1. Tirohanga whānui opapa whakarewa silicon carbidehangarau tukatuka
Te aupapa whakarewa silicon carbide Ko ngā mahi tukatuka ko: te huri i te porowhita o waho, te tapatapahi, te whakakoi, te huri, te whakakanapa, te horoi, me ētahi atu. He mahi nui te tapatapahi i roto i te tukatuka i te papa haurua-haurua, ā, he mahi matua hoki ki te huri i te ingot ki te papa. I tēnei wā, ko te tapahi ongā paparanga waro siliconko te tapahi waea te nuinga. Ko te tapahi paru maha-waea te tikanga tapahi waea pai rawa atu i tēnei wā, engari kei te raru tonu te kounga tapahi ngoikore me te ngaronga tapahi nui. Ka piki ake te ngaronga o te tapahi waea me te pikinga o te rahi o te papa, kāore e pai mō tepapa whakarewa silicon carbidengā kaihanga ki te whakaiti i ngā utu me te whakapai ake i te whai huatanga. I roto i te tukanga tapahi8-inihi te karāhe silicon ngā papa, he ngoikore te āhua o te mata o te papa i whiwhihia mā te tapahi waea, ā, kāore i te pai ngā āhuatanga tau pēnei i te WARP me te BOW.
He taahiraa matua te tapahi i roto i te hanga papa haurua-haurua. Kei te whakamātau tonu te umanga i ngā tikanga tapahi hou, pērā i te tapahi waea taimana me te tango i te laser. Kua tino rapua te hangarau tango laser i ngā wā tata nei. Mā te whakaurunga o tēnei hangarau ka whakaiti i te ngaronga tapahi, ā, ka whakapai ake i te pai o te tapahi mai i te kaupapa hangarau. He nui ngā whakaritenga mō te otinga tango laser mō te taumata o te aunoatanga, ā, me whakamahi te hangarau angiangi hei mahi tahi me ia, e hangai ana ki te ahunga whanaketanga ā muri ake nei o te tukatuka papa silicon carbide. Ko te hua poro o te tapahi waea moata tuku iho ko te 1.5-1.6. Mā te whakaurunga o te hangarau tango laser ka taea te whakanui ake i te hua poro ki te 2.0 pea (tirohia ngā taputapu DISCO). I te heke mai, i te mea ka piki ake te pakeketanga o te hangarau tango laser, ka taea te whakapai ake i te hua poro; i te wa ano, ka taea hoki e te tango laser te whakapai ake i te pai o te tapahi. E ai ki ngā rangahau mākete, ko te kaiārahi umanga DISCO e tapahi ana i tētahi poro i roto i te 10-15 meneti pea, he nui ake te pai i te tapahi waea moata o nāianei o te 60 meneti mō ia poro.
Ko ngā mahi o te tapahi waea tuku iho o ngā papa silicon carbide ko: te tapahi waea-te huri taratara-te huri pai-te whakakanapa taratara me te whakakanapa pai. I muri i te whakakapinga o te tapahi waea mā te tukanga tango laser, ka whakamahia te tukanga angiangi hei whakakapi i te tukanga huri, ka whakaiti i te ngaronga o ngā poro, ka whakapai ake i te pai o te tukatuka. E toru ngā mahi o te tukanga tango laser o te tapahi, te huri me te whakakanapa o ngā papa silicon carbide: te matawai mata laser-te tango papa-te whakaparaha i te ingot: ko te matawai mata laser he whakamahi i ngā pātara laser tere rawa hei tukatuka i te mata o te ingot hei hanga i tētahi paparanga whakarerekētia i roto i te ingot; ko te tango papa he wehewehe i te papa i runga ake i te paparanga whakarerekētia mai i te ingot mā ngā tikanga ā-tinana; ko te whakaparaha i te ingot he tango i te paparanga whakarerekētia i runga i te mata o te ingot hei whakarite i te papatahi o te mata ingot.
Te tukanga tango i te taiaho silicon carbide
2. Te ahunga whakamua o te ao i roto i te hangarau tango laser me ngā kamupene whai wāhi ki te umanga
I whakamahia tuatahitia te tukanga tango laser e ngā kamupene o tāwāhi: I te tau 2016, i whakawhanakehia e DISCO o Hapani tētahi hangarau tapahi laser hou, arā, ko KABRA, e hanga ana i tētahi paparanga wehewehe, ā, e wehewehe ana i ngā wafer i tētahi hohonutanga kua tohua mā te whakakā tonu i te ingot ki te laser, ka taea te whakamahi mō ngā momo ingot SiC. I te Whiringa-ā-rangi 2018, i hokona e Infineon Technologies a Siltectra GmbH, he kamupene hou e tapahi ana i ngā wafer, mō te 124 miriona euros. Nā tēnei kamupene i whakawhanake te tukanga Cold Split, e whakamahi ana i te hangarau laser patent hei tautuhi i te whānuitanga wehewehe, hei pani i ngā rauemi polymer motuhake, hei whakahaere i te ahotea i puta mai i te whakamatao, hei wehewehe tika i ngā rauemi, hei huri me te horoi kia tutuki ai te tapahi wafer.
I ngā tau tata nei, kua uru atu ētahi kamupene ā-rohe ki te umanga taputapu tango reera: ko ngā kamupene matua ko Han's Laser, Delong Laser, West Lake Instrument, Universal Intelligence, China Electronics Technology Group Corporation me te Institute of Semiconductors of the Chinese Academy of Sciences. I roto i ēnei, kua roa te wā e hangaia ana ngā kamupene kua rārangihia, ko Han's Laser me Delong Laser, ā, kei te manatokohia ā rātou hua e ngā kiritaki, engari he maha ngā momo hua a te kamupene, ā, ko ngā taputapu tango reera tētahi noa iho o ā rātou pakihi. Kua tutuki i ngā hua o ngā whetu rongonui pērā i a West Lake Instrument ngā tukunga ota whaimana; kua tukuna hoki e Universal Intelligence, China Electronics Technology Group Corporation 2, te Institute of Semiconductors of the Chinese Academy of Sciences me ētahi atu kamupene ngā whanaketanga taputapu.
3. Ngā āhuatanga e akiaki ana i te whanaketanga o te hangarau tango laser me te tere o te whakaurunga mai o te mākete
Ko te whakahekenga utu o ngā papa hiko waro 6-inihi te mea e akiaki ana i te whanaketanga o te hangarau tango i te laser: I tēnei wā, kua heke te utu o ngā papa hiko waro 6-inihi ki raro iho i te 4,000 yuan/wāhanga, e tata ana ki te utu o ētahi kaihanga. He nui te tere hua o te tukanga tango i te laser, ā, he kaha te hua, e akiaki ana i te tere urunga o te hangarau tango i te laser kia piki ake.
Ko te angiangi o ngā paparanga silicon carbide 8-inihi te mea e akiaki ana i te whanaketanga o te hangarau tango laser: Ko te matotoru o ngā paparanga silicon carbide 8-inihi i tēnei wā ko te 500um, ā, kei te whanake haere ki te matotoru o te 350um. Kāore te tukanga tapahi waea e whai hua ana i roto i te tukatuka silicon carbide 8-inihi (kāore te mata o te paparanga i te pai), ā, kua tino heke te uara o te BOW me te WARP. E kiia ana te tango laser he hangarau tukatuka e tika ana mō te tukatuka paparanga silicon carbide 350um, e akiaki ana i te tere uru o te hangarau tango laser kia piki ake.
Ngā tumanakohanga mākete: Ka whai hua ngā taputapu tango taiaho SiC mai i te whakawhānui ake i te SiC 8-inihi me te whakahekenga utu o te SiC 6-inihi. Kei te tata mai te wā tino nui o te ahumahi o nāianei, ā, ka tino tere ake te whanaketanga o te ahumahi.
Wā tuku: Hōngongoi-08-2024