Ojiji nke seramiiki silicon carbide na mpaghara semiconductor

Ihe a na-ahọrọ maka akụkụ ziri ezi nke igwe fotolithography

N'ọhịa semiconductor,seramiiki silicon carbideA na-ejikarị ihe ndị a eme ihe na akụrụngwa dị mkpa maka imepụta sekit agbakwunyere, dị ka tebụl ọrụ silicon carbide, okporo ụzọ nduzi,ihe ngosiputa, seramiiki mmiri Chuck, ogwe aka, diski igwe egweri, ihe ndozi, wdg. maka igwe lithography.

Akụkụ seramiiki silicon carbidemaka ngwa semiconductor na ngwa anya

● Diski ígwè e ji ígwè a kpụrụ akpụ ma ọ bụ ígwè carbon mee diski e ji egweri ihe. Ọ bụrụ na e ji ígwè a kpụrụ akpụ ma ọ bụ ígwè carbon mee diski e ji egweri ihe, ndụ ọrụ ya dị mkpụmkpụ, oke mgbasawanye okpomọkụ ya dịkwa ukwuu. N'oge nhazi nke wafer silicon, karịsịa n'oge e ji egweri ihe ma ọ bụ tee ihe, mmebi okpomọkụ nke diski e ji egweri ihe na-eme ka o sie ike ijide n'aka na waya silicon ahụ dị larịị ma dịkwa ka ya. Diski e ji ígwè silicon carbide mee nwere ike siri ike ma dịkwa obere, oke mgbasawanye okpomọkụ ahụ dịkwa ka nke wafer silicon, ya mere a pụrụ iji ya ghee ya ma tee ya ọkụ n'ọsọ dị elu.
● Ihe e ji seramiiki silicon carbide mee. Na mgbakwunye, mgbe a na-emepụta wafer silicon, a ga-eme ọgwụgwọ okpomọkụ dị elu ma a na-ebuga ha site na iji ihe e ji silicon carbide mee. Ha anaghị eguzogide okpomọkụ ma ọ bụ na-emebi emebi. Enwere ike itinye carbon dị ka diamond (DLC) na ihe mkpuchi ndị ọzọ n'elu iji mee ka arụmọrụ dịkwuo mma, belata mmebi wafer, ma gbochie mmetọ ịgbasa.
● Tebụl ọrụ silicon carbide. Dịka ọmụmaatụ, site n'iji tebụl ọrụ dị na igwe lithography, tebụl ọrụ bụ isi ọrụ maka imecha mmegharị mkpughe, nke chọrọ mmegharị nano ọkwa dị elu, nnukwu strok, na ọkwa isii nke nnwere onwe. Dịka ọmụmaatụ, maka igwe lithography nwere mkpebi nke 100nm, izi ezi mkpuchi nke 33nm, na obosara ahịrị nke 10nm, a chọrọ izi ezi nhazi tebụl ọrụ iji ruo 10nm, ọsọ nzọ ụkwụ na nyocha n'otu oge bụ 150nm/s na 120nm/s n'otu n'otu, ọsọ nyocha ihe mkpuchi ahụ dịkwa nso na 500nm/s, a chọkwara tebụl ọrụ iji nwee izi ezi ngagharị na nkwụsi ike dị elu.

Eserese eserese nke tebụl ọrụ na tebụl obere mmegharị (ngalaba nkebi)

● Enyo seramiiki silikon carbide. Ihe ndị dị mkpa na ngwa sekit dị mkpa dịka igwe lithography nwere ọdịdị dị mgbagwoju anya, akụkụ dị mgbagwoju anya, na ihe owuwu dị mfe oghere, nke na-eme ka ọ sie ike ịkwadebe ihe seramiiki silikon carbide dị otú ahụ. Ugbu a, ndị na-emepụta ngwa sekit agbakwunyere mba ụwa, dịka ASML na Netherlands, NIKON na CANON na Japan, na-eji ọtụtụ ihe dị ka iko microcrystalline na cordierite iji kwadebe enyo square, ihe ndị bụ isi nke igwe lithography, ma na-eji seramiiki silikon carbide iji kwadebe ihe ndị ọzọ nwere arụmọrụ dị elu nwere ọdịdị dị mfe. Agbanyeghị, ndị ọkachamara sitere na China Building Materials Research Institute ejirila teknụzụ nkwadebe nkeonwe iji nweta nkwadebe nke enyo seramiiki silikon carbide buru ibu, nke dị mgbagwoju anya, nke dị fechaa, nke zuru oke na ihe ndị ọzọ nwere anya na-arụ ọrụ maka igwe lithography.