Kushandiswa kwesilicon carbide ceramics mumunda we semiconductor

Chinhu chinodiwa pakugadzira zvikamu zvemichina ye photolithography nemazvo

Mumunda we semiconductor,silicon carbide zvedongoZvinhu zvinoshandiswa zvakanyanya mumidziyo mikuru yekugadzira macircuit akabatanidzwa, senge silicon carbide worktable, guide rails,zvinoratidza, chuck yekukweva yeceramic, maoko, madhisiki ekukuya, zvishandiso, nezvimwewo zvemichina ye lithography.

Zvikamu zvesimbi zveSilicon carbideyemidziyo ye semiconductor uye optical

● Silicon carbide ceramic grinding disc. Kana dhisiki yekukuya yakagadzirwa nesimbi yakakandwa kana simbi yekabhoni, hupenyu hwayo hwekushanda hupfupi uye thermal expansion coefficient yayo yakakura. Munguva yekugadzirisa silicon wafers, kunyanya panguva yekukuya nekukurumidza kana kupukuta, kupera uye thermal deformation yegrinding disc zvinoita kuti zviome kuona kuti silicon wafer yakatsetseka uye yakafanana. Dhisiki yekukuya yakagadzirwa nesilicon carbide ceramics ine kuoma kwakanyanya uye kusakara kwakaderera, uye thermal expansion coefficient yakafanana neye silicon wafers, saka inogona kukuyiwa nekukweshwa nekukurumidza.
● Zvishandiso zvesimbi zvesilicon carbide. Pamusoro pezvo, kana mawafer esilicon agadzirwa, anofanirwa kupiswa zvakanyanya uye anowanzo fambiswa achishandisa zvishandiso zvesilicon carbide. Haapisi uye haaparadzi. Kabhoni yakaita sedhaimani (DLC) nezvimwe zvinogona kuiswa pamusoro kuti zviwedzere kushanda, kuderedza kukuvara kwewafer, uye kudzivirira kusvibiswa kupararira.
● Tafura yekushanda yeSilicon carbide. Tichitora tafura yekushanda mumuchina we lithography semuenzaniso, tafura yekushanda inonyanya kuita basa rekupedzisa kufamba kwe exposure, inoda kufamba nekukurumidza, kukuru, uye ultra-precision movement ye six-degree-of-freedom nano-level. Semuenzaniso, kumuchina we lithography une resolution ye100nm, overlay accuracy ye33nm, uye line width ye10nm, accuracy positioning table inodiwa kuti isvike 10nm, mask-silicon wafer yekumhanya panguva imwe chete uye kumhanya kwe scanning ndeye 150nm/s uye 120nm/s zvichiteerana, uye speed ye scanning mask iri pedyo ne500nm/s, uye worktable inodiwa kuti ive ne high speed facility uye stability.

Dhayagiramu yemufananidzo wetafura yebasa uye tafura yekufamba-famba (chikamu chidiki)

● Girazi resimbi resimbi reSilicon carbide. Zvikamu zvakakosha mumidziyo mikuru yesimbi yakaita semichina yelithography zvine maumbirwo akaomarara, saizi dzakaomarara, uye zvivakwa zvakareruka zvisina chinhu, zvichiita kuti zviome kugadzirira zvikamu zvakadaro zvesimbi zvesilicon carbide. Parizvino, vagadziri vemidziyo yesimbi yepasi rose, vakaita seASML muNetherlands, NIKON neCANON muJapan, vanoshandisa zvinhu zvakawanda zvakaita segirazi re microcrystalline ne cordierite kugadzirira magirazi akaenzana, zvikamu zvikuru zvemichina yelithography, uye vanoshandisa silicon carbide ceramics kugadzirira zvimwe zvikamu zvechimiro zvine maumbirwo akareruka. Zvisinei, nyanzvi dzeChina Building Materials Research Institute dzakashandisa tekinoroji yekugadzira kuti dzigadzire magirazi makuru, akaomarara, akareruka, akavharwa zvizere esilicon carbide ceramic ceramic uye zvimwe zvikamu zvechimiro uye zvinoshanda zvemichina yelithography.