ʻO ka mea hoʻopili Graphite i uhi ʻia ʻo SiC a me ka mea lawe no ka Wafer

ʻO ke kumu hoʻopili Graphite SiC a me ka mea lawe no ka Wafer Kiʻi i hōʻike ʻia

Wehewehe Pōkole:

ʻO VET Energy SiC Coated Graphite Susceptor kahi huahana hana kiʻekiʻe i hoʻolālā ʻia e hāʻawi i ka hana kūlike a hilinaʻi hoʻi i kahi manawa lōʻihi. Loaʻa iā ia ke kūpaʻa wela maikaʻi loa a me ke kūlike wela, ka maʻemaʻe kiʻekiʻe, ke kūpaʻa i ka ʻino, e lilo ia i hopena kūpono no nā noi hana wafer.

Mea Hana:ʻO ka graphite isostatic maʻemaʻe kiʻekiʻe

Hoʻomaʻemaʻe: <5ppm

Uhi ʻana:CVD-SiC, CVD-TaC, Pyro-kalapona

ʻOEM ODM:Loaʻa

E leka uila mai iā mākou Hoʻoiho ma ke ʻano he PDF

Nā kikoʻī huahana

Nā Lepili Huahana

ʻO ka mea hoʻopaʻa graphite i uhi ʻia ʻo SiChe ʻāpana koʻikoʻi i hoʻohana ʻia i nā kaʻina hana semiconductor like ʻole. Hoʻohana mākou i kā mākou ʻenehana i hoʻopaʻa ʻia e hana i ka suscetpor i uhi ʻia ʻo SiC me ka maʻemaʻe kiʻekiʻe loa, ka like ʻana o ka uhi ʻana a me ke ola lawelawe maikaʻi loa, a me ke kūpaʻa kemika kiʻekiʻe a me nā waiwai kūpaʻa wela.

Nā hiʻohiʻona o kā mākou huahana:

1. Ke kūpaʻa ʻana i ka oxidation wela kiʻekiʻe a hiki i ka 1700 ℃.
2. Maʻemaʻe kiʻekiʻe a me ke kūlike wela
3. Kū'ē maika'i loa i ka pala: waikawa, alkali, pa'akai a me nā mea hana olaola.
4. Paʻakikī kiʻekiʻe, ʻili paʻa, nā ʻāpana maikaʻi.
5. ʻOi aku ka lōʻihi o ke ola lawelawe a ʻoi aku ka paʻa

CVD SiC薄膜基本物理性能 Nā waiwai kino kumu o CVD SiCuhi ʻana
性质 / Waiwai	典型数值 / Waiwai Maʻamau
晶体结构 / ʻAno Crystal	Pae FCC β多晶，主要为（111）取向
密度 / Ka nui o ka paʻa	3.21 g/cm³
硬度 / Paʻakikī	2500 维氏硬度（500g load）
晶粒大小 / Ka nui o ka palaoa	2~10μm
纯度 / Maʻemaʻe Kemika	99.99995%
热容 / Ka Mana Wela	640 J·kg^-1·K^-1
升华温度 / Mahana Hoʻohaʻahaʻa	2700℃
抗弯强度 / Ikaika Flexural	415 MPa RT 4-kiko
杨氏模量 / Modulus o Young	430 Gpa 4pt kūlou, 1300 ℃
导热系数 / ThermalKa hoʻokele ʻana	300W·m^-1·K^-1
热膨胀系数 / Hoʻonui Wela (CTE)	4.5×10^-6K^-1

He mea hana ʻoihana ʻo VET Energy e kālele ana i ka R&D a me ka hana ʻana o nā mea holomua kiʻekiʻe e like me ka graphite, silicon carbide, quartz, a me ka mālama ʻana i nā mea e like me ka SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc. Hoʻohana nui ʻia nā huahana i ka photovoltaic, semiconductor, ikehu hou, metallurgy, etc.

Loaʻa kā mākou hui loea mai nā ʻoihana noiʻi kūloko kiʻekiʻe, hiki ke hāʻawi i nā hoʻonā mea ʻoihana hou aku nāu.

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