Chikamu cheSiC Coated Graphite Hafu yeMwedzi uye Kuungana kweSiC Epitaxy

Tsananguro pfupi:

VET Energy inyanzvi yekugadzira uye inopa zvikamu zvikuru zve silicon carbide epitaxial furnaces. Musangano wedu wehafu yemwedzi unoshandisa graphite yakachena kwazvo pamwe chete ne CVD coating technology yepamusoro. Yakagadzirirwa nzvimbo dze epitaxial dzinopisa zvakanyanya uye dzinopisa zvakanyanya. Iyo graphite yakachena kwazvo inopa chikamu ichi simba rakanaka rekudzivirira kupisa kwakanyanya (>1600℃) uye kugadzikana kwekupisa, zvichiita kuti nzvimbo yekupisa ive yakafanana; iyo CVD coating inoumba dense protective layer pamusoro kuburikidza ne CVD technology, ichivandudza zvakanyanya anti-oxidation uye anti-etching properties, uye inowedzera hupenyu hwebasa nekanopfuura katatu.

Zvinyorwa:Graphite yakachena kwazvo

Kurapa:Kuputira kweCVD-SiC kana CVD-TaC

Kugadzirisa:Inowanikwa

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SiC Coated Graphite Halfmoon Chikamuchinhu chakakosha chinoshandiswa mukugadzira ma semiconductor, kunyanya pamidziyo yeSiC epitaxial. Magadzirirwo ayo echimiro uye hunhu hwezvinhu zvinosarudza zvakananga kunaka uye kushanda zvakanaka kwe epitaxial wafers.

Kuvakwa kwekamuri rekuita zvinhu:
Chikamu chehafu yemwedzi chinoumbwa nezvikamu zviviri, chikamu chepamusoro nechepasi, izvo zvakabatanidzwa pamwe chete kuti zvigadzire kamuri rekukura rakavharwa, iro rinokwana substrate yesilicon carbide (kazhinji 4H-SiC kana 6H-SiC) uye rinoita kuti kukura kwe epitaxial layer kuvepo nekudzora zvakanaka nzvimbo yekuyerera kwegasi (senge musanganiswa weSiH₄, C₃H₈, uye H₂).
Mutemo wekupisa kwemunda:
Hwaro hwegirafiti hwakachena zvakanyanya pamwe chete ne induction heating coil zvinogona kuchengetedza kufanana kwetembiricha yemukamuri (mukati me ±5°C) patembiricha yepamusoro ye1500-1700°C kuve nechokwadi chekuti ukobvu hwe epitaxial layer hwakasimba.
Kutungamirirwa kwemhepo:
Nekugadzira nzvimbo yekupinda neyokubuditsa mweya (sekunge nzvimbo yekupinda neyokubuditsa mweya padivi neyokubuditsa mweya wepamusoro wemuviri wechoto chakatarwa), kuyerera kwegesi rekuita kunotungamirirwa nepamusoro pe substrate kuderedza zvikanganiso zvekukura zvinokonzerwa nekusagadzikana.

Zvinhu zvepakutanga: graphite yakachena kwazvo
Zvinodiwa pakuchena:huwandu hwekabhoni ≥99.99%, huwandu hwedota ≤5ppm, kuve nechokwadi chekuti hapana tsvina inokonzereswa kuti isvibise epitaxial layer pakupisa kwakanyanya.
Zvakanakira mashandiro:
Kupisa kwakanyanya:Kupisa kwemhepo patembiricha yemumba kunosvika 150W/(m・K), iyo iri pedyo nehukuru hwemhangura uye inogona kutamisa kupisa nekukurumidza.
Kuwanda kwekuwedzera kwakaderera:5×10^-6/℃ (25-1000℃), inoenderana nesilicon carbide substrate (4.2×10^-6/℃), kuderedza kutsemuka kwependi inokonzerwa nekumanikidzwa kwekupisa.
Kunyatsogadzirisa:Kukwanisa kushivirira ±0.05mm neCNC machining kuve nechokwadi chekuti kamuri rakavharwa.

Mashandisirwo akasiyana eCVD SiC neCVD TaC

Kuputira	Maitiro	Kuenzanisa	Kushandiswa kwakajairika
CVD-SiC	Kupisa: 1000-1200℃ Kudzvanywa: 10-100 Torr	Kuomarara HV2500, ukobvu 50-100um, kuramba kuoxidation kwakanaka (kwakagadzikana pasi pe1600℃)	Mafuro e epitaxial epasi rose, akakodzera mamiriro ekunze akadai sehydrogen ne silane
CVD-TaC	Tembiricha: 1600-1800℃ Kudzvanywa: 1-10 Torr	Kuomarara HV3000, ukobvu 20-50um, inodzivirira ngura zvakanyanya (inogona kutsungirira magasi anoparadza akadai seHCl, NH₃, nezvimwewo)	Nzvimbo dzine ngura yakawanda (senge GaN epitaxy nemichina yekuchekerera), kana maitiro chaiwo anoda tembiricha yakakwira zvikuru ye2600°C

VET Energy inyanzvi yekugadzira inotarisa paR&D uye kugadzirwa kwezvinhu zvepamusoro-soro zvakaita segraphite, silicon carbide, quartz, pamwe nekurapwa kwezvinhu zvakaita seSiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, nezvimwewo. Zvigadzirwa izvi zvinoshandiswa zvakanyanya mu photovoltaic, semiconductor, new energy, metallurgy, nezvimwewo.

Chikwata chedu chehunyanzvi chinobva kumasangano makuru ekutsvagisa emuno, chinogona kukupa mhinduro dzehunyanzvi.

Zvakanakira zveVET Energy zvinosanganisira:
• Laboratori yemufekitori neyanyanzvi;
• Matanho ekuchena uye mhando yepamusoro-soro muindasitiri;
• Mutengo unokwikwidzana & Nguva yekutumira nekukurumidza;
• Kudyidzana kwemaindasitiri akawanda pasi rose;

Tinokugamuchirai kuti mushanyire fekitori yedu nerabhoritari chero nguva!