Ka hoʻohana ʻana o nā keramika silicon carbide ma ke kahua semiconductor

ʻO ka mea makemake nui ʻia no nā ʻāpana kikoʻī o nā mīkini photolithography

Ma ke kahua semiconductor,keramika silicon carbidehoʻohana nui ʻia nā mea i nā lako koʻikoʻi no ka hana ʻana i ka kaapuni hoʻohui ʻia, e like me ka papa hana silicon carbide, nā ala alakaʻi,nā mea hoʻomālamalama, ʻūpā omo keramika, nā lima, nā diski wili, nā mea paʻa, a pēlā aku no nā mīkini lithography.

Nā ʻāpana seramika silikona carbideno nā mea semiconductor a me nā lako optical

● Pā wili keramika silikona. Inā hana ʻia ka pā wili me ka hao i hoʻolei ʻia a i ʻole ke kila kalapona, he pōkole kona ola lawelawe a he nui kona coefficient hoʻonui wela. I ka wā o ka hana ʻana o nā wafers silicon, ʻoiai i ka wā o ka wili wikiwiki a i ʻole ka polishing, ʻo ka ʻaʻahu a me ka deformation wela o ka pā wili e paʻakikī ai ka hōʻoia ʻana i ka palahalaha a me ka parallelism o ka wafer silicon. He paʻakikī kiʻekiʻe ka pā wili i hana ʻia me nā keramika silicon carbide a he haʻahaʻa ka ʻaʻahu, a ʻo ke coefficient hoʻonui wela e like me nā wafers silicon, no laila hiki ke wili ʻia a wili ʻia i ka wikiwiki kiʻekiʻe.
● Mea hana keramika silikona carbide. Eia kekahi, i ka wā e hana ʻia ai nā wafers silicon, pono lākou e hana i ka mālama wela wela kiʻekiʻe a lawe pinepine ʻia me ka hoʻohana ʻana i nā mea hana silicon carbide. He kūpaʻa lākou i ka wela a ʻaʻole e luku. Hiki ke hoʻopili ʻia ke kalapona daimana (DLC) a me nā uhi ʻē aʻe ma luna o ka ʻili e hoʻomaikaʻi i ka hana, hōʻoluʻolu i ka hōʻino ʻana o ka wafer, a pale i ka laha ʻana o ka haumia.
● Papa hana Silicon carbide. Ke lawe nei i ka papa hana i loko o ka mīkini lithography ma ke ʻano he laʻana, ʻo ka papa hana ke kuleana nui no ka hoʻopau ʻana i ka neʻe ʻana o ka hōʻike ʻana, e koi ana i ka neʻe wikiwiki kiʻekiʻe, nui-stroke, ʻeono-kekelē-o-ke kūʻokoʻa nano-pae ultra-precision. No ka laʻana, no ka mīkini lithography me ka hoʻonā o 100nm, ka pololei o ka overlay o 33nm, a me ka laulā laina o 10nm, pono ka pololei o ke kūlana o ka papa hana e hiki i ka 10nm, ʻo ka wikiwiki o ka mask-silicon wafer i ka manawa like a me ka scanning he 150nm/s a me 120nm/s, a kokoke ka wikiwiki o ka scanning mask i 500nm/s, a pono ka papa hana e loaʻa i ka pololei o ka neʻe ʻana a me ke kūpaʻa kiʻekiʻe loa.

Kiʻikuhi hoʻolālā o ka papa hana a me ka papa micro-motion (ʻāpana hapa)

● ʻO ke aniani huinaha keramika silikona carbide. ʻO nā ʻāpana koʻikoʻi i nā lako kaapuni hoʻohui koʻikoʻi e like me nā mīkini lithography he mau ʻano paʻakikī, nā ana paʻakikī, a me nā ʻano māmā hakahaka, e paʻakikī ai ka hoʻomākaukau ʻana i kēlā mau ʻāpana keramika silikona carbide. I kēia manawa, hoʻohana nā mea hana lako kaapuni hoʻohui honua nui, e like me ASML ma Netherlands, NIKON a me CANON ma Iapana, i ka nui o nā mea e like me ke aniani microcrystalline a me cordierite e hoʻomākaukau i nā aniani huinaha, nā ʻāpana koʻikoʻi o nā mīkini lithography, a hoʻohana i nā keramika silicon carbide e hoʻomākaukau i nā ʻāpana kūkulu hana kiʻekiʻe ʻē aʻe me nā ʻano maʻalahi. Eia nō naʻe, ua hoʻohana nā loea mai ka China Building Materials Research Institute i ka ʻenehana hoʻomākaukau ponoʻī e hoʻokō i ka hoʻomākaukau ʻana o nā aniani huinaha silicon carbide nui, ʻano paʻakikī, māmā loa, hoʻopaʻa piha ʻia a me nā ʻāpana optical kūkulu a me ka hana ʻē aʻe no nā mīkini lithography.