CVD TaC coated plate susceptor

Short Description:

VET Energy CVD TaC coated plate susceptor is a high-performance product designed to provide consistent and reliable performance over an extended period. It has super good heat resistance and thermal uniformity, high purity, erosion resistance, making it the perfect solution for wafer processing applications.


Product Detail

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CVD TaC (Chemical Vapor Deposition Tantalum Carbide) coated plate base is a material used for high temperature and high strength applications using CVD (Chemical Vapor Deposition) surface coating technology. It is composed of a compound called tantalum carbide (TaC). During the preparation of CVD TaC coated plate base, the chemical gas of tantalum carbide is introduced into a high temperature environment and then deposited on the surface of the base to form a strong coating. This compound has excellent heat and corrosion resistance.

TaC coating is a kind of tantalum carbide (TaC) coating prepared by physical vapor deposition technology, it has the following characteristics:

1. High hardness: TaC coating hardness is high, usually can reach 2500-3000HV, is an excellent hard coating.

2. Wear resistance: TaC coating is very wear-resistant, which can effectively reduce the wear and damage of mechanical parts during use.

3. Good high temperature resistance: TaC coating can also maintain its excellent performance under high temperature environment.

4. Good chemical stability: TaC coating has good chemical stability and can resist many chemical reactions, such as acids and bases.

TaC Coating13
TaC Coating10

碳化钽涂层物理特性物理特性

Physical properties of TaC coating

密度 / Density

14.3 (g/cm³)

比辐射率 / Specific emissivity

0.3

热膨胀系数 / Thermal expansion coefficient

6.3 10-6/K

努氏硬度 / Hardness (HK)

2000 HK

电阻 / Resistance

1×10-5 Ohm*cm

热稳定性 / Thermal stability

<2500℃

石墨尺寸变化 / Graphite size changes

-10~-20um

涂层厚度 / Coating thickness

≥20um typical value (35um±10um)

 

Ningbo VET Energy Technology Co., Ltd is a high-tech enterprise focusing on the production and sales of high-end advanced materials, the materials and technology covering graphite, silicon carbide, ceramics, surface treatment and so on. The products are widely used in photovoltaic, semiconductor, new energy, metallurgy,etc..

Our technical team comes from top domestic research institutions, can provide more professional material solutions for you.

Warmly welcome you to visit our factory, let's have further discussion!

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