Ko te rauemi pai mō ngā wāhanga tino tika o ngā mīhini whakaahua-ipurangi
I roto i te mara o te hangarau haurua-ira,uku karāhe siliconKo ngā rauemi e whakamahia nuitia ana i roto i ngā taputapu matua mō te hanga ara iahiko whakauru, pērā i te tēpu mahi silicon carbide, ngā ara ārahi,ngā whakaata, pūwero momi uku, ngā ringaringa, ngā kōpae huri, ngā taputapu, me ētahi atu mō ngā mīhini whakairo.
Ngā wāhanga uku silicon carbidemō ngā taputapu haurua-ira me ngā taputapu whatu
● Kōpae huri uku silicon carbide. Mena he rino maka, he maitai waro rānei te mea hanga o te kōpae huri, he poto te roa o tōna oranga, ā, he nui te tauwehenga whānui wera. I te wā e tukatukahia ana ngā anga silicon, inā koa i te wā e huri tere ana, e whakakanapahia ana rānei, ka uaua te whakarite i te papatahi me te ōrite o te anga silicon nā te pakaru me te rerekētanga wera o te kōpae huri. He pakeke te kōpae huri i hangaia ki ngā uku silicon carbide, ā, he iti te pakaru, ā, he rite tonu te tauwehenga whānui wera ki ērā o ngā anga silicon, nō reira ka taea te huri me te whakakanapa i te tere tere.
● He taputapu uku hākawa waro. Hei tāpiri, ina hangaia ngā papa waro hākawa, me whakamahana i te pāmahana teitei, ā, he maha ngā wā ka haria mā te whakamahi i ngā taputapu hākawa waro. He ātete ki te wera, ā, kāore e whakangaro. Ka taea te pani i te waro rite-taimana (DLC) me ētahi atu paninga ki te mata hei whakapai ake i te mahi, hei whakaiti i te kino o te papa waro, hei ārai hoki i te horapa o te poke.
● Tēpu mahi karawiti silicon. Hei tauira, ko te tēpu mahi i roto i te mīhini whakairo, ko te mahi matua ko te whakaoti i te nekehanga whakaatu, me te nekehanga tino tika, tere-nui, ono-tohu-o-te-kore. Hei tauira, mō te mīhini whakairo me te taumira o te 100nm, te tika o te paparanga o te 33nm, me te whānui o te rārangi o te 10nm, me eke te tika o te tūnga o te tēpu mahi ki te 10nm, ko te tere o te takahanga me te matawai i te wa kotahi o te kopare-silicon he 150nm/s me te 120nm/s, ā, ko te tere o te matawai kopare e tata ana ki te 500nm/s, ā, me tino tika te nekehanga me te pumau o te tēpu mahi.
Te hoahoa kauwhata o te tēpu mahi me te tēpu nekehanga-iti (wāhanga wāhanga)
● He whakaata tapawhā uku hākawa waro. He āhua uaua, he rahi uaua, he hanganga māmā hoki ngā wāhanga matua o ngā taputapu ara iahiko whakauru matua pērā i ngā mīhini whakarārangi, ā, he uaua ki te whakarite i aua wāhanga uku hākawa waro. I tēnei wā, ko ngā kaihanga taputapu ara iahiko whakauru matua o te ao, pērā i a ASML i Netherlands, NIKON me CANON i Hapani, e whakamahi ana i te nui o ngā rauemi pērā i te karāhe moroiti me te cordierite hei whakarite i ngā whakaata tapawhā, ngā wāhanga matua o ngā mīhini whakarārangi, ā, e whakamahi ana i ngā uku hākawa waro waro hei whakarite i ētahi atu wāhanga hanganga mahi-teitei me ngā āhua māmā. Heoi, kua whakamahia e ngā tohunga mai i te China Building Materials Research Institute te hangarau whakarite motuhake hei whakatutuki i te whakarite i ngā whakaata tapawhā uku hākawa waro waro nui, āhua uaua, tino māmā, kua kati katoatia me ētahi atu wāhanga whatu hanganga me te mahi mō ngā mīhini whakarārangi.
Wā tuku: Oketopa-10-2024