Waka Angiangi Silicon Carbide kua Whakahoutia me te Paninga CVD

Whakaahuatanga Poto:

He hua mahi-teitei te VET Energy Recrystallized Silicon Carbide Wafer Boat i hangaia hei whakarato i te mahi pumau me te pono mō te wā roa. He tino pai te ātete ki te wera me te ōritetanga o te wera, he tino parakore, he ātete ki te horo, ā, koinei te otinga tino pai mō ngā tono tukatuka wafer.


Taipitopito Hua

Ngā Tohu Hua

Ngā āhuatanga o te karawiti silicon kua whakakākanotia anō

Ko te karawiti silicon kua whakakōkītia anō (R-SiC) he rauemi mahi-teitei, ko tōna pakeke te tuarua ki te taimana, ka hangaia i te pāmahana teitei i runga ake i te 2000℃. He maha ngā āhuatanga pai o te SiC e mau tonu ana, pērā i te kaha pāmahana teitei, te ātete kaha ki te waikura, te ātete pai ki te waikura, te ātete pai ki te ru wera me ētahi atu.

● Ngā āhuatanga miihini tino pai. He kaha ake, he pakari ake hoki te karawiti silicon kua whakakōkītia anō i te muka waro, he ātete nui ki te pānga, ka taea te mahi pai i roto i ngā taiao pāmahana tino kino, ka taea te mahi taurite pai ake i roto i ngā āhuatanga maha. Hei tāpiri, he pai hoki tōna ngāwari, ā, kāore e pakaru wawe i te totoro me te piko, ka tino whakapai ake i tana mahi.

● He ātete nui ki te waikura. He ātete nui te warowaihā silicon kua whakakōkīhia ki ngā momo rauemi, ka ārai i te mimiti o ngā momo rauemi waikura, ka pupuri i ōna āhuatanga miihini mō te wā roa, he kaha te piri, ā, he roa ake tōna ora mahi. Hei tāpiri, he pai hoki tōna pumau wera, ka taea te urutau ki tētahi whānuitanga o ngā huringa pāmahana, me te whakapai ake i tōna pānga tono.

● Kāore te mahi whakahinuhinu e mimiti. Nā te mea kāore te tukanga whakahinuhinu e mimiti, kāore he ahotea toenga e puta ai he rerekētanga, he ngatata rānei o te hua, ā, ka taea te whakarite i ngā wāhanga he uaua te āhua me te tino tika.

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重结晶碳化硅物理特性

Ngā āhuatanga ā-tinana o te Silicon Carbide kua Whakakāhia anō

性质 / Taonga

典型数值 / Uara Noa

使用温度/ Te pāmahana mahi (°C)

1600°C (me te hāora), 1700°C (taiao whakaiti)

SiC含量/ Ihirangi SiC

> 99.96%

自由Si含量/ Ngā ihirangi Si Koreutu

< 0.1%

体积密度/Kīanga papatipu

2.60-2.70 karamu/cm3

气孔率/ Te āhua o te pūngao

< 16%

抗压强度/ Kaha pēhanga

> 600MPa

常温抗弯强度/Kaha piko makariri

80-90 MPa (20°C)

高温抗弯强度Kaha piko wera

90-100 MPa (1400°C)

热膨胀系数/ Te whānui wera i te 1500°C

4.70 10-6/°C

导热系数/Te kawe wera @1200°C

23W/m•K

杨氏模量/ Te tauwehenga rapa

240 GPa

抗热震性/ Ātete ki te ru wera

Tino pai

Ko te Pūngao VET tekaihanga tūturu o ngā hua karāpeti me te karāpeti silicon kua whakaritea me te paninga CVD,ka taea te tukungā momongā wāhanga kua whakaritea mō te umanga semiconductor me te photovoltaic. ONō ngā umanga rangahau ā-rohe nui tō mātou tīma hangarau, ā, ka taea e rātou te whakarato i ngā otinga rauemi ngaio ake.māu.

Ka whakawhanake tonu mātou i ngā tukanga matatau hei whakarato i ngā rauemi matatau ake,mekua hangaia he hangarau motuhake kua patenttia, hei whakakaha ake i te hononga i waenga i te paninga me te papa, ā, hei whakaiti ake i te ngāwari o te wetewete.

CVD SiC薄膜基本物理性能

Ngā āhuatanga ā-tinana taketake o te CVD SiCpaninga

性质 / Taonga

典型数值 / Uara Noa

晶体结构 / Hanganga Karaihe

Wāhanga β FCC多晶,主要为(111)取向

密度 / Kiato

3.21 karamu/cm³

硬度 / Te pakeketanga

2500 维氏硬度(500g kawenga)

晶粒大小 / Rahi o te Witi

2~10μm

纯度 / Te Parakore o te Matū

99.99995%

热容 / Te kaha wera

640 J·kg-1·K-1

升华温度 / Te Pāmahana Whakatōtō

2700℃

抗弯强度 / Kaha Whakapiko

415 MPa RT 4-ira

杨氏模量 / Te Tauwehenga o te Young

430 Gpa 4pt piko, 1300℃

导热系数 / Te whakamahanalTe kawe i te hiko

300W·m-1·K-1

热膨胀系数 / Te Whanuitanga Wera (CTE)

4.5×10-6K-1

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