Recrystallized Silicon Carbide Wafer Boat With CVD Coating

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VET Energy Recrystallized Silicon Carbide Wafer Boat is a high-performance product designed to provide consistent and reliable performance over an extended period. It has super good heat resistance and thermal uniformity, high purity, erosion resistance, making it the perfect solution for wafer processing applications.


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Properties of recrystallized silicon carbide

Recrystallized silicon carbide (R-SiC) is a high-performance material with hardness second only to diamond, which is formed at a high temperature above 2000℃. It retains many excellent properties of SiC, such as high temperature strength, strong corrosion resistance, excellent oxidation resistance, good thermal shock resistance and so on.

● Excellent mechanical properties. Recrystallized silicon carbide has higher strength and stiffness than carbon fiber, high impact resistance, can play a good performance in extreme temperature environments, can play a better counterbalance performance in a variety of situations. In addition, it also has good flexibility and is not easily damaged by stretching and bending, which greatly improves its performance.

● High corrosion resistance. Recrystallized silicon carbide has high corrosion resistance to a variety of media, can prevent the erosion of a variety of corrosive media, can maintain its mechanical properties for a long time, has a strong adhesion, so that it has a longer service life. In addition, it also has good thermal stability, can adapt to a certain range of temperature changes, improve its application effect.

● Sintering does not shrink. Because the sintering process does not shrink, no residual stress will cause deformation or cracking of the product, and parts with complex shapes and high precision can be prepared.

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重结晶碳化硅物理特性

Physical properties of Recrystallized Silicon Carbide

性质 / Property

典型数值 / Typical Value

使用温度 / Working temperature (°C)

1600°C (with oxygen), 1700°C (reducing environment)

SiC含量 / SiC content

> 99.96%

自由Si含量 / Free Si content

< 0.1%

体积密度 / Bulk density

2.60-2.70 g/cm3

气孔率 / Apparent porosity

< 16%

抗压强度 / Compression strength

> 600 MPa

常温抗弯强度 / Cold bending strength

80-90 MPa (20°C)

高温抗弯强度 Hot bending strength

90-100 MPa (1400°C)

热膨胀系数 / Thermal expansion @1500°C

4.70 10-6/°C

导热系数 / Thermal conductivity @1200°C

23  W/m•K

杨氏模量 / Elastic modulus

240 GPa

抗热震性 / Thermal shock resistance

Extremely good

VET Energy is the real manufacturer of customized graphite and silicon carbide products with CVD coating, can supply various customized parts for semiconductor and photovoltaic industry. Our technical team comes from top domestic research institutions, can provide more professional material solutions for you.

We continuously develop advanced processes to provide more advanced materials, and have worked out an exclusive patented technology, which can make the bonding between the coating and the substrate tighter and less prone to detachment.

CVD SiC薄膜基本物理性能

Basic physical properties of CVD SiC coating

性质 / Property

典型数值 / Typical Value

晶体结构 / Crystal Structure

FCC β phase 多晶,主要为(111)取向

密度 / Density

3.21 g/cm³

硬度 / Hardness

2500 维氏硬度(500g load)

晶粒大小 / Grain SiZe

2~10μm

纯度 / Chemical Purity

99.99995%

热容 / Heat Capacity

640 J·kg-1·K-1

升华温度 / Sublimation Temperature

2700℃

抗弯强度 / Flexural Strength

415 MPa RT 4-point

杨氏模量 / Young' s Modulus

430 Gpa 4pt bend, 1300℃

导热系数 / ThermaConductivity

300W·m-1·K-1

热膨胀系数 / Thermal Expansion(CTE)

4.5×10-6K-1

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Warmly welcome you to visit our factory, let's have further discussion!

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