I-Graphite Carrier yenkqubo ye-PECVD

Inkcazelo emfutshane:

Amandla e-VETI-PECVD Graphite Boat yeSolar Panel licandelo eliphambili elenzelwe ngokukodwa ukuveliswa kweepaneli zelanga eziphezulu. Isetyenziswe kwiinkqubo ze-Plasma Enhanced Chemical Vapor Deposition (PECVD), esi sikhephe segraphite siqinisekisa ukuphatha izinto ezifanelekileyo kunye nokubekwa okufanayo kweefilimu ezincinci kwiiseli zelanga. Yenzelwe ukuchaneka kunye nokuqina, ibonelela nge-conductivity ephezulu ye-thermal, ukumelana ne-corrosion ephezulu, kunye nokungcoliswa okuncinci, okuyimfuneko ekuveliseni iipaneli zelanga ezisebenzayo, eziphezulu.

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Iinkcukacha zeMveliso

Iithegi zeMveliso

Amandla e-VETInkqubo ye-PECVD ye-graphite carrier yinkqubo yokusetyenziswa komgangatho ophezulu elungiselelwe i-PECVD (i-plasma ephuculweyo yokubeka umphunga wekhemikhali) inkqubo. Lo mphathiswa wegrafu wenziwa ngococeko oluphezulu, olunoxinano oluphezulu lwegraphite, kunye nokumelana nobushushu obuphezulu, ukuxhathisa umhlwa, uzinzo lwe-dimensional kunye nezinye iimpawu, unokubonelela ngeqonga elizinzileyo lokuthwala inkqubo ye-PECVD, ukuze kuqinisekiswe ukufana kunye nokuthe tyaba kokubekwa kwefilimu encinci.

Abathwali beGraphite kwinkqubo ye-PECVD banezi mpawu zilandelayo:

▪ Ukucoceka okuphezulu: umxholo wokungcola ophantsi kakhulu, ukuphepha ukungcoliswa kwefilimu kunye nokuqinisekisa umgangatho wefilimu.

▪ Uxinaniso oluphezulu: ubuninzi obuphezulu, amandla aphezulu omatshini, okwazi ukumelana nobushushu obuphezulu kunye noxinzelelo oluphezulu lwe-PECVD indawo.

▪ Uzinzo oluhle lomgangatho: utshintsho oluncinci lwe-dimensional kwiqondo lokushisa eliphezulu, ukuqinisekisa ukuzinza kwenkqubo.

▪ I-thermal conductivity egqwesileyo: ngokufanelekileyo ukudlulisa ubushushu ukuthintela ukufudumeza kwe-wafer.

▪ Ukumelana nomhlwa okunamandla: iyakwazi ukuxhathisa ukhukuliseko ngenxa yeegesi ezonakalisayo ezahlukahlukeneyo kunye neplasma.

▪ Inkonzo eyenziwe ngokwezifiso: abathwali begraphite bobukhulu obuhlukeneyo kunye neemilo zinokwenziwa ngokwezifiso ngokweemfuno zabathengi.

Imathiriyeli yeGrafite evela kwi-SGL:

Iparamitha eqhelekileyo: R6510
Isalathiso	Umgangatho wovavanyo	Ixabiso	Iyunithi
Ubungakanani obuphakathi kweenkozo	ISO 13320	10	μm
Unizi lolwapho kuyiwa khona	I-DIN IEC 60413/204	1.83	g/cm³
I-porosity evulekile	DIN66133	10	%
Ubungakanani bepore obuphakathi	DIN66133	1.8	μm
Ukufikeleleka	DIN 51935	0.06	cm²/s
Ubunzima be-Rockwell HR5/100	I-DIN IEC60413/303	90	HR
Ukuxhatshazwa kombane okuthe ngqo	I-DIN IEC 60413/402	13	μΩm
Amandla e-Flexural	I-DIN IEC 60413/501	60	MPa
Amandla acinezelayo	DIN 51910	130	MPa
Imodyuli yolutsha	DIN 51915	11.5×10³	MPa
Ukwandiswa kweThermal(20-200℃)	DIN 51909	4.2X10^-6	K^-1
I-Thermal conductivity (20℃)	DIN 51908	105	Wm^-1K^-1

Yenzelwe ngokukodwa ukwenziwa komgangatho ophezulu wokwenziwa kweeseli zelanga, ezixhasa i-G12 ubungakanani obukhulu bokusetyenzwa kwe-wafer. Uyilo oluphuculweyo lomthwali wonyusa kakhulu umthamo, uvumela amazinga esivuno aphezulu kunye neendleko eziphantsi zemveliso.

Into	Uhlobo	Inombolo yomphathi wewafer
PEVCD Grephite iphenyane - The 156 series	156-13 isikhephe segrephite	144
	156-19 isikhephe segrephite	216
	156-21 isikhephe segrephite	240
	156-23 isikhephe segraphite	308
PEVCD Grephite iphenyane - The 125 series	125-15 isikhephe segrephite	196
	125-19 isikhephe segrephite	252
	125-21 isikhephe se-grphite	280