Gukoresha silicon carbide ceramics mu rwego rwa semiconductor

Ibikoresho bikunzwe cyane mu gukora ibice by'imashini zikora fotolithography neza

Mu rwego rwa semiconductor,keramike ya silikoni karubideIbikoresho bikoreshwa cyane cyane mu bikoresho by'ingenzi mu gukora imiyoboro ihuriweho, nka silicon carbide worktable, guided reils,utugarurarumuri, agapfunyika ko gukurura ibintu mu ibumba, amaboko, disiki zo gusya, ibikoresho, nibindi. ku mashini zitunganya lithography.

Ibice bya keramik bya silikoniku bikoresho bya semiconductor na optique

● Disiki yo gusya ya silicon carbide ceramic. Niba disiki yo gusya ikozwe mu cyuma gishongeshejwe cyangwa icyuma cya karuboni, igihe cyayo cyo kuyikoresha ni gito kandi ingano yayo yo kwaguka ni nini. Mu gihe cyo gutunganya silicon wafers, cyane cyane mu gihe cyo gusya cyangwa gusya vuba, kwangirika no guhinduka kw'ubushyuhe kwa disiki yo gusya bituma bigorana kwemeza ko silicon wafer igororotse kandi ingana. Disiki yo gusya ikozwe muri silicon carbide ceramics ifite ubukana bwinshi kandi idasaza cyane, kandi ingano yo kwaguka k'ubushyuhe ni imwe n'iya silicon wafers, bityo ishobora gusya no gusya ku muvuduko mwinshi.
● Igikoresho cya silicon carbide ceramic. Byongeye kandi, iyo silicon wafers zikozwe, zigomba gukorerwa ubushyuhe bwinshi kandi akenshi zitwarwa hakoreshejwe silicon carbide hardwares. Ntizirinda ubushyuhe kandi ntizingiza. Carbone isa na diyama (DLC) n'izindi paints zishobora gushyirwa ku buso kugira ngo zongere imikorere, zigabanye kwangirika kwa wafer, kandi zibuze ko umwanda ukwirakwira.
● Imbonerahamwe yo gukora ya silicon carbide. Dufashe urugero rw'imbonerahamwe yo gukora muri lithography, imbonerahamwe yo gukora ifite inshingano zo kurangiza ingendo zo kwerekana, isaba umuvuduko mwinshi, stroke nini, na nano-level ultra-precision movement yihuta cyane. Urugero, ku mashini ya lithography ifite resolution ya 100nm, overlay accuracy ya 33nm, n'ubugari bw'umurongo wa 10nm, accuracy yo gushyiramo imbonerahamwe yo gukora irakenewe kugira ngo igere kuri 10nm, umuvuduko wa mask-silicon wafer icyarimwe ni 150nm/s na 120nm/s, kandi umuvuduko wa mask scanning uri hafi ya 500nm/s, kandi imbonerahamwe yo gukora irasabwa kugira accuracy yo kugenda no guhagarara cyane.

Imbonerahamwe y'icyitegererezo cy'imbonerahamwe y'akazi n'imbonerahamwe y'ingendo nto (igice cy'igice)

● Indorerwamo ya kera ya silicon carbide. Ibice by'ingenzi mu bikoresho by'ingenzi bya circuit integrated nka lithography machines bifite imiterere igoye, ingano igoye, n'imiterere yoroheje, bigatuma bigorana gutegura ibice nk'ibyo bya silicon carbide. Kuri ubu, abakora ibikoresho mpuzamahanga bya circuit integrated, nka ASML mu Buholandi, NIKON na CANON mu Buyapani, bakoresha ibikoresho byinshi nka microcrystalline glass na cordierite mu gutegura indorerwamo kare, ibice by'ingenzi bya lithography machines, kandi bakoresha silicon carbide ceramics mu gutegura ibindi bice by'imiterere bifite imiterere yoroshye. Ariko, impuguke zo mu Bushinwa z'Ikigo cy'Ubushakashatsi ku Bikoresho by'Ubwubatsi zakoresheje ikoranabuhanga ryihariye ryo gutegura kugira ngo zigere ku gutegura indorerwamo nini, zifite imiterere igoye, zoroshye cyane, zifunze neza za silicon carbide ceramic ceramic hamwe n'ibindi bice by'imiterere n'imikorere bya lithography machines.