The CVD TaC Coated Plate Susceptor from vet-china is engineered for high-performance in chemical vapor deposition (CVD) processes. This susceptor features a robust TaC (Tantalum Carbide) coating, offering exceptional thermal stability, chemical resistance, and durability, making it an ideal solution for semiconductor manufacturing and high-temperature applications. The CVD TaC coating ensures excellent resistance to oxidation and wear, allowing the susceptor to maintain its integrity and function in harsh environments.
vet-china's CVD TaC Coated Plate Susceptor stands out for its ability to evenly distribute heat during CVD processes, ensuring precise layer deposition and enhancing the efficiency of semiconductor fabrication. The Ta-C coating provides additional protection against chemical corrosion, extending the lifespan of the susceptor and improving overall performance. With a combination of advanced CVD susceptor technology and high-quality TaC chemical coatings, this susceptor is a key component for industries requiring precision and reliability in high-temperature environments.
Whether used in the production of semiconductors or other high-tech applications, the CVD TaC Coated Plate Susceptor is designed to meet the demands of modern manufacturing. Backed by Semicera's reputation for innovation and quality, this product offers superior performance and long-lasting durability, making it a trusted choice for CVD processes.
TaC coating is a kind of tantalum carbide (TaC) coating prepared by physical vapor deposition technology, it has the following characteristics:
1. High hardness: TaC coating hardness is high, usually can reach 2500-3000HV, is an excellent hard coating.
2. Wear resistance: TaC coating is very wear-resistant, which can effectively reduce the wear and damage of mechanical parts during use.
3. Good high temperature resistance: TaC coating can also maintain its excellent performance under high temperature environment.
4. Good chemical stability: TaC coating has good chemical stability and can resist many chemical reactions, such as acids and bases.
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碳化钽涂层物理特性物理特性 Physical properties of TaC coating |
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密度 / Density |
14.3 (g/cm³) |
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比辐射率 / Specific emissivity |
0.3 |
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热膨胀系数 / Thermal expansion coefficient |
6.3 10-6/K |
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努氏硬度 / Hardness (HK) |
2000 HK |
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电阻 / Resistance |
1×10-5 Ohm*cm |
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热稳定性 / Thermal stability |
<2500℃ |
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石墨尺寸变化 / Graphite size changes |
-10~-20um |
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涂层厚度 / Coating thickness |
≥20um typical value (35um±10um) |
Ningbo VET Energy Technology Co., Ltd is a high-tech enterprise focusing on the production and sales of high-end advanced materials, the materials and technology covering graphite, silicon carbide, ceramics, surface treatment and so on. The products are widely used in photovoltaic, semiconductor, new energy, metallurgy,etc..
Our technical team comes from top domestic research institutions, can provide more professional material solutions for you.
Warmly welcome you to visit our factory, let's have further discussion!
