Ko te hanganga o te hauhā silicon i runga i te mata o te silicon ka kiia he waikura, ā, ko te hanganga o te hauhā silicon pumau me te piri kaha i arahi ki te whānautanga o te hangarau porowhita whakauru silicon. Ahakoa he maha ngā huarahi hei whakatipu tika i te hauhā silicon ki runga i te mata o te silicon, ko te tikanga ka mahia mā te waikura wera, arā, ko te whakaatu i te silicon ki tētahi taiao waikura pāmahana teitei (hāora, wai). Ka taea e ngā tikanga waikura wera te whakahaere i te matotoru o te kiriata me ngā āhuatanga atanga silicon/silicon dioxide i te wā e whakarite ana i ngā kiriata hauhā silicon. Ko ētahi atu tikanga mō te whakatipu i te hauhā silicon ko te anodization plasma me te anodization mākū, engari kāore tētahi o ēnei tikanga i whakamahia whānuitia i roto i ngā tukanga VLSI.
He āhua tō te silicon ki te hanga i te hauhā silicon pumau. Mēnā ka tukuna te silicon hou ki tētahi taiao whakahāngai (pērā i te hāora, te wai), ka hanga he paparanga hauhā tino angiangi (<20Å) ahakoa i te pāmahana rūma. Ina tukuna te silicon ki tētahi taiao whakahāngai i te pāmahana teitei, ka tere ake te whakaputa i tētahi paparanga hauhā matotoru. E mārama ana te tikanga taketake o te hanganga hauhā silicon mai i te silicon. I whakawhanakehia e Deal rāua ko Grove tētahi tauira pāngarau e whakaahua tika ana i ngā whanaketanga tipu o ngā kiriata hauhā matotoru atu i te 300Å. I whakaarohia e rāua kia mahia te whakahāngai i te ara e whai ake nei, arā, ka horapa te whakahāngai (ngā ngota wai me ngā ngota hāora) mā roto i te paparanga hauhā o nāianei ki te atanga Si/SiO2, te wāhi e tauhohe ai te whakahāngai ki te silicon hei hanga i te hauhā silicon. Ko te tauhohenga matua ki te hanga i te hauhā silicon e whakaahuatia ana penei:
Ka puta te tauhohenga waikura i te atanga Si/SiO2, nō reira, ina tipu te paparanga waikura, ka pau tonu te silicon, ā, ka uru mārire te atanga ki te silicon. E ai ki te mātotoru me te taumaha ngota o te silicon me te silicon dioxide, ka kitea ko te silicon e pau ana mō te matotoru o te paparanga waikura whakamutunga he 44%. Mā tēnei, ki te tipu te paparanga waikura ki te 10,000Å, ka pau te 4400Å o te silicon. He mea nui tēnei whanaungatanga mō te tatau i te teitei o ngā kaupae i hangaia i runga i teanga siliconKo ngā mahi nei he hua nō ngā tere waikura rerekē i ngā wāhi rerekē o te mata o te anga silicon.
Ka tukuna hoki e mātou ngā hua karāpeti me te karāpeti silicon parakore-teitei, e whakamahia whānuitia ana i roto i te tukatuka wafer pēnei i te waikura, te horapa, me te whakamahana.
Nau mai haere mai ki te toro mai ki a mātou mō ētahi atu kōrerorero, mai i ngā kiritaki katoa o te ao!
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Wā tuku: Whiringa-ā-rangi 13-2024