I-Graphite Wafer Boat for Deposition

Inkcazelo emfutshane:

I-VET Energy graphite wafer boat ngumgangatho ophezulu osetyenziswayo olungiselelwe iinkqubo zokubeka kwi-semiconductor, photovoltaic kunye namanye amashishini. Yenziwe ngobunyulu obuphezulu, ubuninzi bezinto zegraphite, le mveliso inokumelana nobushushu obuphezulu, ukumelana nokugqwala, ukuzinza kwe-dimensional kunye nezinye iimpawu, kwaye inokubonelela ngeqonga lokuthwala elizinzileyo lenkqubo yokubekwa ukuze kuqinisekiswe ukufana kunye nokunyanzeliswa kwefilimu encinci.

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Iinkcukacha zeMveliso

Iithegi zeMveliso

I-PECVD yesikhephe segraphite esivela kwi-VET Energy senziwa nge-high-purity isostatic graphite, equkethe i-porosity engaphantsi kwe-15% kunye nobunzima bomhlaba u-Ra≤1.6μm. Uzinzo oluphezulu lwe-dimensional kunye ne-thermal conductivity iqinisekisa ukufakwa kwefilimu efanayo kunye nokuphucula ukusebenza kakuhle kweeseli.

Imathiriyeli yeGrafite evela kwi-SGL:

Iparamitha eqhelekileyo: R6510
Isalathiso	Umgangatho wovavanyo	Ixabiso	Iyunithi
Ubungakanani obuphakathi kweenkozo	ISO 13320	10	μm
Unizi lolwapho kuyiwa khona	I-DIN IEC 60413/204	1.83	g/cm³
I-porosity evulekile	DIN66133	10	%
Ubungakanani bepore obuphakathi	DIN66133	1.8	μm
Ukufikeleleka	DIN 51935	0.06	cm²/s
Ubunzima be-Rockwell HR5/100	I-DIN IEC60413/303	90	HR
Ukuxhatshazwa kombane okuthe ngqo	I-DIN IEC 60413/402	13	μΩm
Amandla e-Flexural	I-DIN IEC 60413/501	60	MPa
Amandla acinezelayo	DIN 51910	130	MPa
Imodyuli yolutsha	DIN 51915	11.5×10³	MPa
Ukwandiswa kweThermal(20-200℃)	DIN 51909	4.2X10^-6	K^-1
I-Thermal conductivity (20℃)	DIN 51908	105	Wm^-1K^-1

Yenzelwe ngokukodwa ukwenziwa komgangatho ophezulu wokwenziwa kweeseli zelanga, ezixhasa i-G12 ubungakanani obukhulu bokusetyenzwa kwe-wafer. Uyilo oluphuculweyo lomthwali wonyusa kakhulu umthamo, uvumela amazinga esivuno aphezulu kunye neendleko eziphantsi zemveliso.

Into	Uhlobo	Inombolo yomphathi wewafer
PEVCD Grephite iphenyane - The 156 series	156-13 isikhephe segrephite	144
	156-19 isikhephe segrephite	216
	156-21 isikhephe segrephite	240
	156-23 isikhephe segraphite	308
PEVCD Grephite iphenyane - The 125 series	125-15 isikhephe segrephite	196
	125-19 isikhephe segrephite	252
	125-21 isikhephe se-grphite	280