SiC Yakaputirwa Graphite Halfmoon Chikamuchinhu chakakosha chinoshandiswa mukugadzira semiconductor, kunyanya yeSiC epitaxial michina. Yayo dhizaini uye zvimiro zvemukati zvinotarisisa kunaka uye kugadzirwa kwe epitaxial wafers.
Kuvakwa kwekamuri yekupindura:
Iyo hafu yemwedzi chikamu inoumbwa nezvikamu zviviri, zvekumusoro uye nechepasi zvikamu, izvo zvakasungwa pamwe chete kuti zvigadzire kamuri yekukura yakavharwa, iyo inogara iyo silicon carbide substrate (kazhinji 4H-SiC kana 6H-SiC) uye inozadzisa epitaxial layer kukura nekunyatso kudzora gasi kuyerera munda (senge H, musanganiswa weH, SiC).
Temperature field regulation:
Iyo yakakwirira-kuchena graphite base yakasanganiswa neiyo induction yekudziya coil inogona kuchengetedza kamuri tembiricha kufanana (mukati me ± 5 ° C) pane yakanyanya tembiricha ye1500-1700 ° C kuve nechokwadi chekuenderana kweepitaxial layer ukobvu.
Airflow guide:
Nekugadzira nzvimbo yemhepo inopinza uye yekubuda (senge padivi pemhepo inlet uye kumusoro kwemhepo yekubuda kweyakatwasuka choto chevira), iyo reaction gas laminar kuyerera inotungamirwa nepasi pe substrate kudzikisa kuremara kwekukura kunokonzerwa nemhirizhonga.
Base zvinhu: yakakwirira-kuchena graphite
Kuchena zvinodiwa:carbon content ≥99.99%, ash content ≤5ppm, kuona kuti hapana tsvina inoputirwa kuti isvibise epitaxial layer pakupisa kwepamusoro.
Performance zvakanakira:
High thermal conductivity:Iyo yekupisa conductivity pakamuri tembiricha inosvika 150W / (m ・ K), iri padyo nechiyero chemhangura uye inogona kukurumidza kutamisa kupisa.
Yekuwedzera yakaderera coefficient:5×10-6/ ℃ (25-1000 ℃), inoenderana nesilicon carbide substrate (4.2 × 10)-6/ ℃), kuderedza kuputika kwejasi kunokonzerwa nekupisa kwekushushikana.
Kugadzirisa chokwadi:Iyo dimensional kushivirira ye ± 0.05mm inowanikwa kuburikidza neCNC machining kuve nechokwadi chekuvharirwa kwekamuri.
Kushandiswa kwakasiyana kweCVD SiC uye CVD TaC
| Coating | Process | Kuenzanisa | Yakajairika application |
| CVD-SiC | Tembiricha: 1000-1200 ℃Kudzvinyirira: 10-100 Torr | Huoma HV2500, ukobvu 50-100um, yakanakisa oxidation kuramba (yakagadzikana pazasi 1600 ℃) | Universal epitaxial furnaces, yakakodzera kune yakajairwa mhepo senge hydrogen uye silane |
| CVD-TaC | Tembiricha: 1600-1800 ℃Kudzvinyirira: 1-10 Torr | Kuoma HV3000, ukobvu 20-50um, kusaora zvakanyanya (kunogona kumira magasi anoparadza akadai seHCl, NH₃, nezvimwewo) | Nzvimbo dzinoparadza zvakanyanya (zvakadai seGaN epitaxy uye etching midziyo), kana maitiro akakosha anoda tembiricha yepamusoro ye2600°C. |
VET Energy inyanzvi yekugadzira inotarisisa kuR&D nekugadzirwa kwemhando yepamusoro-soro senge graphite, silicon carbide, quartz, pamwe nekurapa kwezvinhu zvakaita seSiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc. Zvigadzirwa zvinoshandiswa zvakanyanya mu photovoltaic, semiconductor, new energy, metallurgy, simbi.
Chikwata chedu chehunyanzvi chinobva kumasangano epamusoro ekutsvagisa dzimba, anogona kukupa mamwe hunyanzvi zvigadziriso zvekushandisa kwauri.
VET Energy zvakanakira zvinosanganisira:
• Fekitari uye rabhoritari yehunyanzvi;
• Indasitiri-inotungamira kuchena mwero uye kunaka;
• Mutengo wemakwikwi & Nguva yekuendesa nokukurumidza;
• Kudyidzana kwemaindasitiri akawanda pasi rose;
Tinokugamuchira iwe kuti utarise fekitori yedu nerabhoritari chero nguva!
