Kugwiritsa ntchito silicon carbide ceramics m'munda wa semiconductor

Zipangizo zomwe zimakonda kwambiri popangira zida zolondola za makina ojambulira zithunzi

Mu gawo la semiconductor,silicon carbide ceramicZipangizo zimagwiritsidwa ntchito kwambiri pazida zofunika kwambiri popanga ma circuit ophatikizika, monga silicon carbide worktable, guide rails,zowunikira, chuck yoyamwa ya ceramic, manja, ma disc opukutira, zida zogwirira ntchito, ndi zina zotero. za makina ojambulira.

Zigawo za ceramic za silicon carbideza zida za semiconductor ndi kuwala

● Chida chopukusira cha silicon carbide ceramic. Ngati chida chopukusira chapangidwa ndi chitsulo chosungunuka kapena chitsulo cha kaboni, nthawi yake yogwirira ntchito ndi yochepa ndipo nthawi yake yopukusira kutentha ndi yayikulu. Pakukonza ma wafer a silicon, makamaka panthawi yopukusira kapena kupukuta mwachangu, kuwonongeka ndi kusintha kwa kutentha kwa chida chopukusira zimapangitsa kuti zikhale zovuta kuonetsetsa kuti wafer wa silicon ndi wosalala komanso wofanana. Chida chopukusira chopangidwa ndi zida zopukusira za silicon carbide chili ndi kuuma kwakukulu komanso kuchepa kwa ntchito, ndipo nthawi yopukusira kutentha ndi yofanana ndi ya ma wafer a silicon, kotero imatha kuphwanyidwa ndikupukutidwa mwachangu.
● Chopangira cha silicon carbide. Kuphatikiza apo, ma wafer a silicon akapangidwa, amafunika kutenthedwa kwambiri ndipo nthawi zambiri amanyamulidwa pogwiritsa ntchito zida za silicon carbide. Amatha kupirira kutentha komanso sawononga. Carbon yofanana ndi diamondi (DLC) ndi zina zophimba zimatha kugwiritsidwa ntchito pamwamba kuti ziwonjezere magwiridwe antchito, kuchepetsa kuwonongeka kwa wafer, komanso kupewa kuipitsidwa kufalikira.
● Tebulo logwirira ntchito la silicon carbide. Potengera tebulo logwirira ntchito mu makina a lithography mwachitsanzo, tebulo logwirira ntchito limayang'anira kwambiri kutsiriza kayendedwe ka kuwonekera, komwe kumafuna kuyenda mwachangu, kothamanga kwambiri, komanso kolondola kwambiri kwa madigiri asanu ndi limodzi. Mwachitsanzo, pa makina a lithography okhala ndi resolution ya 100nm, kulondola kwa overlay kwa 33nm, ndi mulifupi wa mzere wa 10nm, kulondola kwa malo ogwirira ntchito kumafunika kuti kufika pa 10nm, kuthamanga kwa masiketi ndi silicon wafer nthawi imodzi ndi 150nm/s ndi 120nm/s motsatana, ndipo liwiro la masiketi ogwirira ntchito lili pafupi ndi 500nm/s, ndipo tebulo logwirira ntchito limafunika kukhala ndi kulondola kwakukulu komanso kukhazikika.

Chithunzi chojambula cha tebulo logwirira ntchito ndi tebulo loyenda pang'ono (gawo laling'ono)

● Galasi la sikweya la silicon carbide ceramic. Zigawo zofunika kwambiri mu zida zolumikizirana monga makina a lithography zili ndi mawonekedwe ovuta, miyeso yovuta, ndi kapangidwe kopepuka kopanda kanthu, zomwe zimapangitsa kuti zikhale zovuta kukonzekera zida zolumikizirana za silicon carbide. Pakadali pano, opanga zida zolumikizirana padziko lonse lapansi, monga ASML ku Netherlands, NIKON ndi CANON ku Japan, amagwiritsa ntchito zinthu zambiri monga galasi la microcrystalline ndi cordierite kukonzekera magalasi a sikweya, zigawo zazikulu za makina a lithography, ndikugwiritsa ntchito zidole za silicon carbide kukonzekera zigawo zina zogwirira ntchito bwino zokhala ndi mawonekedwe osavuta. Komabe, akatswiri ochokera ku China Building Materials Research Institute agwiritsa ntchito ukadaulo wokonzekera kuti akwaniritse kukonzekera magalasi akuluakulu, owoneka ngati ovuta, opepuka kwambiri, otsekedwa mokwanira a silicon carbide ceramic ndi zigawo zina zogwirira ntchito komanso zogwira ntchito za makina a lithography.