SiC Wafer Boat/Tower

Cikakken Bayani

SamfuraDrubutawa

Silicon carbide Wafer Boat ana amfani da ko'ina azaman mariƙin wafer a cikin tsarin yaduwar zafin jiki mai girma.

Amfani:

Babban juriya na zafin jiki:al'ada amfani a 1800 ℃

High thermal watsin:daidai da kayan graphite

Babban taurin:taurin na biyu bayan lu'u-lu'u, boron nitride

Juriya na lalata:acid mai karfi da alkali ba su da lalata gare shi, juriya na lalata ya fi tungsten carbide da alumina kyau.

Hasken nauyi:ƙananan yawa, kusa da aluminum

Babu nakasawa: low coefficient na thermal fadadawa

Thermal girgiza juriya:zai iya jure kaifi canje-canje na zafin jiki, tsayayya da zafin zafi, kuma yana da ingantaccen aiki

Abubuwan Jiki Na SiC

Dukiya	Daraja	Hanya
Yawan yawa	3.21 g/c	Nitse-tasowa da girma
Musamman zafi	0.66 J/g °K	Filashin Laser mai ƙwanƙwasa
Ƙarfin sassauƙa	450 MPa 560 MPa	Lankwasa maki 4, lankwasa maki RT4, 1300°
Karya tauri	2.94MPa m1/2	Microindentation
Tauri	2800	Vickers, 500 g na kaya
Elastic ModulusYoung's Modulus	450 GPA430	4 pt lanƙwasa, RT4 pt lanƙwasa, 1300 °C
Girman hatsi	2-10 m	SEM