Kuyerera kwemaitiro eSemiconductor-Ⅱ

Tinokugamuchirai pawebhusaiti yedu kuti muwane ruzivo nezvechigadzirwa uye mazano.

Webhusaiti yedu:https://www.vet-china.com/

 

Kuchekwa kwePoly neSiO2:

Mushure meizvi, Poly neSiO2 zvakawandisa zvinobviswa, kureva kuti, zvinobviswa. Panguva ino, zvinoenda zvakanangakutemainoshandiswa. Mukuisa mumapoka ekucheka, pane kuisa mumapoka ekucheka nenzira yekutungamira uye kusaisa mumapoka ekucheka nenzira yekutungamira. Kuisa mumapoka ekucheka nenzira yekutungamira zvinorevakutemamune imwe nzira, nepo kuchekwa kusiri kwedivi risingatungamirirwi (ndakangoerekana ndataura zvakawanda. Muchidimbu, kubvisa SiO2 mune imwe nzira kuburikidza nemaacids nemabases chaiwo). Mumuenzaniso uyu, tinoshandisa kuchekwa kusiri kwedivi risingatungamirirwi kubvisa SiO2, uye zvinova seizvi.

Pakupedzisira, bvisai photoresist. Panguva ino, nzira yekubvisa photoresist haisi yekushanda kuburikidza nemwaranzi yechiedza yataurwa pamusoro apa, asi kuburikidza nedzimwe nzira, nekuti hatidi kutsanangura saizi chaiyo panguva ino, asi kubvisa photoresist yese. Pakupedzisira, inova sezvakaratidzwa mumufananidzo unotevera.

Nenzira iyi, tazadzisa chinangwa chekuchengetedza nzvimbo chaiyo yePoly SiO2.

 

Kuumbwa kwenzvimbo inodonhedzwa nemvura inoyerera:

Chekupedzisira, ngatitarisei kuti sosi nedhireni zvinoumbwa sei. Munhu wese achiri kurangarira kuti takataura nezvazvo muchinyorwa chapfuura. Sosi nedhireni zvakaiswa mumaion nezvinhu zvakafanana. Panguva ino, tinogona kushandisa photoresist kuvhura nzvimbo yesosi/dhireni uko rudzi rweN runofanira kuiswa. Sezvo tichingotora NMOS semuenzaniso, zvikamu zvese zviri mumufananidzo uri pamusoro zvichavhurwa, sezvakaratidzwa mumufananidzo unotevera.

Sezvo chikamu chakafukidzwa ne photoresist chisingakwanise kuiswa (chiedza chakavharwa), zvinhu zveN-type zvinongoiswa paNMOS inodiwa chete. Sezvo substrate iri pasi pe poly yakavharwa ne poly ne SiO2, haizoisirwi, saka zvinova seizvi.

Panguva ino, modhi yeMOS yakapusa yagadzirwa. Mupfungwa, kana voltage ikawedzerwa kune sosi, drain, poly uye substrate, iyi MOS inogona kushanda, asi hatigoni kungotora probe towedzera voltage zvakananga kune sosi tobva tadhonza. Panguva ino, MOS wiring inodiwa, kureva kuti, paMOS iyi, batanidza waya kuti ubatanidze MOS dzakawanda pamwe chete. Ngatitarisei maitiro ekubatanidza waya.

 

Kugadzira VIA:

Danho rekutanga nderekufukidza MOS yese neSiO2 layer, sezvakaratidzwa mumufananidzo uri pazasi:

Ehe, iyi SiO2 inogadzirwa neCVD, nekuti inokurumidza zvikuru uye inochengetedza nguva. Inotevera ichiri nzira yekuisa photoresist uye exposure. Mushure mekuguma, zvinoita seizvi.

Wobva washandisa nzira yekucheka kuti ucheke buri paSiO2, sezvakaratidzwa muchikamu chegrey chiri mumufananidzo uri pazasi. Kudzika kweburi iri kunobata zvakananga pamusoro peSi.

Pakupedzisira, bvisa photoresist wobva waona zvinotevera.

Panguva ino, chinofanira kuitwa kuzadza kondakita mugomba iri. Kana zviri zvekuti kondakita iyi chii? Kambani yega yega yakasiyana, mazhinji acho i tungsten alloys, saka gomba iri ringazadzwa sei? Nzira yePVD (Physical Vapor Deposition) inoshandiswa, uye musimboti wacho wakafanana nemufananidzo uri pazasi.

Shandisa maerekitironi kana maion ane simba guru kuti urove chinhu chaunoda, uye chinhu chaunoda chakatyoka chinowira pasi muchimiro chemaatomu, nokudaro zvichigadzira chifukidziro chiri pasi. Chinhu chaunoda kuona munhau chinoreva chinhu chaunoda pano.
Mushure mekuzadza gomba, zvinoita seizvi.

Ehe, patinoizadza, hazvigoneke kudzora ukobvu hwependi kuti huenzane nekudzika kwegomba, saka pachava nekuwanda, saka tinoshandisa tekinoroji yeCMP (Chemical Mechanical Polishing), iyo inonzwika seyepamusoro-soro, asi chaizvoizvo iri kukuya, ichikuya zvikamu zvakawandisa. Mhedzisiro yacho yakaita seizvi.

Panguva ino, tapedza kugadzira jira re via. Ehe, kugadzirwa kwe via kunonyanya kuitirwa kuisa waya dzesimbi iri kumashure.

 

Kugadzirwa kwesimbi:

Pasi pemamiriro ezvinhu ari pamusoro apa, tinoshandisa PVD kubvisa rumwe rukoko rwesimbi. Simbi iyi inonyanya kushandiswa nemhangura.

Mushure mekuratidzwa uye kuchekwa, tinowana zvatinoda. Zvadaro rambai muchiunganidza zvinhu kusvika tazadzisa zvatinoda.

Patinodhirowa marongerwo acho, tichakuudza kuti simbi ngani uye kuburikidza nemaitiro anoshandiswa dzinogona kuunganidzwa zvakanyanya, zvinoreva kuti simbi ngani dzinogona kuunganidzwa.
Pakupedzisira, tinowana chimiro ichi. Pedhi repamusoro ndiro pini yechipu iyi, uye mushure mekurongedza, inova pini yatinogona kuona (zvechokwadi, ndakaidhirowa zvisina tsarukano, hapana kukosha kwazvinoita, semuenzaniso).

Iyi ndiyo nzira yakajairika yekugadzira chip. Munyaya ino, takadzidza nezvezvinhu zvinonyanya kukosha pakugadzira chip, kuchekwa, kuiswa kwemaion, machubhu efurnace, CVD, PVD, CMP, nezvimwewo mu semiconductor foundry.