Ụgbọ Mmiri Wafer Silicon Carbide nke a rụgharịrị ọhụrụ nwere mkpuchi CVD

Nkọwa Dị Mkpirikpi:

Ụgbọ mmiri VET Energy nke e ji silicon carbide recrystallized mee bụ ngwaahịa dị elu nke e mere iji nye arụmọrụ na-adịgide adịgide ma bụrụ nke a pụrụ ịtụkwasị obi ruo ogologo oge. Ọ nwere ezigbo iguzogide okpomọkụ na otu okpomọkụ, ịdị ọcha dị elu, na iguzogide mbuze, nke na-eme ka ọ bụrụ ihe ngwọta zuru oke maka ngwa nhazi wafer.


Nkọwa Ngwaahịa

Akara Ngwaahịa

Njirimara nke carbide silicon a na-emegharị emegharị

Carbide silicon e ji aka rụọ (R-SiC) bụ ihe e ji arụ ọrụ nke ọma, nke siri ike karịa dayamọnd, nke a na-emepụta n'okpomọkụ dị elu karịa 2000℃. Ọ na-ejigide ọtụtụ ihe onwunwe dị mma nke SiC, dịka ike okpomọkụ dị elu, ike nchara siri ike, ike iguzogide oxidation dị mma, ezigbo ike iguzogide okpomọkụ na ihe ndị ọzọ.

● Njirimara igwe dị mma. Silicon carbide e ji ígwè rụọ nwere ike na nrụsi ike karịa eriri carbon, ọ na-eguzogide mmetụta dị elu, ọ na-arụ ọrụ nke ọma n'ebe okpomọkụ dị oke njọ, ọ na-arụ ọrụ nke ọma n'ọnọdụ dị iche iche. Na mgbakwunye, ọ na-enwekwa mgbanwe dị mma, ọ naghịkwa emebi ngwa ngwa site na ịgbatị na ịgbagọ, nke na-eme ka arụmọrụ ya ka mma nke ukwuu.

● Ike nchara dị elu. Carbide silicon e ji ígwè rụọ nke a na-emegharị emegharị nwere oke ike iguzogide nchara dị iche iche, nwere ike igbochi mbibi nke ọtụtụ ihe mgbasa ozi na-emebi emebi, nwere ike ịnọgide na-enwe ihe onwunwe ya ruo ogologo oge, nwee ike ijikọ siri ike, nke mere na ọ na-adịru ogologo oge. Na mgbakwunye, ọ nwekwara ezigbo nkwụsi ike okpomọkụ, nwere ike ịgbanwe na mgbanwe okpomọkụ ụfọdụ, melite mmetụta ojiji ya.

● Ịsa ihe anaghị ebelata. Ebe ọ bụ na usoro ịsa ihe anaghị ebelata, enweghị nrụgide fọdụrụ ga-akpata mgbanwe ma ọ bụ mgbawa nke ngwaahịa ahụ, a pụkwara ịkwadebe akụkụ ndị nwere ọdịdị dị mgbagwoju anya na oke nkenke.

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重结晶碳化硅物理特性

Njirimara anụ ahụ nke Silicon Carbide Recrystallized

性质 / Ihe onwunwe

典型数值 / Uru nkịtị

使用温度/ Okpomọkụ ọrụ (°C)

1600°C (na oxygen), 1700°C (ebe obibi na-ebelata)

SiC含量/ Ọdịnaya SiC

> 99.96%

自由Si含量/ Ọdịnaya Si n'efu

<0.1%

体积密度/Njupụta dị ukwuu

2.60-2.70 g/cm3

气孔率/ Ntụpọ doro anya

<16%

抗压强度/ Ike mkpakọ

> 600MPa

常温抗弯强度/Ike ịgbagọ oyi

80-90 MPa (20°C)

高温抗弯强度Ike ịgbagọ ọkụ

90-100 MPa (1400°C)

热膨胀系数/ Mgbasawanye okpomọkụ @1500°C

4.70 10-6/°C

导热系数/Ọgbakọ okpomọkụ @1200°C

23W/m•K

杨氏模量/ Modulu Elastic

240 GPA

抗热震性/ Mgbochi ujo okpomọkụ

Ọ dị oke mma

Ike VET bụ O nwere ike ịbụ na o meghị ihe ọbụla gbasara ya.ezigbo onye nrụpụta ngwaahịa graphite na silicon carbide ahaziri ahazi nwere mkpuchi CVD,ike inyedị iche icheakụkụ ahaziri ahazi maka ụlọ ọrụ semiconductor na photovoltaic. ONdị otu teknụzụ gị si n'ụlọ ọrụ nyocha kacha elu n'ime obodo, ha nwere ike inye azịza ihe ọkachamara karịamaka gị.

Anyị na-emepụta usoro dị elu mgbe niile iji nye ihe ndị ka elu,naAchọpụtala teknụzụ pụrụ iche nke nwere ikike pụrụ iche, nke nwere ike ime ka njikọ dị n'etiti mkpuchi ahụ na ihe mkpuchi ahụ sie ike ma ghara ịdị mfe ịgbawa.

CVD SiC薄膜基本物理性能

Njirimara anụ ahụ bụ isi nke CVD SiCmkpuchi

性质 / Ihe onwunwe

典型数值 / Uru nkịtị

晶体结构 / Nhazi kristal

FCC β nkebi多晶,主要为(111) 取向

密度 / Njupụta

3.21 g/cm³

硬度 / Ike siri ike

2500 维氏硬度: (ibu 500g)

晶粒大小 / SiZe ọka

2 ~ 10μm

纯度 / Ịdị ọcha nke kemịkalụ

99.99995%

热容 / Ike Okpomọkụ

640 J·kg-1·K-1

升华温度 / Okpomọkụ Sublimation

2700℃

抗弯强度 / Ike nke Flexural

415 MPa RT isi ihe anọ

杨氏模量 / Modulu Young

430 GPA 4pt gbagọrọ agbagọ, 1300℃

导热系数 / ThermalNhazigharị

300W·m-1·K-1

热膨胀系数 / Mgbasawanye Okpomọkụ (CTE)

4.5 × 10-6K-1

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