Recrystallized Silicon Carbide Wafer Nkoj Nrog CVD Txheej

Kev Piav Qhia Luv:

VET Zog Recrystallized Silicon Carbide Wafer Boat yog cov khoom ua tau zoo uas tsim los muab kev ua haujlwm zoo thiab txhim khu kev qha rau lub sijhawm ntev. Nws muaj kev tiv thaiv cua sov zoo heev thiab kev sib xws thermal, kev ntshiab siab, kev tiv thaiv kev yaig, ua rau nws yog qhov kev daws teeb meem zoo tshaj plaws rau kev siv wafer.


Cov Khoom Qhia Txog Khoom

Cov Cim Npe Khoom

Cov khoom ntawm recrystallized silicon carbide

Recrystallized silicon carbide (R-SiC) yog ib yam khoom siv ua tau zoo heev uas muaj qhov nyuaj thib ob tsuas yog pob zeb diamond xwb, uas yog tsim los ntawm qhov kub siab tshaj 2000 ℃. Nws khaws cia ntau yam khoom zoo ntawm SiC, xws li lub zog kub siab, tiv taus corrosion zoo, tiv taus oxidation zoo heev, tiv taus thermal shock zoo thiab lwm yam.

● Cov khoom siv kho tshuab zoo heev. Recrystallized silicon carbide muaj zog thiab tawv dua li carbon fiber, tiv taus kev cuam tshuam siab, tuaj yeem ua tau zoo hauv qhov kub thiab txias heev, tuaj yeem ua tau zoo dua hauv ntau yam xwm txheej. Tsis tas li ntawd, nws kuj muaj kev ywj pheej zoo thiab tsis yooj yim puas los ntawm kev ncab thiab khoov, uas ua rau nws ua tau zoo dua.

● Tiv taus xeb tau zoo heev. Cov silicon carbide uas rov ua dua tshiab muaj kev tiv taus xeb tau zoo rau ntau yam khoom siv, tuaj yeem tiv thaiv kev puas tsuaj ntawm ntau yam khoom siv corrosive, tuaj yeem tswj nws cov khoom siv kho tshuab tau ntev, muaj kev nplaum zoo, yog li nws muaj lub neej ua haujlwm ntev dua. Tsis tas li ntawd, nws kuj muaj kev ruaj khov thermal zoo, tuaj yeem hloov kho rau qee qhov kev hloov pauv kub, txhim kho nws cov txiaj ntsig ntawm kev siv.

● Kev sintering tsis ntsws. Vim tias cov txheej txheem sintering tsis ntsws, tsis muaj kev ntxhov siab seem yuav ua rau deformation lossis tawg ntawm cov khoom, thiab cov khoom uas muaj cov duab nyuaj thiab qhov tseeb siab tuaj yeem npaj tau.

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重结晶碳化硅物理特性

Cov khoom siv lub cev ntawm Recrystallized Silicon Carbide

性质 / Khoom vaj khoom tsev

典型数值 / Tus nqi ib txwm muaj

使用温度/ Kub ua haujlwm (°C)

1600 ° C (nrog oxygen), 1700 ° C (txo qhov chaw ib puag ncig)

SiC含量/ Cov ntsiab lus SiC

> 99.96%

自由Si 含量/ Cov ntsiab lus Si pub dawb

< 0.1%

体积密度/Qhov ceev ntawm cov khoom loj

2.60-2.70 g/cm33

气孔率Pom tseeb porosity

< 16%

抗压强度/ Lub zog nias

> 600MPa

常温抗弯强度/Lub zog khoov txias

80-90 MPa (20°C)

高温抗弯强度Lub zog khoov kub

90-100 MPa (1400 ° C)

热膨胀系数/ Kev nthuav dav ntawm cua sov @ 1500 ° C

4.70 10-6/°C

导热系数/Kev ua kom sov tau @1200 ° C

23W/m•K

杨氏模量/ Cov qauv elastic

240 GPa

抗热震性/ Kev tiv thaiv thermal poob siab

Zoo kawg nkaus

VET Zog yog lubChaw tsim khoom tiag tiag ntawm cov khoom siv graphite thiab silicon carbide uas muaj CVD txheej,muaj peev xwm muab khoomntau yamcov khoom siv kho kom haum rau kev lag luam semiconductor thiab photovoltaic. Okoj pab neeg kev tshaj lij los ntawm cov tsev kawm tshawb fawb hauv tsev sab saum toj, tuaj yeem muab cov kev daws teeb meem ntau duarau koj.

Peb pheej tsim cov txheej txheem siab heev los muab cov ntaub ntawv siab dua,thiabtau ua haujlwm tawm ib txoj kev siv tshuab tshwj xeeb uas tau txais patented, uas tuaj yeem ua rau kev sib txuas ntawm cov txheej thiab lub substrate nruj dua thiab tsis yooj yim tawg.

CVD SiC薄膜基本物理性能

Cov khoom siv lub cev yooj yim ntawm CVD SiCtxheej

性质 / Khoom vaj khoom tsev

典型数值 / Tus nqi ib txwm muaj

晶体结构 / Cov Qauv Siv Crystal

FCC β theem多晶, 主要为(111) Ib

密度 / Qhov Ceev

3.21 g/cm³

硬度 / Qhov nyuaj

2500 维氏硬度 (500g load)

晶粒大小 / Cov nplej loj

2 ~ 10μm

纯度 / Kev Ntshiab Tshuaj

99.99995%

Cov duab / Peev Xwm Kub

640 J·kg-1·K-1

升华温度 Kub Sublimation

2700 ℃

抗弯强度 Lub zog flexural

415 MPa RT 4-point

杨氏模量 / Cov Modulus Hluas

430 Gpa 4pt khoov, 1300 ℃

导热系数 / ThermalKev coj ua hluav taws xob

300W·m-1·K-1

热膨胀系数 / Kev Nthuav Dav Kub (CTE)

4.5 × 10-6K-1

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