōwehenga āhua he tata ki te 3 (<10). Heoi anō, he maha ngā matūriki nano-SiC e titoa ana, nō reira he hanganga SiC polycrystalline, he rerekē i ngā nanowire SiC tuku iho me ngā ūpoko SiC kotahi-kiriata. Ko tēnei SiC muka he hapa hanganga i puta mai i ngā tawhā tukanga koretake. Ka kitea ko te hanganga o tēnei paninga SiC he tino wetekina, ā, he maha ngā pore i waenganui i te SiC muka, ā, he tino iti te mātotoru. Nō reira, kāore tēnei pāmahana e pai mō te whakarite paninga SiC matotoru. I te nuinga o te wā, ko ngā hapa hanganga SiC muka ka puta mai i te pāmahana whakatakoto tino iti. I ngā pāmahana iti, he iti te kaha o ngā ngota iti e piri ana ki te mata o te papa, ā, he ngoikore te kaha heke. Nō reira, ka heke ngā ngota iti ka tipu ki te kaha kore utu mata iti rawa o ngā witi SiC (pērā i te pito o te witi). Mā te tipu haere tonu o te ahunga whakamua ka puta he hapa hanganga SiC muka.
Te Whakarite i te Paninga CVD SiC:
Tuatahi, ka whakanohoia te papa karāpeti ki roto i te oumu korehau pāmahana teitei, ā, ka puritia ki te 1500℃ mō te 1 hāora i roto i te hau Ar hei tango i te pungarehu. Kātahi ka tapahia te poraka karāpeti kia rite ki te poraka 15x15x5mm, ā, ka whakakanapahia te mata o te poraka karāpeti ki te pepa kirikiri 1200-mata hei tango i ngā pūwero mata e pā ana ki te whakatakotoranga o te SiC. Ka horoia te poraka karāpeti kua rongoatia ki te etanoru waikore me te wai whakapūkara, kātahi ka whakanohoia ki roto i te oumu i te 100℃ hei whakamaroke. Hei whakamutunga, ka whakanohoia te papa karāpeti ki te rohe pāmahana matua o te oumu ngongo hei whakatakotoranga SiC. Kei te Pikitia 1 te hoahoa kauwhata o te pūnaha whakatakotoranga kohu matū.
TePaninga CVD SiCi tirohia mā te karu hiko matawai hei tātari i tōna rahi me te kiato o te matūriki. Hei tāpiri, i tatauhia te tere whakatakotoranga o te paninga SiC e ai ki te tātai i raro nei: VSiC=(m2-m1)/(Sxt)x100% VSiC=Te tere whakatakotoranga; m2–te papatipu o te tauira paninga (mg); m1–papatipu o te papa (mg); Te horahanga mata-S o te papa (mm2); t-te wā whakatakoto (h). He tino uaua te CVD-SiC, ā, ka taea te whakarāpopoto i te tukanga penei: i te pāmahana teitei, ka pāngia te MTS e te wetewete wera hei hanga i ngā ngota iti o te pūtake waro me te pūtake silicon. Ko te nuinga o ngā ngota iti o te pūtake waro ko te CH3, C2H2 me te C2H4, ā, ko te nuinga o ngā ngota iti o te pūtake silicon ko te SiCI2, SiCI3, me ētahi atu; ka haria ēnei ngota iti o te pūtake waro me te pūtake silicon ki te mata o te papa graphite e te hau kawe me te hau whakarewa, kātahi ka mimitihia ēnei ngota iti ki te mata o te papa hei mimiti, kātahi ka puta he tauhohenga matū i waenga i ngā ngota iti hei hanga i ngā pata iti ka tipu haere, ā, ka hanumi hoki ngā pata, ā, ka haere tahi te tauhohenga me te hanganga o ngā hua-taha (hau HCl); Ina piki te pāmahana ki te 1000 ℃, ka tino pai ake te mātotoru o te paninga SiC. Ka kitea ko te nuinga o te paninga he mea tito mai i ngā kakano SiC (tata ki te 4μm te rahi), engari ka kitea anō hoki ētahi hapa SiC muka, e whakaatu ana kei te tipu tonu te SiC i tēnei pāmahana, ā, kāore anō kia tino mātotoru te paninga. Ina piki te pāmahana ki te 1100 ℃, ka kitea he tino mātotoru te paninga SiC, ā, kua ngaro katoa ngā hapa SiC muka. He mea tito mai i ngā matūriki SiC āhua-pata te paninga, he whānui tata ki te 5~10μm, e piri pūmau ana. He tino taratara te mata o ngā matūriki. He mea tito mai i ngā kakano SiC nano-tauine. Inaa, kua whakahaeretia te tukanga tipu CVD-SiC i te 1100 ℃ mā te whakawhiti papatipu. He nui te kaha me te wā o ngā ngota iti e piri ana ki te mata o te papa ki te whakatupu me te tipu hei kakano SiC. Ka hanga rite tonu ngā kakano SiC i ngā pata nui. I raro i te mahi a te pūngao mata, he porowhita te āhua o te nuinga o ngā pata, ā, ka piri tahi ngā pata hei hanga i tētahi paninga SiC matotoru. Ina piki te pāmahana ki te 1200℃, ka matotoru hoki te paninga SiC, engari ka maha ngā kokonga o te āhua o te SiC, ā, ka āhua taratara te mata o te paninga. Ina piki te pāmahana ki te 1300℃, ka kitea he maha ngā matūriki porowhita noa me te diameter o te 3μm i runga i te mata o te papa graphite. Nā te mea i tēnei pāmahana, kua hurihia te SiC hei hanganga hau, ā, he tere rawa te tere pirau MTS. Kua tauhohe ngā ngota iti, kua whakapūmau hoki hei hanga i ngā kirikiri SiC i mua i te mimiti ki te mata o te papa. I muri i te hanganga o ngā kirikiri i ngā matūriki porowhita, ka taka ki raro, ā, ka mutu ka puta he paninga matūriki SiC wetekina me te matotoru iti. He mārama, kāore e taea te whakamahi i te 1300℃ hei pāmahana hanga o te paninga SiC matotoru. E whakaatu ana te whakataurite whānui mēnā me whakarite he paninga SiC matotoru, ko te pāmahana whakatakotoranga CVD tino pai ko te 1100℃.
E whakaatu ana te Pikitia 3 i te tere whakatakotoranga o ngā paninga CVD SiC i ngā pāmahana whakatakotoranga rerekē. I te pikinga ake o te pāmahana whakatakotoranga, ka heke haere te tere whakatakotoranga o te paninga SiC. Ko te tere whakatakotoranga i te 900°C he 0.352 mg·h-1/mm2, ā, ko te tipu ahunga o ngā muka ka arahi ki te tere whakatakotoranga tere rawa atu. Ko te tere whakatakotoranga o te paninga me te kiato teitei ko 0.179 mg·h-1/mm2. Nā te whakatakotoranga o ētahi matūriki SiC, ko te tere whakatakotoranga i te 1300°C te mea iti rawa, ko te 0.027 mg·h-1/mm2 anake. Whakatau: Ko te pāmahana pai rawa atu mō te whakatakoto CVD ko te 1100℃. Ka whakatairangahia e te pāmahana iti te tipu o te SiC, engari ko te pāmahana teitei ka puta te kohu o te SiC, ā, ka hua ake he paninga koretake. I te pikinga ake o te pāmahana whakatakoto, ka piki ake te tere whakatakoto oPaninga CVD SiCka iti haere.
Wā tuku: Mei-26-2025