Bwato la Silicon Carbide Wafer Lopangidwanso ndi CVD

Boti la Wafer la Silicon Carbide Lopangidwanso ndi CVD

Kufotokozera Kwachidule:

Boti la VET Energy Recrystalized Silicon Carbide Wafer Boat ndi chinthu chogwira ntchito bwino kwambiri chomwe chimapangidwa kuti chipereke magwiridwe antchito okhazikika komanso odalirika kwa nthawi yayitali. Chimalimbana bwino ndi kutentha komanso kutentha kofanana, kuyera kwambiri, komanso kukana kukokoloka kwa nthaka, zomwe zimapangitsa kuti chikhale yankho labwino kwambiri pakugwiritsa ntchito ma wafer.

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Tsatanetsatane wa Zamalonda

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Katundu wa silicon carbide yobwezeretsedwanso

Silikoni carbide yobwezeretsedwanso (R-SiC) ndi chinthu cholimba kwambiri chomwe chili ndi kuuma kwachiwiri kuposa diamondi, chomwe chimapangidwa kutentha kwambiri kuposa 2000℃. Chimasunga zinthu zambiri zabwino za SiC, monga mphamvu yotentha kwambiri, kukana dzimbiri mwamphamvu, kukana okosijeni bwino, kukana kutentha kwambiri ndi zina zotero.

● Kapangidwe kabwino kwambiri ka makina. Silicon carbide yobwezeretsedwanso imakhala ndi mphamvu komanso kulimba kwambiri kuposa ulusi wa kaboni, imakana kugwedezeka kwambiri, imatha kugwira ntchito bwino m'malo otentha kwambiri, imatha kugwira ntchito bwino motsutsana ndi zinthu zosiyanasiyana. Kuphatikiza apo, ilinso ndi kusinthasintha kwabwino ndipo siiwonongeka mosavuta potambasula ndi kupindika, zomwe zimapangitsa kuti igwire bwino ntchito.

● Kukana dzimbiri kwambiri. Silicon carbide yobwezeretsedwanso imakhala ndi kukana dzimbiri kwambiri ku mitundu yosiyanasiyana ya zinthu, imatha kuletsa kuwonongeka kwa mitundu yosiyanasiyana ya zinthu zowononga, imatha kusunga mawonekedwe ake a makina kwa nthawi yayitali, imakhala yolimba kwambiri, kotero kuti imakhala ndi moyo wautali. Kuphatikiza apo, ilinso ndi kukhazikika kwabwino kwa kutentha, imatha kusintha kutentha, komanso kusintha momwe imagwiritsidwira ntchito.

● Kupukuta sikuchepa. Chifukwa njira yopukuta sichepa, palibe kupsinjika kotsalira komwe kungayambitse kusintha kapena kusweka kwa chinthucho, ndipo zigawo zokhala ndi mawonekedwe ovuta komanso olondola kwambiri zitha kukonzedwa.

重结晶碳化硅物理特性 Kapangidwe ka thupi ka Silicon Carbide Yobwezeretsedwanso
性质 / Katundu	典型数值 Mtengo Wamba
使用温度/ Kutentha kogwira ntchito (°C)	1600°C (ndi mpweya), 1700°C (malo ochepetsera kutentha)
SiC含量/ Zomwe zili mu SiC	> 99.96%
自由Si 含量/ Zaulere za Si	< 0.1%
体积密度/Kuchuluka kwa zinthu zambiri	2.60-2.70 g/cm³
气孔率/ Kuoneka ngati ma porosity	< 16%
抗压强度/ Mphamvu yopondereza	> 600MPa
常温抗弯强度/Mphamvu yopinda yozizira	80-90 MPa (20°C)
高温抗弯强度Mphamvu yopinda yotentha	90-100 MPa (1400°C)
热膨胀系数/ Kutentha kwakukulu @1500°C	4.70 10^-6/°C
导热系数/Kutentha kwa mpweya @1200°C	23W/m•K
杨氏模量/ Modulus yotanuka	240 GPa
抗热震性/ Kukana kutentha kwa kutentha	Zabwino kwambiri

VET Energy ndi awopanga weniweni wa zinthu zopangidwa ndi graphite ndi silicon carbide zokhala ndi zokutira za CVD,akhoza kuperekazosiyanasiyanazida zopangidwira makampani opanga ma semiconductor ndi photovoltaic. OGulu lanu laukadaulo limachokera ku mabungwe apamwamba ofufuza zamkati, likhoza kupereka mayankho aukadaulo ambirizanu.

Timapanga njira zamakono nthawi zonse kuti tipereke zipangizo zamakono kwambiri,ndiagwiritsa ntchito ukadaulo wapadera wokhala ndi patent, womwe ungapangitse kuti mgwirizano pakati pa chophimba ndi substrate ukhale wolimba komanso wosasinthasintha.

Matenda a mtima (CVD) SiC薄膜基本物理性能 Makhalidwe oyambira a CVD SiCchophimba
性质 / Katundu	典型数值 Mtengo Wamba
晶体结构 / Kapangidwe ka Crystal	Gawo la FCC β多晶，主要為（111）取向
密度 / Kuchulukana	3.21 g/cm³
硬度 / Kuuma	2500 维氏硬度 (500g katundu)
晶粒大小 / Tirigu Waukulu	2 ~ 10μm
纯度 / Kuyera kwa Mankhwala	99.99995%
热容 / Kutha Kutentha	640 J·kg^-1·K^-1
升华温度 / Kutentha kwa Sublimation	2700℃
抗弯强度 / Mphamvu Yosinthasintha	415 MPa RT 4-point
杨氏模量 / Young's Modulus	430 Gpa 4pt kupindika, 1300℃
导热系数 / KutenthalKuyendetsa bwino	300W·m^-1·K^-1
热膨胀系数 / Kukulitsa Kutentha (CTE)	4.5×10^-6K^-1