Kuyenda kwa njira ya semiconductor-Ⅱ

Takulandirani patsamba lathu kuti mudziwe zambiri za malonda ndi upangiri.

Webusaiti yathu:https://www.vet-china.com/

 

Kujambula kwa Poly ndi SiO2:

Pambuyo pake, Poly ndi SiO2 zotsalazo zimachotsedwa, ndiko kuti, zimachotsedwa. Panthawiyi, zimatsogolerakudulaimagwiritsidwa ntchito. Mu gulu la kusindikiza, pali gulu la kusindikiza kolunjika ndi kosakhala kolunjika. Kusindikiza kolunjika kumatanthauzakudulambali ina, pomwe kupukutira kosalunjika sikuli kolunjika (mwangozi ndinanena zambiri. Mwachidule, ndikuchotsa SiO2 mbali ina kudzera mu ma acid ndi ma base enaake). Mu chitsanzo ichi, timagwiritsa ntchito kupukutira kolunjika pansi kuti tichotse SiO2, ndipo zimakhala motere.

Pomaliza, chotsani choletsa kuwala. Pakadali pano, njira yochotsera choletsa kuwala si njira yoyatsira kuwala yomwe yatchulidwa pamwambapa, koma njira zina, chifukwa sitifunikira kudziwa kukula kwake panthawiyi, koma kuchotsa choletsa kuwala chonse. Pomaliza, chimakhala monga momwe zasonyezedwera pachithunzi chotsatirachi.

Mwanjira imeneyi, takwaniritsa cholinga chosunga malo enieni a Poly SiO2.

 

Kupanga gwero ndi ngalande:

Pomaliza, tiyeni tiganizire momwe gwero ndi ngalande zimapangidwira. Aliyense akukumbukirabe kuti tinakambirana za izi mu nkhani yapitayi. Gwero ndi ngalande zimayikidwa mu ion ndi zinthu zomwezo. Pakadali pano, titha kugwiritsa ntchito photoresist kutsegula malo oyambira/ngalande komwe mtundu wa N uyenera kuyikidwa. Popeza tingotenga NMOS ngati chitsanzo, zigawo zonse zomwe zili pachithunzi pamwambapa zidzatsegulidwa, monga momwe zasonyezedwera pachithunzi chotsatirachi.

Popeza gawo lomwe lili ndi photoresist silingathe kuikidwa (kuwala kuli kotsekedwa), zinthu za mtundu wa N zidzaikidwa pa NMOS yokha yomwe ikufunika. Popeza gawo lomwe lili pansi pa poly limatsekedwa ndi poly ndi SiO2, silidzaikidwa, kotero zimakhala motere.

Pakadali pano, chitsanzo chosavuta cha MOS chapangidwa. Mwachidule, ngati magetsi awonjezedwa ku gwero, drain, poly ndi substrate, MOS iyi ingagwire ntchito, koma sitingathe kungotenga probe ndikuwonjezera magetsi mwachindunji ku gwero ndikutulutsa. Pakadali pano, mawaya a MOS akufunika, ndiko kuti, pa MOS iyi, kulumikiza mawaya kuti alumikize MOS zambiri pamodzi. Tiyeni tiwone momwe mawaya amagwirira ntchito.

 

Kupanga VIA:

Gawo loyamba ndikuphimba MOS yonse ndi wosanjikiza wa SiO2, monga momwe chithunzi chili pansipa chikusonyezera:

Zachidziwikire, SiO2 iyi imapangidwa ndi CVD, chifukwa imathamanga kwambiri ndipo imasunga nthawi. Izi zikadali njira yoyika photoresist ndi exposure. Pambuyo pake, zikuwoneka motere.

Kenako gwiritsani ntchito njira yodulira kuti mudule dzenje pa SiO2, monga momwe zasonyezedwera mu gawo lotuwa pachithunzi pansipa. Kuzama kwa dzenje ili kumakhudza mwachindunji pamwamba pa Si.

Pomaliza, chotsani choletsa kuwala kwa dzuwa ndikupeza mawonekedwe otsatirawa.

Pakadali pano, chomwe chikufunika kuchitika ndikudzaza kondakitala m'bowo ili. Ponena za kondakitala uyu ndi chiyani? Kampani iliyonse ndi yosiyana, ambiri mwa iwo ndi aloyi a tungsten, ndiye dzenje ili lingadzazidwe bwanji? Njira ya PVD (Physical Vapor Deposition) imagwiritsidwa ntchito, ndipo mfundoyi ndi yofanana ndi chithunzi chomwe chili pansipa.

Gwiritsani ntchito ma elekitironi kapena ma ayoni amphamvu kwambiri kuti muwombere chinthu chomwe mukufuna, ndipo chinthu choswekacho chidzagwa pansi ngati maatomu, motero kupanga chophimba chomwe chili pansipa. Chinthu chomwe timachiwona nthawi zambiri m'nkhani chikutanthauza chinthu chomwe mukufuna pano.
Pambuyo podzaza dzenjelo, zikuwoneka motere.

Zachidziwikire, tikadzaza, sizingatheke kulamulira makulidwe a chophimbacho kuti chikhale chofanana ndendende ndi kuya kwa dzenjelo, kotero padzakhala chowonjezera, kotero timagwiritsa ntchito ukadaulo wa CMP (Chemical Mechanical Polishing), womwe umamveka wapamwamba kwambiri, koma kwenikweni ukupera, kuchotsa ziwalo zochulukirapo. Zotsatira zake zimakhala motere.

Pakadali pano, tamaliza kupanga gawo la via. Zachidziwikire, kupanga kwa via makamaka kumathandizira mawaya a gawo lachitsulo kumbuyo.

 

Kupanga zitsulo zosanjikiza:

Pansi pa mikhalidwe yomwe ili pamwambapa, timagwiritsa ntchito PVD kuti tichotse chitsulo china. Chitsulochi makamaka ndi aloyi yopangidwa ndi mkuwa.

Kenako titadziwonetsa ndi kupukuta, timapeza zomwe tikufuna. Kenako pitirizani kuziyika mpaka titakwaniritsa zosowa zathu.

Tikajambula kapangidwe kake, tidzakuuzani kuchuluka kwa zigawo zachitsulo zomwe zingayikidwe ndipo kudzera mu njira yomwe yagwiritsidwa ntchito, zomwe zikutanthauza kuchuluka kwa zigawo zomwe zingayikidwe.
Pomaliza, timapeza kapangidwe kameneka. Chophimba chapamwamba ndi pini ya chip iyi, ndipo titachiyika, chimakhala pini yomwe tingathe kuiwona (ndithudi, ndinachijambula mwachisawawa, palibe tanthauzo lenileni, mwachitsanzo).

Iyi ndi njira yodziwika bwino yopangira chip. Mu nkhani iyi, taphunzira za kufunika koika zinthu m'machubu, kuyika ma ion, machubu a ng'anjo, CVD, PVD, CMP, ndi zina zotero mu semiconductor foundry.