Vim li cas thiaj xav tau thinning?

Nyob rau hauv theem txheej txheem tom qab, qhovncuav mog qab zib (silicon wafernrog cov voj voog nyob rau sab pem hauv ntej) yuav tsum tau nyias nyias rau sab nraub qaum ua ntej tom qab dicing, vuam thiab ntim khoom kom txo qhov siab ntawm pob khoom, txo qhov ntim ntawm pob khoom, txhim kho qhov ua haujlwm thermal diffusion ntawm cov chip, kev ua haujlwm hluav taws xob, cov khoom siv kho tshuab thiab txo qhov ntau ntawm dicing. Kev sib tsoo rov qab muaj qhov zoo ntawm kev ua haujlwm siab thiab tus nqi qis. Nws tau hloov cov txheej txheem etching ntub thiab ion etching ib txwm muaj los ua cov thev naus laus zis tseem ceeb tshaj plaws.

Cov wafer nyias nyias

Yuav ua li cas kom nyias?

Cov txheej txheem tseem ceeb ntawm wafer thinning hauv cov txheej txheem ntim khoom ib txwm muaj

Cov kauj ruam tshwj xeeb ntawmncuav mog qab zibKev ua kom nyias nyias yog los txuas cov wafer uas yuav tsum tau ua rau cov zaj duab xis nyias nyias, thiab tom qab ntawd siv lub tshuab nqus tsev los nqus cov zaj duab xis nyias nyias thiab cov chip ntawm nws mus rau lub rooj wafer ceramic porous, kho cov kab nruab nrab ntawm lub nkoj sab hauv thiab sab nraud ntawm qhov chaw ua haujlwm ntawm lub log sib tsoo pob zeb diamond zoo li khob mus rau hauv nruab nrab ntawm cov wafer silicon, thiab cov wafer silicon thiab lub log sib tsoo tig ib ncig ntawm lawv cov axes rau kev txiav sib tsoo. Kev sib tsoo suav nrog peb theem: kev sib tsoo ntxhib, kev sib tsoo zoo thiab kev txhuam.

Cov wafer uas tawm hauv lub Hoobkas wafer raug sib tsoo rov qab kom cov wafer nyias mus rau qhov tuab uas xav tau rau kev ntim khoom. Thaum sib tsoo cov wafer, yuav tsum tau muab daim kab xev nplaum rau sab pem hauv ntej (Active Area) los tiv thaiv thaj chaw ntawm lub voj voog, thiab sab nraub qaum raug sib tsoo tib lub sijhawm. Tom qab sib tsoo, tshem daim kab xev thiab ntsuas qhov tuab.
Cov txheej txheem sib tsoo uas tau siv rau kev npaj silicon wafer suav nrog kev sib tsoo lub rooj sib hloov,silicon waferkev sib tsoo tig, kev sib tsoo ob sab, thiab lwm yam. Nrog rau kev txhim kho ntxiv ntawm qhov xav tau zoo ntawm cov khoom siv silicon wafers, cov thev naus laus zis sib tsoo tshiab tau raug thov tas li, xws li TAIKO sib tsoo, kev sib tsoo tshuaj lom neeg, kev sib tsoo polishing thiab kev sib tsoo planetary disc.

Kev sib tsoo ntawm lub rooj sib hloov:

Kev sib tsoo ntawm lub rooj sib hloov (kev sib tsoo ntawm lub rooj sib hloov) yog ib qho txheej txheem sib tsoo thaum ntxov uas siv rau hauv kev npaj silicon wafer thiab kev ua kom nyias rov qab. Nws lub hauv paus ntsiab lus tau qhia hauv Daim Duab 1. Cov silicon wafers raug ntsia rau ntawm cov khob nqus ntawm lub rooj sib hloov, thiab tig synchronously tsav los ntawm lub rooj sib hloov. Cov silicon wafers lawv tus kheej tsis tig ib ncig ntawm lawv lub axis; lub log sib tsoo raug pub axially thaum tig ntawm qhov ceev ceev, thiab txoj kab uas hla ntawm lub log sib tsoo loj dua txoj kab uas hla ntawm silicon wafer. Muaj ob hom kev sib tsoo ntawm lub rooj sib hloov: kev sib tsoo ntsej muag plunge thiab kev sib tsoo ntsej muag tangential. Hauv kev sib tsoo ntsej muag plunge, qhov dav ntawm lub log sib tsoo loj dua txoj kab uas hla ntawm silicon wafer, thiab lub log sib tsoo spindle pub tas li raws nws qhov kev taw qhia axial kom txog thaum cov ntau dhau raug ua tiav, thiab tom qab ntawd cov silicon wafer raug tig hauv qab lub tsav ntawm lub rooj sib hloov; hauv kev sib tsoo ntsej muag tangential, lub log sib tsoo pub raws nws qhov kev taw qhia axial, thiab cov silicon wafer raug tig tas li raws li lub tsav ntawm lub disk tig, thiab kev sib tsoo tiav los ntawm kev pub rov qab (reciprocation) lossis kev pub nkag (creepfeed).

Daim Duab 1, daim duab qhia txog kev sib tsoo ntawm lub rooj sib tsoo (lub ntsej muag tangential)

Piv nrog rau txoj kev sib tsoo, kev sib tsoo ntawm lub rooj sib tsoo muaj qhov zoo ntawm kev tshem tawm siab, kev puas tsuaj me me ntawm qhov chaw, thiab kev ua haujlwm yooj yim. Txawm li cas los xij, thaj chaw sib tsoo tiag tiag (kev sib tsoo nquag) B thiab lub kaum sab xis θ (lub kaum sab xis ntawm lub voj voog sab nraud ntawm lub log sib tsoo thiab lub voj voog sab nraud ntawm lub silicon wafer) hauv cov txheej txheem sib tsoo hloov pauv nrog kev hloov pauv ntawm qhov chaw txiav ntawm lub log sib tsoo, ua rau lub zog sib tsoo tsis ruaj khov, ua rau nws nyuaj rau tau txais qhov tseeb ntawm qhov chaw zoo tagnrho (tus nqi TTV siab), thiab yooj yim ua rau muaj qhov tsis zoo xws li ntug tawg thiab ntug tawg. Cov txheej txheem sib tsoo ntawm lub rooj sib tsoo feem ntau yog siv rau kev ua cov silicon wafers ib leeg hauv qab 200 hli. Kev nce ntxiv ntawm qhov loj me ntawm cov silicon wafers ib leeg tau muab cov kev xav tau siab dua rau qhov tseeb ntawm qhov chaw thiab kev txav mus los ntawm lub rooj ua haujlwm ntawm cov khoom siv, yog li kev sib tsoo ntawm lub rooj sib tsoo tsis haum rau kev sib tsoo ntawm cov silicon wafers ib leeg saum 300 hli.
Yuav kom txhim kho qhov kev sib tsoo zoo, cov khoom siv sib tsoo tangential dav hlau feem ntau siv cov qauv sib tsoo ntau lub log. Piv txwv li, ib pawg ntawm cov log sib tsoo ntxhib thiab ib pawg ntawm cov log sib tsoo zoo tau nruab rau ntawm cov khoom siv, thiab lub rooj sib hloov tig ib lub voj voog kom ua tiav qhov sib tsoo ntxhib thiab sib tsoo zoo ib zaug. Hom khoom siv no suav nrog G-500DS ntawm American GTI Company (Daim Duab 2).

Daim Duab 2, G-500DS lub rooj sib tsoo cov khoom siv sib tsoo ntawm GTI Company hauv Tebchaws Meskas

Kev sib tsoo ntawm silicon wafer:

Yuav kom ua tau raws li qhov xav tau ntawm kev npaj cov silicon wafer loj thiab kev ua kom nyias rov qab, thiab tau txais qhov tseeb ntawm qhov chaw nrog tus nqi TTV zoo. Xyoo 1988, tus kws tshawb fawb Nyij Pooj Matsui tau tawm tswv yim txog kev sib tsoo silicon wafer tig (hauv-pub sib tsoo). Nws lub hauv paus ntsiab lus tau pom hauv Daim Duab 3. Lub silicon wafer siv lead ua ib leeg thiab lub log sib tsoo pob zeb diamond zoo li khob uas tau nqus rau ntawm lub rooj ua haujlwm tig ib ncig ntawm lawv cov axes, thiab lub log sib tsoo tau pub tas li raws li qhov kev taw qhia axial tib lub sijhawm. Ntawm lawv, txoj kab uas hla ntawm lub log sib tsoo loj dua txoj kab uas hla ntawm cov silicon wafer ua tiav, thiab nws qhov ncig hla dhau qhov chaw ntawm silicon wafer. Txhawm rau kom txo qhov sib tsoo thiab txo qhov kub sib tsoo, lub khob nqus tsev feem ntau raug txiav mus rau hauv lub duab convex lossis concave lossis lub kaum sab xis ntawm lub log sib tsoo spindle thiab lub khob nqus spindle axis raug kho kom ntseeg tau tias kev sib tsoo semi-contact ntawm lub log sib tsoo thiab silicon wafer.

Daim Duab 3, Daim duab qhia txog silicon wafer rotary sib tsoo txoj cai

Piv nrog rau kev sib tsoo lub rooj sib tsoo, kev sib tsoo silicon wafer rotary muaj cov txiaj ntsig zoo li nram no: ① Kev sib tsoo ib zaug ib zaug tuaj yeem ua cov silicon wafers loj dua 300 hli; ② Qhov chaw sib tsoo tiag tiag B thiab lub kaum sab xis θ yog qhov ruaj khov, thiab lub zog sib tsoo ruaj khov; ③ Los ntawm kev kho lub kaum sab xis ntawm lub log sib tsoo thiab lub axis silicon wafer, cov duab ntawm cov khoom siv silicon wafer ib leeg tuaj yeem tswj tau kom tau txais qhov tseeb ntawm cov duab ntawm cov khoom. Tsis tas li ntawd, thaj chaw sib tsoo thiab lub kaum sab xis θ ntawm kev sib tsoo silicon wafer rotary kuj muaj cov txiaj ntsig ntawm kev sib tsoo loj, yooj yim nrhiav thiab tswj cov tuab thiab qhov zoo ntawm cov khoom, cov qauv khoom siv compact, yooj yim sib tsoo ntau qhov chaw sib xyaw ua ke, thiab kev sib tsoo zoo.
Yuav kom txhim kho kev tsim khoom zoo dua thiab ua tau raws li qhov xav tau ntawm cov kab ntau lawm semiconductor, cov khoom siv sib tsoo lag luam raws li lub hauv paus ntsiab lus ntawm silicon wafer rotary sib tsoo siv cov qauv ntau-spindle ntau qhov chaw nres tsheb, uas tuaj yeem ua tiav kev sib tsoo ntxhib thiab kev sib tsoo zoo hauv ib qho kev thauj khoom thiab tshem tawm. Ua ke nrog lwm cov chaw pabcuam, nws tuaj yeem paub txog kev sib tsoo tag nrho ntawm cov siv lead ua silicon wafers "qhuav-hauv/qhuav-tawm" thiab "cassette rau cassette".

Kev sib tsoo ob sab:

Thaum lub silicon wafer rotary sib tsoo ua cov nto sab saud thiab sab qis ntawm silicon wafer, lub workpiece yuav tsum tau tig thiab ua tiav hauv cov kauj ruam, uas txwv qhov ua tau zoo. Tib lub sijhawm, lub silicon wafer rotary sib tsoo muaj qhov yuam kev theej ntawm qhov chaw (copied) thiab cov cim sib tsoo (grindingmark), thiab nws tsis yooj yim sua kom tshem tawm cov qhov tsis zoo xws li waviness thiab taper ntawm qhov chaw ntawm ib leeg siv lead ua silicon wafer tom qab txiav hlau (multi-saw), raws li pom hauv Daim Duab 4. Txhawm rau kov yeej cov qhov tsis zoo saum toj no, kev siv tshuab sib tsoo ob sab (doublesidegrinding) tau tshwm sim hauv xyoo 1990, thiab nws lub hauv paus ntsiab lus tau pom hauv Daim Duab 5. Cov clamps faib symmetrically rau ob sab clamp lub ib leeg siv lead ua silicon wafer hauv lub nplhaib khaws cia thiab tig qeeb qeeb tsav los ntawm lub roller. Ib khub ntawm lub khob-puab pob zeb diamond sib tsoo log nyob rau ob sab ntawm ib leeg siv lead ua silicon wafer. Tsav los ntawm huab cua bearing hluav taws xob spindle, lawv tig mus rau hauv cov lus qhia sib txawv thiab pub axially kom ua tiav ob sab sib tsoo ntawm ib leeg siv lead ua silicon wafer. Raws li pom los ntawm daim duab, kev sib tsoo ob sab tuaj yeem tshem tawm qhov nthwv dej thiab taper ntawm qhov chaw ntawm cov silicon wafer tom qab txiav hlau. Raws li kev teeb tsa ntawm lub log sib tsoo, kev sib tsoo ob sab tuaj yeem ua kab rov tav thiab ntsug. Ntawm lawv, kev sib tsoo ob sab kab rov tav tuaj yeem txo qhov cuam tshuam ntawm kev hloov pauv ntawm silicon wafer los ntawm qhov hnyav tuag ntawm silicon wafer rau qhov zoo ntawm kev sib tsoo, thiab nws yooj yim los xyuas kom meej tias cov txheej txheem sib tsoo ntawm ob sab ntawm cov silicon wafer yog tib yam, thiab cov khoom sib tsoo thiab cov khoom sib tsoo tsis yooj yim nyob ntawm qhov chaw ntawm cov silicon wafer. Nws yog ib txoj kev sib tsoo zoo tagnrho.

Daim Duab 4, "Yuam Kev Luam theej" thiab cov cim qhia txog kev hnav tsis zoo hauv kev sib tsoo silicon wafer rotation

Daim Duab 5, daim duab qhia txog kev sib tsoo ob sab

Rooj 1 qhia txog kev sib piv ntawm kev sib tsoo thiab kev sib tsoo ob sab ntawm peb hom silicon wafers saum toj no. Kev sib tsoo ob sab feem ntau yog siv rau kev ua silicon wafer hauv qab 200 hli, thiab muaj cov wafer ntau. Vim yog siv cov log sib tsoo ruaj khov, kev sib tsoo ntawm ib-siv lead ua silicon wafers tuaj yeem tau txais qhov zoo ntawm qhov chaw siab dua li kev sib tsoo ob sab. Yog li ntawd, ob qho tib si silicon wafer rotary sib tsoo thiab ob-siv lead ua tuaj yeem ua tau raws li qhov yuav tsum tau ua kom zoo ntawm cov khoom siv tseem ceeb 300 hli silicon wafers, thiab tam sim no yog cov txheej txheem ua flattening tseem ceeb tshaj plaws. Thaum xaiv silicon wafer flattening txheej txheem ua, nws yog qhov tsim nyog los xav txog qhov yuav tsum tau ua ntawm qhov loj me, qhov zoo ntawm qhov chaw, thiab polishing wafer processing technology ntawm ib-siv lead ua silicon wafer. Kev nyias nyias ntawm wafer tsuas yog xaiv tau ib-siv lead ua ib sab, xws li silicon wafer rotary sib tsoo.

Ntxiv rau kev xaiv txoj kev sib tsoo hauv kev sib tsoo silicon wafer, nws tseem yog qhov tsim nyog los txiav txim siab qhov kev xaiv ntawm cov txheej txheem tsim nyog xws li lub siab zoo, qhov loj ntawm cov log sib tsoo, lub log sib tsoo, qhov ceev ntawm lub log sib tsoo, qhov ceev ntawm silicon wafer, qhov viscosity ntawm cov kua sib tsoo thiab qhov ntws, thiab lwm yam, thiab txiav txim siab txoj kev ua haujlwm tsim nyog. Feem ntau, cov txheej txheem sib tsoo segmented suav nrog kev sib tsoo ntxhib, kev sib tsoo semi-finishing, kev sib tsoo tiav, kev sib tsoo tsis muaj hluav taws xob thiab kev thaub qab qeeb yog siv los tau txais cov silicon wafers siv lead ua ke nrog kev ua haujlwm siab, qhov chaw tiaj tiaj siab thiab kev puas tsuaj tsawg.