SiC Wafer Boat/Tower

ʻO ka wehewehe pōkole:

E hoʻouna i ka leka uila iā mākou Hoʻoiho ma ke ʻano he PDF

Huahana Huahana

HuahanaDkakau ana

Hoʻohana nui ʻia ʻo Silicon carbide Wafer Boat ma ke ʻano he wafer paʻa i ke kaʻina diffusion kiʻekiʻe.

Pono:

Kūleʻa wela kiʻekiʻe:hoʻohana maʻamau ma 1800 ℃

Kiʻekiʻe thermal conductivity:like me ka mea graphite

Paʻakiki kiʻekiʻe:ʻo ka paʻakikī lua wale nō i ke daimana, boron nitride

ʻO ke kūpaʻa ʻino:ʻAʻohe mea ʻino i ka waikawa ikaika a me ka alkali, ʻoi aku ka maikaʻi o ka pale ʻana ma mua o ka tungsten carbide a me ka alumina.

Kaumaha māmā:haʻahaʻa haʻahaʻa, kokoke i ka alumini

ʻAʻohe deformation: ka helu haʻahaʻa o ka hoʻonui wela

Ke kū'ē i ka ha'alulu wela:hiki iā ia ke pale i nā loli wela ʻoi, pale i ka haʻalulu wela, a paʻa ka hana

Na Waiwai Kino o SiC

Waiwai	Waiwai	ʻano hana
ʻO ka mānoanoa	3.21 g/cc	Piko-lele a me ke ana
Wela kūikawā	0.66 J/g °K	Pulsed laser flash
Ka ikaika wiliwili	450 MPa560 MPa	4 piko piko, RT4 piko piko, 1300°
ʻOoleʻa haʻihaʻi	2.94 MPa m1/2	Microindentation
ʻoʻoleʻa	2800	ʻO Vicker, 500g ukana
Elastic ModulusYoung's Modulus	450 GPa430 GPa	4 pt piko, RT4 pt piko, 1300 °C
Ka nui o ka palaoa	2 – 10 µm	SEM