Ko te Mowhiti Arotahi Paninga CVD mō te Whakairo Plasma he wāhanga pau nui e whakamahia ana i roto i ngā pūnaha whakairo semiconductor matatau. I hangaia tēnei hua ki te hanganga hiato o te paninga papa me te CVD, kua hangaia hei arotau i te tohatoha plasma, hei whakapai ake i te ōritetanga o te whakairo, me te whakaroa i te roanga o te wā o te wāhanga rūma.
I Vet Energy, ka whakamahia e mātou te tohungatanga hōhonu ki te hangarau matū whakapūmau kohu (CVD) me ngā rauemi uku matatau hei tuku i ngā mowhiti arotahi e tutuki ai ngā whakaritenga pakari o ngā pūnga haurua-ā-ira hou, tae atu ki ngā tukanga FinFET me te 3D NAND.
Te Tūranga o te Mowhiti Arotahi i roto i te Whakairo Plasma
I roto i ngā pūnaha whakairo plasma (pērā i ngā tauhohenga ICP me CCP), ka whakanohoia te mowhiti arotahi ki te taha o te wafer, ā, he mea nui ki te pumau o te tukanga me te mahi hua.
1. Mana Whakahaere Taurite Plasma
Ko te mowhiti arotahi he rohe hiko, he rohe ā-tinana hoki e āwhina ana ki te whakahaere i te tohatoha kiato plasma puta noa i te mata o te papatahi.
Ngā painga matua:
● Te ōritetanga o te tere whakairo kua whakapaitia
● He iti ake te rerekētanga mai i waenganui ki te taha
● Te kaha ake o te tukurua o te tukanga
2. Whakautu Pānga Tapa
Ki te kore he mowhiti arotahi, ka kore e ōrite te whakairo i te taha o te anga anga nā te he o te takotoranga plasma.
Ka whai hua te mahi a te mowhiti arotahi hei "toronga angiangi mariko", ka whakaiti i ngā āhuatanga rerekē e pā ana ki te taha pēnei i:
● Te keri nui rawa i ngā taha o te papa
● Te rerekētanga o te taha matua (CD)
● Te whakapōturitanga o te kōtaha
3. Te Ara Whakatere me te Whakahaere Pūngao o te Ion
Mā te awe i te papa hiko ā-rohe, ka āwhina te mowhiti arotahi ki te whakau i ngā koki taunga katote me te tohatoha pūngao, he mea nui tēnei mō:
● Te whakairo ōwehenga āhua teitei (HAR)
● Mana whakahaere kōtaha anisotropic
● Te whakaiti i te kino o te taha taha
4. Te Tiaki i te Rūma me te Whakaiti i te Parahanga
Hei wāhanga patunga tapu, ka mimiti te mowhiti arotahi i te pānga tika o te plasma me ngā hua taha whakatakotoranga.
Ngā painga e puta mai ana:
● Te whakaiti i te pakaru o te pakitara o te rūma
● Te iti o te poke o ngā matūriki
● Ngā huringa tiaki roa (ngā wā PM)
