I-Ceramic Wafer Heater i-AlN Alumina Heating Element

I-Ceramic Wafer Heater i-AlN Alumina Heating Element
Ekwenziweni kwama-semiconductor, ama-wafers adinga ukucutshungulwa ngezinqubo ezahlukahlukene, njengokufakwa kwefilimu emincane, etching, njll. Kulezi zixhumanisi, ama-wafers adinga ukushiselwa ezingeni elithile lokushisa, futhi kunezidingo eziqinile zamazinga okushisa, ngoba ukufana kwezinga lokushisa kunomthelela obaluleke kakhulu ekuvuthweni komkhiqizo, futhi izingxenye zokushisisa zibalulekile.

I-heater kagesiisetshenziswa ngokuqondile ekamelweni lenqubo futhi ithintana ngqo ne-wafer. Abagcini nje ngokuthwala i-wafer, kodwa futhi baqinisekisa ukuthi i-wafer ithola izinga lokushisa elizinzile nelifanayo. Ziyizingxenye ezibalulekile kumishini yokubeka ifilimu emincane ye-semiconductor!

I-ceramic heater ihlanganisa isisekelo se-ceramic esisekela i-wafer kanye nomzimba osekelayo oyisilinda ohlangothini olungemuva olusekelayo. Ngaphezu kwesici sokumelana (ingqimba yokushisa) yokushisa, kukhona nama-electrode amafrikhwensi omsakazo (ungqimba lwe-RF) ngaphakathi noma ngaphezulu kwesisekelo se-ceramic. Ukuze kuzuzwe ukushisa nokupholisa ngokushesha, ubukhulu besisekelo se-ceramic kufanele bube buncane, kodwa buncane kakhulu futhi buzonciphisa ukuqina.

Ukusekelwa kwe-heater ye-ceramic ngokuvamile kwenziwa nge-ceramic material ene-coefficient yokwandisa okushisayo efana nesisekelo. I-heater ithatha isakhiwo esiyingqayizivele se-shaft joint bottom ukuvikela amatheminali nezintambo emiphumeleni ye-plasma namagesi amakhemikhali abolayo. Ukwesekwa kufakwe igesi yokudlulisa ukushisa kanye nepayipi lokuphuma ukuze kuqinisekiswe izinga lokushisa elifanayo le-heater. Isisekelo nokwesekwa kuhlanganiswe ngamakhemikhali ngesendlalelo sokubopha.

I-ceramic heater ingenziwa ngezitsha zobumba ezifana ne-aluminium nitride (AlN), i-silicon nitride (Si3N4), ne-alumina (Al2O3). Phakathi kwabo, i-AlN iyisinqumo esingcono kakhulu sama-heaters e-ceramic. Uma iqhathaniswa nezinye izinto, i-AlN ceramic ye-VET Energy inezici ezilandelayo:
(1) I-thermal conductivity enhle;
(2) Fanisa i-coefficient yokwandisa okushisayo kuzinto ze-silicon ze-semiconductor;
(3) Izakhiwo ezinhle zemishini, ukumelana nokugqokwa okuhle kakhulu, kanye nezakhiwo zemishini ezibanzi zingcono kune-beryllium oxide futhi ilingana ne-aluminium oxide;
(4) Izakhiwo zikagesi ezinhle kakhulu ezibanzi, ukufakwa kukagesi okuhle kakhulu kanye nokulahlekelwa okuncane kwe-dielectric;
(5) Ayinabuthi futhi ayihambisani nemvelo.