Apo Graphite i uhi ʻia me ka CVD Silicon Carbide

Wehewehe Pōkole:

ʻO ke apo graphite i uhi ʻia me ka silicon carbide ʻo VET Energy kahi huahana hana kiʻekiʻe i hoʻolālā ʻia e hāʻawi i ka hana kūlike a hilinaʻi hoʻi i kahi manawa lōʻihi. Loaʻa iā ia ke kūpaʻa wela maikaʻi loa a me ke kūlike wela, ka maʻemaʻe kiʻekiʻe, ke kūpaʻa i ka ʻino, e lilo ia i hopena kūpono no nā noi hana wafer.

E leka uila mai iā mākou Hoʻoiho ma ke ʻano he PDF

Nā kikoʻī huahana

Nā Lepili Huahana

Nā Waiwai Maʻamau o ka Mea Graphite Base:

Ka nui o ka ʻike ʻia:	1.85 g/cm3
Ke kū'ē uila:	11 μΩm
Ikaika Flexural:	49 MPa (500kgf/cm2)
Paʻakikī Kahakai:	58
Lehu:	<5ppm
Ka Hoʻokele Wela:	116 W/mK (100 kcal/mhr-℃)

Hoʻolako mākou i nā ʻano susceptors like ʻole a me nā ʻāpana graphite no nā reactors epitaxy o kēia manawa. ʻO kā mākou huahana e komo pū me nā susceptors barela no nā ʻāpana LPE, nā susceptors pancake no nā ʻāpana LPE, CSD, a me Gemini, a me nā susceptors wafer hoʻokahi no nā ʻāpana i hoʻopili ʻia a me ASM.

Ma ka hoʻohui ʻana i nā pilina ikaika me nā OEM alakaʻi, nā ʻike loea a me ka ʻike hana, hāʻawi ʻo vet i ka hoʻolālā kūpono loa no kāu noi.

ʻO VET Energy kamea hana maoli o nā huahana graphite a me silicon carbide i hoʻopilikino ʻia me ka uhi ʻana o CVD,hiki ke hoʻolakonā ʻano like ʻolenā ʻāpana i hoʻopilikino ʻia no ka semiconductor a me ka ʻoihana photovoltaic. Ohele mai kā mākou hui loea mai nā ʻoihana noiʻi kūloko kiʻekiʻe, hiki ke hāʻawi i nā hoʻonā mea ʻoihana hou akunāu.

Fnā hiʻohiʻona o kā mākou huahana:

1. Ke kūpaʻa ʻana i ka oxidation wela kiʻekiʻe a hiki i ka 1700℃.
2. Maʻemaʻe kiʻekiʻe a meke ʻano like o ka wela
3. Kū'ē maika'i loa i ka pala: waikawa, alkali, pa'akai a me nā mea hana olaola.
4. Paʻakikī kiʻekiʻe, ʻili paʻa, nā ʻāpana maikaʻi.
5. ʻOi aku ka lōʻihi o ke ola lawelawe a ʻoi aku ka paʻa

CVD SiC薄膜基本物理性能 Nā waiwai kino kumu o CVD SiCuhi ʻana
性质 / Waiwai	典型数值 / Waiwai Maʻamau
晶体结构 / ʻAno Crystal	Pae FCC β多晶，主要为（111）取向
密度 / Ka nui o ka paʻa	3.21 g/cm³
硬度 / Paʻakikī	2500 维氏硬度（500g load）
晶粒大小 / Ka nui o ka palaoa	2~10μm
纯度 / Maʻemaʻe Kemika	99.99995%
热容 / Ka Mana Wela	640 J·kg^-1·K^-1
升华温度 / Mahana Hoʻohaʻahaʻa	2700℃
抗弯强度 / Ikaika Flexural	415 MPa RT 4-kiko
杨氏模量 / Modulus o Young	430 Gpa 4pt kūlou, 1300 ℃
导热系数 / ThermalKa hoʻokele ʻana	300W·m^-1·K^-1
热膨胀系数 / Hoʻonui Wela (CTE)	4.5×10^-6K^-1