Chikepe cheSilicon Carbide Wafer chakagadziriswazve chine CVD Coating

Tsananguro pfupi:

VET Energy Recrystallized Silicon Carbide Wafer Boat chigadzirwa chine simba guru chakagadzirirwa kupa mashandiro akasimba uye akavimbika kwenguva yakareba. Chine simba rakanaka kwazvo rekudzivirira kupisa uye kufanana kwekupisa, kuchena kwakanyanya, uye kuramba kukurwa kwevhu, zvichiita kuti ive mhinduro yakakwana yekugadzirisa wafer.


Ruzivo rweChigadzirwa

Matagi eChigadzirwa

Hunhu hwesilicon carbide yakagadziriswazve

Silicon carbide (R-SiC) yakagadzirwazve ine simba guru uye kuomarara kuri pamusoro pedhaimani, iyo inoumbwa pakupisa kwakanyanya kupfuura 2000℃. Inoramba iine hunhu hwakanaka hweSiC, hwakadai sekusimba kwekupisa kwakanyanya, kuramba ngura kwakasimba, kuramba oxidation kwakanaka, kuramba kupisa kwakanyanya nezvimwewo.

● Hunhu hwakanaka kwazvo hwemakanika. Silicon carbide yakagayiwazve ine simba rakawanda uye kuomarara kupfuura carbon fiber, inodzivirira zvakanyanya, inogona kuita basa rakanaka munzvimbo dzinopisa zvakanyanya, inogona kuita basa riri nani mumamiriro akasiyana-siyana. Pamusoro pezvo, inewo kuchinjika kwakanaka uye haikuvadzwi nyore nyore nekutambanudza nekukotama, izvo zvinovandudza zvikuru mashandiro ayo.

● Kudzivirira ngura zvakanyanya. Silicon carbide yakadzokororwa ine kudzivirira ngura zvakanyanya kune zvakasiyana-siyana zvemidziyo, inogona kudzivirira kuparadzwa kwemhando dzakasiyana dzemidziyo inoparadza, inogona kuchengetedza hunhu hwayo hwemakanika kwenguva yakareba, ine kunamira kwakasimba, kuitira kuti ive nehupenyu hwakareba hwekushanda. Pamusoro pezvo, inewo kugadzikana kwakanaka kwekupisa, inogona kuchinjika kune mamwe marudzi ekuchinja kwekushisa, uye inovandudza mashandiro ayo.

● Kusvina hakutsvedzi. Nekuti maitiro ekusvina haatsvedzi, hapana kushushikana kunoramba kuripo kunokonzera kucheneruka kana kutsemuka kwechigadzirwa, uye zvikamu zvine maumbirwo akaomarara uye kunyatsoita basa zvakanaka zvinogona kugadzirwa.

IMG_9497
IMG_9503

重结晶碳化硅物理特性

Hunhu hwepanyama hweSilicon Carbide Yakagadziriswazve

性质 / Pfuma

典型数值 / Kukosha Kwakajairika

使用温度/ Tembiricha yekushanda (°C)

1600°C (ine okisijeni), 1700°C (nzvimbo inoderedza kupisa)

SiC含量/ Zviri mukati meSiC

> 99.96%

自由Si含量/ Zvemukati zveSi zvemahara

< 0.1%

体积密度/Kuwanda kwehuwandu

2.60-2.70 g/cm3

气孔率/ Kuoneka kwekureruka

< 16%

抗压强度/ Simba rekudzvanya

> 600MPa

常温抗弯强度/Simba rekukotama rinotonhora

80-90 MPa (20°C)

高温抗弯强度Simba rinopisa rekukotama

90-100 MPa (1400°C)

热膨胀系数/ Kuwedzera kwekupisa @1500°C

4.70 10-6/°C

导热系数/Kufambisa kwekupisa @1200°C

23W/m•K

杨氏模量/ Modulus ye elastic

240 GPa

抗热震性/ Kudzivirira kupisa

Zvakanaka kwazvo

VET Energy ndiyo iyomugadziri chaiye wezvigadzirwa zve graphite ne silicon carbide zvakagadzirwa neCVD coating,anogona kupazvakasiyana-siyanazvikamu zvakagadzirirwa zve semiconductor uye photovoltaic industry. OChikwata chedu chehunyanzvi chinobva kumasangano makuru ekutsvagisa emuno, chinogona kupa mhinduro dzehunyanzvi.zvako.

Tinogara tichigadzira maitiro epamusoro-soro kuti tipe zvinhu zvepamusoro-soro,uyevakashanda tekinoroji ine patent yakasarudzika, iyo inogona kuita kuti kubatana pakati pekupenda ne substrate kuve kwakasimba uye kusanyanya kupatsanurwa.

CVD SiC薄膜基本物理性能

Hunhu hweCVD SiCkuputira

性质 / Pfuma

典型数值 / Kukosha Kwakajairika

晶体结构 / Chimiro cheKristaro

Chikamu cheFCC β多晶,主要為(111)取向

密度 / Kuwanda kwehuwandu

3.21 g/cm³

硬度 / Kuomarara

2500 维氏硬度 (500g mutoro)

晶粒大小 / Saizi yeZviyo

2 ~ 10μm

纯度 / Kuchena kwemakemikari

99.99995%

热容 / Kugona Kupisa

640 J·kg-1·K-1

升华温度 / Kupisa kweSublimation

2700℃

抗弯强度 / Simba reKuchinjika

415 MPa RT ine mapoinzi mana

杨氏模量 / Modulus yeVadiki

430 Gpa 4pt bend, 1300℃

导热系数 / ThermalKufambisa kwemhepo

300W·m-1·K-1

热膨胀系数 / Kuwedzera kweThermal (CTE)

4.5×10-6K-1

1

2

Tinokugamuchirai neushamwari kuti mushanyire fekitori yedu, ngatikurukurei zvakawanda!

生产设备

 

公司客户

 


  • Yakapfuura:
  • Zvinotevera:

  • Kutaurirana paWhatsApp paIndaneti!