KhoomDkev piav qhia
Silicon carbide Wafer Boat yog siv dav ua tus tuav wafer hauv cov txheej txheem kub diffusion siab.
Cov txiaj ntsig:
Kev kub siab tsis kam:siv li qub ntawm 1800 ℃
Kev ua tau zoo ntawm cov cua sov:sib npaug rau cov khoom siv graphite
Kev nyuaj siab:qhov nyuaj thib ob tsuas yog pob zeb diamond, boron nitride
Kev tiv thaiv xeb:Cov kua qaub thiab alkali tsis muaj xeb rau nws, qhov kev tiv thaiv corrosion zoo dua li tungsten carbide thiab alumina
Lub teeb yuag:qis qis, ze rau txhuas
Tsis muaj kev hloov pauv: coefficient qis ntawm thermal expansion
Kev tiv thaiv thermal poob siab:nws tuaj yeem tiv taus qhov kub hloov pauv sai, tiv taus thermal shock, thiab muaj kev ua haujlwm ruaj khov
Cov Khoom Siv Lub Cev ntawm SiC
| Vaj tse | Tus nqi | Txoj Kev |
| Qhov Ceev | 3.21 g/cc | Dab dej thiab qhov ntev |
| Cov cua sov tshwj xeeb | 0.66 J/g °K | Lub teeb liab pulsed laser |
| Lub zog flexural | 450 MPa560 MPa | 4 taw tes khoov, RT4 taw tes khoov, 1300° |
| Kev tawg tawv | 2.94 MPa m1/2 | Kev kho qhov me me |
| Qhov nyuaj | 2800 | Vicker's, 500g thauj khoom |
| Elastic Modulus ntawm Cov Hluas | 450 GPa430 GPa | 4 pt khoov, RT4 pt khoov, 1300 ° C |
| Qhov loj ntawm cov noob | 2 – 10 µm | SEM |
Cov Khoom Siv Thermal Ntawm SiC
| Kev Ua Kub | 250 W/m2 °K | Txoj kev siv laser flash, RT |
| Kev Nthuav Dav Kub (CTE) | 4.5 x 10-6 °K | Chav tsev kub txog 950 ° C, silica dilatometer |
