ʻO SiC Coated Graphite Susceptor a me ka mea lawe no ka Wafer

SiC Coated Graphite Susceptor and Carrier No Wafer Featured Image

ʻO ka wehewehe pōkole:

ʻO VET Energy SiC Coated Graphite Susceptor kahi huahana hana kiʻekiʻe i hoʻolālā ʻia e hāʻawi i ka hana kūpaʻa a hilinaʻi hoʻi i kahi manawa lōʻihi. Loaʻa iā ia ke kūpaʻa wela maikaʻi loa a me ka like ʻana o ka wela, ka maʻemaʻe kiʻekiʻe, ka pale ʻana i ka erosion, e hana ana i ka hopena kūpono no nā noi hana wafer.

Material:Kiʻekiʻe maʻemaʻe isostatic graphite

Hoomaemae: <5ppm

Ka uhi:CVD-SiC, CVD-TaC, Pyro-carbon

OEM ODM:Loaʻa

E hoʻouna i ka leka uila iā mākou Hoʻoiho ma ke ʻano he PDF

Huahana Huahana

Suscetpor graphite i uhi ʻia ʻo SiChe mea nui i hoʻohana ʻia i nā kaʻina hana semiconductor like ʻole. Ke hoʻohana nei mākou i kā mākou ʻenehana patented e hana i ka suscetpor i uhi ʻia ʻo SiC me ka maʻemaʻe kiʻekiʻe loa, ka like ʻana o ka uhi ʻana maikaʻi a me ke ola lawelawe maikaʻi loa, a me ke kūpaʻa kemika kiʻekiʻe a me nā waiwai paʻa wela.

Nā hiʻohiʻona o kā mākou huahana:

1. Kiʻekiʻe wela oxidation kū'ē a hiki i 1700 ℃.
2. ʻO ka hoʻomaʻemaʻe kiʻekiʻe a me ke kūlike wela
3. ʻOi aku ka maikaʻi o ka corrosion resistance: acid, alkali, paʻakai a me nā mea hoʻohui.
4. ʻO ka paʻakikī kiʻekiʻe, ka ʻili paʻa, nā ʻāpana maikaʻi.
5. ʻOi aku ka lōʻihi o ke ola lawelawe a ʻoi aku ka lōʻihi

CVD SiC薄膜基本物理性能 Nā waiwai kino kumu o CVD SiCka uhi ʻana
性质 / Waiwai	典型数值 / Waiwai maʻamau
晶体结构 / Hoʻomoe Crystal	Māhele FCC β多晶，主要为（111）取向
密度 / Paʻa	3.21 g/cm³
硬度 / Oolea	2500 维氏硬度（500g load）
晶粒大小 / ʻAiʻa palaoa	2~10μm
纯度 / Maemae Kemika	99.99995%
热容 / Hikina Wela	640 J·kg^-1·K^-1
升华温度 / Kaumaha Sublimation	2700 ℃
抗弯强度 / Ka Ikaika Pilikia	415 MPa RT 4-point
杨氏模量 / 'Ōpio's Modulus	430 Gpa 4pt piko, 1300 ℃
导热系数 / ThermalʻO ka hoʻokō	300W·m^-1·K^-1
热膨胀系数 / Hoʻonui wela (CTE)	4.5×10^-6K^-1

ʻO VET Energy kahi mea hana loea e kālele ana i ka R&D a me ka hana ʻana i nā mea kiʻekiʻe kiʻekiʻe e like me ka graphite, silicon carbide, quartz, a me ka mālama ʻana i nā mea e like me SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc.

Hele mai kā mākou hui ʻenehana mai nā keʻena noiʻi kūloko kiʻekiʻe, hiki iā ia ke hāʻawi i nā hoʻonā ʻoihana ʻoihana hou aku no ʻoe.

Loaʻa nā pono o ka VET Energy:
• hale hana ponoi a me ka hale hana oihana;
• nā pae maʻemaʻe alakaʻi alakaʻi a me ka maikaʻi;
• Kūʻai hoʻokūkū & manawa hāʻawi wikiwiki;
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Hoʻokipa mākou iā ʻoe e kipa i kā mākou hale hana a me ka hale hana i kēlā me kēia manawa!