Kev siv silicon carbide ceramics hauv kev lag luam semiconductor

Cov khoom siv nyiam rau qhov chaw meej ntawm cov tshuab photolithography

Hauv kev lag luam semiconductor,silicon carbide ceramicscov ntaub ntawv feem ntau yog siv rau hauv cov khoom siv tseem ceeb rau kev tsim khoom siv hluav taws xob, xws li silicon carbide worktable, cov kev taw qhia,cov khoom ci ntsa iab, lub tshuab nqus dej ceramic, caj npab, cov discs sib tsoo, cov khoom siv, thiab lwm yam rau cov tshuab lithography.

Cov khoom siv ceramic silicon carbiderau cov khoom siv semiconductor thiab optical

● Lub disc sib tsoo ua los ntawm silicon carbide ceramic. Yog tias lub disc sib tsoo ua los ntawm hlau cam khwb cia lossis carbon steel, nws lub neej ua haujlwm luv luv thiab nws cov coefficient thermal expansion loj. Thaum lub sijhawm ua cov silicon wafers, tshwj xeeb tshaj yog thaum lub sijhawm sib tsoo lossis polishing ceev ceev, qhov hnav thiab thermal deformation ntawm lub disc sib tsoo ua rau nws nyuaj rau xyuas kom meej tias lub silicon wafer tiaj tus thiab sib luag. Lub disc sib tsoo ua los ntawm silicon carbide ceramics muaj qhov nyuaj siab thiab hnav tsawg, thiab cov coefficient thermal expansion yeej zoo ib yam li cov silicon wafers, yog li nws tuaj yeem raug sib tsoo thiab polished ntawm qhov ceev ceev.
● Cov khoom siv ua los ntawm silicon carbide ceramic. Tsis tas li ntawd xwb, thaum cov silicon wafers raug tsim tawm, lawv yuav tsum tau kho cua sov kub heev thiab feem ntau raug thauj mus los siv cov khoom siv silicon carbide. Lawv tiv taus cua sov thiab tsis ua puas tsuaj. Cov pa roj carbon zoo li pob zeb diamond (DLC) thiab lwm yam txheej txheem tuaj yeem siv rau ntawm qhov chaw kom txhim kho kev ua haujlwm, txo qhov puas tsuaj ntawm wafer, thiab tiv thaiv kev kis kab mob.
● Rooj ua haujlwm silicon carbide. Piv txwv li, siv lub rooj ua haujlwm hauv lub tshuab lithography, lub rooj ua haujlwm yog lub luag haujlwm tseem ceeb rau kev ua tiav qhov kev txav mus los, xav tau kev txav mus los ceev ceev, loj-stroke, rau-degree-of-freedom nano-level ultra-precision. Piv txwv li, rau lub tshuab lithography nrog kev daws teeb meem ntawm 100nm, qhov tseeb ntawm overlay ntawm 33nm, thiab qhov dav ntawm kab ntawm 10nm, qhov tseeb ntawm qhov chaw ua haujlwm yuav tsum ncav cuag 10nm, qhov ceev ntawm lub ntsej muag-silicon wafer thiab kev luam theej duab yog 150nm / s thiab 120nm / s, thiab qhov ceev ntawm lub ntsej muag luam theej duab yog ze li ntawm 500nm / s, thiab lub rooj ua haujlwm yuav tsum muaj qhov tseeb thiab ruaj khov ntawm kev txav mus los.

Daim duab kos ntawm lub rooj ua haujlwm thiab lub rooj txav me me (ib feem)

● Daim iav plaub fab uas yog silicon carbide ceramic. Cov khoom tseem ceeb hauv cov khoom siv tseem ceeb hauv kev sib xyaw ua ke xws li cov tshuab lithography muaj cov duab nyuaj, qhov loj me nyuaj, thiab cov qauv tsis sib xws, ua rau nws nyuaj rau npaj cov khoom siv silicon carbide ceramic. Tam sim no, cov tuam txhab tsim khoom siv thoob ntiaj teb, xws li ASML hauv Netherlands, NIKON thiab CANON hauv Nyiv, siv ntau cov ntaub ntawv xws li iav microcrystalline thiab cordierite los npaj cov iav plaub fab, cov khoom tseem ceeb ntawm cov tshuab lithography, thiab siv silicon carbide ceramics los npaj lwm cov khoom siv ua haujlwm siab nrog cov duab yooj yim. Txawm li cas los xij, cov kws tshaj lij los ntawm Tuam Tshoj Lub Tsev Tshawb Fawb Cov Khoom Siv tau siv cov thev naus laus zis npaj tshwj xeeb los ua tiav kev npaj cov iav loj, cov duab nyuaj, lub teeb heev, kaw tag nrho silicon carbide ceramic square iav thiab lwm yam khoom siv kho qhov muag thiab ua haujlwm rau cov tshuab lithography.