Mugadziri weChina SiC Coated Graphite MOCVD Epitaxy Susceptor

Tsananguro pfupi:

Kuchena < 5ppm
‣ Kufanana kwakanaka kwekushandisa zvinodhaka
‣ Kuwanda kwakanyanya uye kunamira
‣ Inodzivirira ngura zvakanaka uye inodzivirira kabhoni

‣ Kugadzirisa kwehunyanzvi
‣ Nguva pfupi yekushanda
‣ Kuwanikwa kwakagadzikana
‣ Kudzora hunhu uye kuvandudzwa nguva dzose

Epitaxy yeGaN paSapphire(RGB/Mini/Micro LED);
Epitaxy yeGaN paSi Substrate(UVC);
Epitaxy yeGaN paSi Substrate(Mudziyo wemagetsi);
Epitaxy yeSi paSi Substrate(Dunhu rakabatanidzwa);
Epitaxy yeSiC paSiC Substrate(Chikamu chepasi);
Epitaxy yeInP paInP

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Ruzivo rweChigadzirwa

Matagi eChigadzirwa

MOCVD Susceptor yemhando yepamusoro inotengwa online muChina

Wafer inofanira kupfuura nematanho akati wandei isati yagadzirira kushandiswa mumidziyo yemagetsi. Imwe nzira inokosha ndeye silicon epitaxy, umo wafer dzinotakurwa pa graphite susceptors. Hunhu uye mhando ye susceptors zvine chekuita nehunhu hwe epitaxial layer yewafer.

Pamatanho ekuiswa kwemafirimu matete akadai se epitaxy kana MOCVD, VET inopa michina ye graphite yakachena kwazvo inoshandiswa kutsigira substrates kana "wafers". Pakati pemaitiro aya, michina iyi, epitaxy susceptors kana mapuratifomu esatellite eMOCVD, anotanga kuiswa munzvimbo yekuiswa:

● Kupisa kwakanyanya.
● Muchina wekupisa wakawanda.
● Kushandisa zvinhu zvinogadzira gasi zvine simba.
● Hapana kusvibiswa, hapana kusvuuka.
● Kusabatwa nemaacid akasimba panguva yekuchenesa

VET Energy ndiyo kambani chaiyo inogadzira zvigadzirwa zve graphite ne silicon carbide zvakagadzirwa ne coating ye semiconductor ne photovoltaic industry. Chikwata chedu chehunyanzvi chinobva kumasangano makuru ekutsvagisa emuno, chinogona kukupa mhinduro dzehunyanzvi.

Tinogara tichigadzira maitiro epamusoro-soro kuti tipe zvinhu zvepamusoro-soro, uye takagadzira tekinoroji yakasarudzika ine patent, iyo inogona kuita kuti kubatana pakati pe coating ne substrate kuve kwakasimba uye kusanyanya kupatsanurwa.

Zvimiro zvezvigadzirwa zvedu:

1. Kudzivirira kupisa kwakanyanya kusvika 1700℃.
2. Kuchena kwakanyanya uye kufanana kwekupisa
3. Kudzivirira ngura kwakanyanya: acid, alkali, munyu uye organic reagents.
4. Kuoma kwakanyanya, pamusoro pakaoma, zvidimbu zvitete.
5. Hupenyu hwebasa hwakareba uye hwakasimba

CVD SiC Hunhu hweCVD SiCkuputira
Pfuma	Kukosha Kwakajairika
Chimiro cheKristaro	FCC β phase polycrystalline, kunyanya (111) kurongeka
Kuwanda kwevanhu	3.21 g/cm³
Kuoma	Kuomarara kweVickers 2500 (500g mutoro)
Zviyo Zvikuru	2 ~ 10μm
Kuchena kwemakemikari	99.99995%
Kugona Kupisa	640 J·kg^-1·K^-1
Kupisa kweSublimation	2700℃
Simba reKuchinjika	415 MPa RT ine mapoinzi mana
Modulus yeVadiki	430 Gpa 4pt bend, 1300℃
Kufambisa kwekupisa	300W·m^-1·K^-1
Kuwedzera kweThermal (CTE)	4.5×10^-6K^-1