Inkxaso ye-PECVD Graphite Wafer

Inkcazo emfutshane:

Yenzelwe ukuchaneka nokusebenza kakuhle, i-VET Energy's Graphite Wafer Support yeyona nto ifanelekileyo yokusetyenziswa ekucutshungulweni kwe-wafer ephucukileyo, apho uzinzo oluphezulu lobushushu kunye nokusebenza rhoqo kubalulekile. Nokuba usebenza ngee-semiconductor wafers okanye ezinye izinto ezithambileyo, le nkxaso ye-graphite esemgangathweni iya kuphucula ukuthembeka kwenkqubo yakho kunye nomgangatho wemveliso, nto leyo eyenza ukuba ibe yinxalenye ebalulekileyo kwimveliso yanamhlanje.

Thumela i-imeyile kuthi Khuphela njengePDF

Iinkcukacha zeMveliso

Iithegi zeMveliso

Inkxaso ye-wafer ye-graphite yenkqubo ye-VET Energy PECVD yi-core consumable eyenzelwe inkqubo ye-PECVD (i-plasma enhanced chemical vapor deposition). Le mveliso yenziwe ngezinto ze-graphite ezicocekileyo kakhulu, ezinobunzima obuphezulu, ezinokumelana nobushushu obuphezulu, ukumelana nokugqwala, uzinzo olulinganayo kunye nezinye iimpawu, inokubonelela ngeqonga lenkxaso elizinzileyo lenkqubo ye-PECVD, ukuqinisekisa ukufana kunye nokuthamba kwefilimu.

Uyilo "lwenkxaso yegrafiti" lwenkxaso ye-VET Energy graphite wafer alunakuxhasa kuphela i-wafer ngokufanelekileyo, kodwa lukwabonelela ngozinzo lobushushu kwindawo yobushushu obuphezulu kunye noxinzelelo oluphezulu lwe-PECVD ukuqinisekisa uzinzo lwenkqubo.

Inkxaso ye-wafer ye-graphite yenkqubo ye-VET Energy PECVD ineempawu ezilandelayo:

▪Ubunyulu obuphezulu:umxholo wokungcola ophantsi kakhulu, kuphephe ukungcoliswa kwefilimu, ukuqinisekisa umgangatho wefilimu.

▪Uxinano oluphezulu:uxinano oluphezulu, amandla aphezulu oomatshini, inokumelana nobushushu obuphezulu kunye noxinzelelo oluphezulu lwe-PECVD.

▪Uzinzo oluhle lobukhulu:utshintsho oluncinci olunobukhulu kubushushu obuphezulu ukuqinisekisa uzinzo lwenkqubo.

▪Ukuqhuba kakuhle kobushushu:ukudlulisa ubushushu ngokufanelekileyo ukuthintela ukugqithisa kakhulu kwe-wafer.

▪Ukumelana nokugqwala okunamandla:Iyakwazi ukumelana nokukhukuliseka kweegesi ezahlukeneyo ezirhabaxa kunye neplasma.

▪Inkonzo eyenzelwe wena:Iitafile zenkxaso yegrafiti ezinobukhulu obahlukeneyo kunye neemilo zinokwenziwa ngokwezifiso ngokweemfuno zabathengi.

Izinto zegrafayithi ezivela kwi-SGL:

Ipharamitha eqhelekileyo: R6510
Isalathiso	Umgangatho wovavanyo	Ixabiso	Iyunithi
Ubungakanani obuqhelekileyo bengqolowa	I-ISO 13320	10	μm
Unizi lolwapho kuyiwa khona	I-DIN IEC 60413/204	1.83	g/cm³
I-Porosity evulekileyo	I-DIN66133	10	%
Ubungakanani bembobo ephakathi	I-DIN66133	1.8	μm
Ukukwazi ukuchacha	I-DIN 51935	0.06	cm²/s
Ubunzima beRockwell HR5/100	I-DIN IEC60413/303	90	HR
Ukumelana nombane okuthe ngqo	I-DIN IEC 60413/402	13	μΩm
Amandla okugobeka	I-DIN IEC 60413/501	60	I-MPa
Amandla oxinzelelo	I-DIN 51910	130	I-MPa
Imodyuli kaYoung	I-DIN 51915	11.5×10³	I-MPa
Ukwandiswa kobushushu (20-200℃)	I-DIN 51909	4.2X10^-6	K^-1
Ukuqhuba kobushushu (20℃)	I-DIN 51908	105	Wm^-1K^-1

Yenzelwe ngokukodwa ukwenziwa kweeseli zelanga ezisebenza kakuhle kakhulu, ixhasa ukusetyenzwa kwe-wafer enkulu ye-G12. Uyilo olulungiselelweyo lwenkampani yokuthwala lunyusa kakhulu imveliso, nto leyo evumela amazinga aphezulu emveliso kunye neendleko zemveliso eziphantsi.

Into	Uhlobo	Inombolo yesithuthi se-wafer
Inqanawa ye-PEVCD Grephite - Uthotho lwe-156	Isikhephe segrephite esingu-156-13	144
	Isikhephe segrephite se-156-19	216
	Isikhephe segrephite se-156-21	240
	Inqanawa yegrafiti ye-156-23	308
Inqanawa ye-PEVCD Grephite - Uthotho lwe-125	Isikhephe segrephite esingu-125-15	196
	Isikhephe segrephite esingu-125-19	252
	Inqanawa ye-grphite eyi-125-21	280