Isifudumezi Se-Ceramic Wafer AlN Alumina Heating Element

Isithombe Esivelele Se-Ceramic Wafer Heater AlN Alumina Heating Element

Incazelo emfushane:

I-VET Energy ingumkhiqizi ochwepheshe kanye nomhlinzeki we-isifudumezi se-ceramic eShayina. Sineqembu eliqinile le-R&D kanye nobuchwepheshe bethu obunelungelo lobunikazi bokunikeza amakhasimende ama-heater e-ceramic asezingeni eliphezulu futhi athuthukile. Siyakwamukela ukuthi uvakashele ifektri yethu kanye nelebhu nganoma yisiphi isikhathi, silangazelela ukuba ngumlingani wakho wesikhathi eside eShayina.

Igama:Isifudumezi se-Ceramic

Izinto::I-AlN, i-Si3N4, i-Al2O3

I-MOQ: 5

I-OEM, i-ODM:Usekelo

Isikhathi sokuthumela:Izinsuku ezingu-35

Sithumelele i-imeyili Landa njenge-PDF

Imininingwane Yomkhiqizo

Amathegi Omkhiqizo

Isifudumezi Se-Ceramic Wafer AlN Alumina Heating Element
Ekukhiqizweni kwe-semiconductor, ama-wafer adinga ukucutshungulwa ngezinqubo ezahlukahlukene, njengokufakwa kwefilimu encane, ukuqopha, njll. Kulezi zixhumanisi, ama-wafer adinga ukushiswa ekushiseni okuthile, futhi kunezidingo eziqinile zokushisa, ngoba ukufana kokushisa kunomthelela obaluleke kakhulu ekuvunweni komkhiqizo, futhi izingxenye zokushisa zibalulekile.

Isifudumezi se-ceramicifakwa ngqo ekamelweni lenqubo futhi ixhumana ngqo ne-wafer. Ayigcini nje ngokuphatha i-wafer, kodwa futhi iqinisekisa ukuthi i-wafer ithola izinga lokushisa lenqubo elizinzile nelilinganayo. Ziyizingxenye ezibalulekile emishinini yokufaka ifilimu encane ye-semiconductor!

Isifudumezi se-ceramic sihlanganisa isisekelo se-ceramic esisekela i-wafer kanye nomzimba osekelayo oyindilinga ohlangothini olungemuva olusekelayo. Ngaphezu kwesici sokumelana (ungqimba lokushisa) lokufudumala, kukhona nama-electrode e-radio frequency (ungqimba lwe-RF) ngaphakathi noma ebusweni besisekelo se-ceramic. Ukuze kufezwe ukushisa nokupholisa okusheshayo, ukujiya kwesisekelo se-ceramic kufanele kube kuncane, kodwa kuncane kakhulu kuzonciphisa nokuqina.

Ukusekelwa kwe-heater ye-ceramic ngokuvamile kwenziwa ngezinto ze-ceramic ezine-coefficient yokwandisa ukushisa efana neyesisekelo. I-heater isebenzisa isakhiwo esiyingqayizivele se-shaft joint bottom ukuvikela ama-terminals nezintambo emiphumeleni ye-plasma namagesi amakhemikhali aqothulayo. Ukusekelwa kufakwe ipayipi lokungenisa igesi yokudlulisa ukushisa kanye nepayipi lokukhipha ukuqinisekisa izinga lokushisa elifanayo le-heater. Isisekelo kanye nokusekelwa kuhlanganiswe ngamakhemikhali ngesendlalelo sokubopha.

Isifudumezi se-ceramic singenziwa ngezinto zobumba ezifana ne-aluminium nitride (AlN), i-silicon nitride (Si3N4), kanye ne-alumina (Al2O3). Phakathi kwazo, i-AlN iyisinqumo esingcono kakhulu sezifudumezi ze-ceramic. Uma kuqhathaniswa nezinye izinto, i-VET Energy's AlN ceramic inezici ezilandelayo:
(1) Ukushisa okuhle;
(2) I-coefficient yokwandisa ukushisa efaniswe nezinto ze-silicon ze-semiconductor;
(3) Izakhiwo ezinhle zemishini, ukumelana okuhle kakhulu nokuguguleka, kanye nezakhiwo eziphelele zemishini zingcono kune-beryllium oxide futhi zilingana ne-aluminium oxide;
(4) Izakhiwo zikagesi ezinhle kakhulu eziphelele, ukuvikela ugesi okuhle kakhulu kanye nokulahleka okuphansi kwe-dielectric;
(5) Ayinabo ubuthi futhi inobungani nemvelo.

Ishidi Ledatha Lezinto Zobumba

Into	I-Alumina engu-95%	I-Alumina engu-99%	I-Zirconia	I-silicon carbide	I-SiliconNi-itride	I-AluminiumNi-itride
Umbala	okumhlophe	Ophuzi okhanyayo	okumhlophe	mnyama	mnyama	impunga
Ubuningi (g/cm3)	3.7g/cm3	3.9g/cm3	6.02g/cm3	3.2g/cm3	3.25g/cm3	3.2g/cm3
Ukumuncwa Kwamanzi	0%	0%	0%	0%	0%	0%
Ubulukhuni (HV)	23.7	23.7	16.5	33	20	-
Amandla Okuguquguquka (i-MPa)	300MPa	400MPa	1100MPa	450MPa	800MPa	310MPa
Amandla Okucindezela (i-MPa)	2500MPa	2800MPa	3600MPa	2000MPa	2600MPa	-
I-Modulus kaYoung Yokunwebeka	300GPa	300GPa	320GPa	450GPa	290GPa	310~350GPa
Isilinganiso sikaPoisson	0.23	0.23	0.25	0.14	0.24	0.24
Ukuqhuba Okushisayo	20W/m°C	32W/m°C	3W/m°C	50W/m°C	25W/m°C	150W/m°C
Amandla e-Dielectric	14KV/mm	14KV/mm	14KV/mm	14KV/mm	14KV/mm	14KV/mm
Ukumelana Nomthamo (25℃)	>1014Ω·cm	>1014Ω·cm	>1014Ω·cm	>105Ω·cm	>1014Ω·cm	>1014Ω·cm

I-VET Energy ingumkhiqizi ochwepheshe ogxile ku-R&D kanye nokukhiqizwa kwezinto ezisezingeni eliphezulu ezifana ne-graphite, i-silicon carbide, i-quartz, kanye nokwelashwa kwezinto ezifana ne-SiC coating, i-TaC coating, i-glassy carbon coating, i-pyrolytic carbon coating, njll. Imikhiqizo isetshenziswa kabanzi ku-photovoltaic, i-semiconductor, amandla amasha, i-metallurgy, njll.

Ithimba lethu lobuchwepheshe livela ezikhungweni zocwaningo zasekhaya eziphezulu, lingakunikeza izixazululo zezinto zobuchwephesha ezengeziwe.

Izinzuzo ze-VET Energy zifaka:
• Ilebhu yakho yefektri kanye neyobungcweti;
• Amazinga okuhlanzeka okuhamba phambili embonini kanye nekhwalithi;
• Intengo yokuncintisana kanye nesikhathi sokulethwa okusheshayo;
• Ubambiswano oluningi lwemboni emhlabeni jikelele;

Siyakwamukela ukuthi uvakashele ifektri yethu kanye nelebhu nganoma yisiphi isikhathi!