He aha te take e hiahiatia ai te whakaitiiti?

I te wāhanga tukanga o muri, ko tepapa (anga silicon(me ngā ara iahiko kei mua) me whakaangawari i te tuara i mua i te tapatapahi, te whakarewa me te takai i muri mai hei whakaiti i te teitei o te whakairinga o te kete, hei whakaiti i te rahinga o te kete maramara, hei whakapai ake i te pai o te horapa wera o te maramara, te mahi hiko, ngā āhuatanga miihini me te whakaiti i te nui o te tapatapahi. He pai ngā painga o te huri whakamuri, arā, he tino pai te mahi me te iti o te utu. Kua whakakapia e ia ngā tukanga whakairo maku tuku iho me te whakairo katote kia noho ko te hangarau whakaangawari whakamuri tino nui.

Te wafer angiangi

Me pēhea te kikokore?

Te tukanga matua o te angiangi i te anga i roto i te tukanga takai tuku iho

Ngā taahiraa motuhake opapaKo te mahi whakangawari ko te here i te angaanga hei tukatuka ki te kiriata whakangawari, kātahi ka whakamahi i te korehau hei mimiti i te kiriata whakangawari me te maramara i runga ki te tēpu angaanga uku porowhita, ka whakarite i ngā rārangi pokapū poti porowhita o roto, o waho hoki o te mata mahi o te wira huri taimana āhua kapu ki waenganui o te angaanga silicon, ā, ka huri te angaanga silicon me te wira huri i ō rātou toki hei tapahi i te huri. E toru ngā wāhanga o te huri: te huri taratara, te huri pai me te whakakanapa.

Ko te wafer e puta mai ana i te wheketere wafer ka hurihia ki muri hei whakaangawari i te wafer ki te matotoru e hiahiatia ana mō te takai. I te hurihanga i te wafer, me whakapiri he rīpene ki mua (Hohenga Kaha) hei tiaki i te rohe porowhita, ā, me huri hoki te taha o muri i te wā kotahi. I muri i te hurihanga, tangohia te rīpene ka ine i te matotoru.
Ko ngā tukanga huri kua whakamahia angitu ki te whakarite i te papa angiangi silicon ko te huri i te tēpu hurihuri,anga siliconte huri hurihuri, te huri taha-rua, me ētahi atu. I te whakapainga ake o ngā whakaritenga kounga mata o ngā anga silicon tioata kotahi, ka whakaarohia tonutia ngā hangarau huri hou, pērā i te huri TAIKO, te huri matū miihini, te huri oro me te huri kōpae aorangi.

Te huri i te tēpu hurihuri:

Ko te huri tēpu hurihuri (huri tēpu hurihuri) he tukanga huri tōmua e whakamahia ana i roto i te whakarite i te papa silicon me te angiangi whakamuri. Ko tōna kaupapa matua e whakaaturia ana i te Pikitia 1. Ka mau ngā papa silicon ki ngā kapu momi o te tēpu hurihuri, ā, ka huri tahi me te taraiwa a te tēpu hurihuri. Kāore ngā papa silicon e huri huri noa i tō rātou tuaka; ka whāngaihia te wira huri ki te taha tuaka i a ia e huri ana i te tere teitei, ā, he nui ake te diameter o te wira huri i te diameter o te papa silicon. E rua ngā momo huri tēpu hurihuri: te huri mata me te huri mata. I roto i te huri mata, he nui ake te whānui o te wira huri i te diameter o te papa silicon, ā, ka whāngai tonu te pou wira huri i tōna ahunga tuaka tae noa ki te tukatuka i te toenga, kātahi ka hurihia te papa silicon i raro i te puku o te tēpu hurihuri; i roto i te huri mata, ka whāngai te wira huri i tōna ahunga tuaka, ā, ka huri tonu te papa silicon i raro i te puku o te kōpae hurihuri, ā, ka oti te huri mā te whāngai tauutuutu (tauutuutu) te whāngai ngokingoki rānei (whāngai ngokingoki).

Pikitia 1, hoahoa kauwhata o te mātāpono huri tēpu hurihuri (mata whatanga)

Ki te whakatauritea ki te tikanga huri, he pai ngā painga o te huri tēpu hurihuri, arā, he tere tango tere, he iti te kino o te mata, ā, he ngāwari te aunoa. Heoi, ko te horahanga huri tuturu (huri hohe) B me te koki tapahi θ (te koki i waenganui i te porowhita o waho o te wira huri me te porowhita o waho o te papa silicon) i roto i te tukanga huri ka huri i te huringa o te tūranga tapahi o te wira huri, ka hua ake he kaha huri kore pumau, ka uaua ki te whiwhi i te tika o te mata tino pai (te uara TTV teitei), ā, ka ngāwari te puta o ngā hapa pēnei i te hinga o te taha me te hinga o te taha. Ko te hangarau huri tēpu hurihuri te nuinga e whakamahia ana mō te tukatuka i ngā papa silicon kotahi-kiriata i raro i te 200mm. Ko te pikinga o te rahi o ngā papa silicon kotahi-kiriata kua whakapiki ake i ngā whakaritenga mō te tika o te mata me te tika o te nekehanga o te papa mahi taputapu, nō reira kāore te huri tēpu hurihuri e pai mō te huri i ngā papa silicon kotahi-kiriata i runga ake i te 300mm.
Hei whakapai ake i te whai huatanga o te huri, ko ngā taputapu huri papa-whakapūmau arumoni he tikanga whakamahi i tētahi hanganga wira huri maha. Hei tauira, he huinga wira huri taratara me tētahi huinga wira huri pai kua whakauruhia ki runga i te taputapu, ā, ka huri te tēpu hurihuri i te porowhita kotahi hei whakaoti i te huri taratara me te huri pai i te wā kotahi. Kei roto i tēnei momo taputapu ko te G-500DS o te Kamupene GTI o Amerika (Pikitia 2).

Pikitia 2, Ngā taputapu huri tēpu hurihuri G-500DS o te Kamupene GTI i te Hononga o Amerika

Te hurihanga o te anga silicon:

Hei whakatutuki i ngā hiahia o te whakarite i te papa silicon rahi me te tukatuka angiangi whakamuri, me te whiwhi i te tika o te mata me te uara TTV pai. I te tau 1988, i whakaarohia e te tohunga Hapanihi a Matsui he tikanga huri hurihanga papa silicon (huringa-i-roto). Ko tōna kaupapa matua e whakaaturia ana i te Pikitia 3. Ko te papa silicon karaihe kotahi me te wira huri taimana āhua kapu e piri ana ki runga i te papa mahi ka huri huri noa i ō rātou toki, ā, ka whāngaihia tonutia te wira huri i te ahunga tuaka i te wā kotahi. I roto i ēnei, he nui ake te diameter o te wira huri i te diameter o te papa silicon tukatuka, ā, ko tōna porowhita ka haere i waenganui o te papa silicon. Hei whakaiti i te kaha huri me te whakaiti i te wera huri, ka tapahia te kapu momi korehau kia rite ki te āhua pūkohu, piko rānei, ka whakatikatikaina rānei te koki i waenga i te pou wira huri me te pou kapu momi kia pai ai te huri-pā-haurua i waenga i te wira huri me te papa silicon.

Pikitia 3, Kauwhata hoahoa o te mātāpono huri hurihuri o te anga silicon

Ki te whakataurite ki te huri tēpu hurihuri, ko ngā painga o te huri hurihuri wafer silicon: ① Ka taea e te huri kotahi-wāhanga kotahi te tukatuka i ngā wafer silicon rahi nui neke atu i te 300mm; ② He pumau te rohe huri tuturu B me te koki tapahi θ, ā, he pumau te kaha huri; ③ Mā te whakarerekē i te koki piko i waenga i te tuaka wira huri me te tuaka wafer silicon, ka taea te whakahaere kaha i te āhua o te mata o te wafer silicon karaihe kotahi kia pai ake ai te tika o te āhua o te mata. Hei tāpiri, ko ngā painga o te rohe huri me te koki tapahi θ o te huri hurihuri wafer silicon he huri nui te tawhē, he ngāwari te kimi me te whakahaere i te matotoru ipurangi me te kounga mata, he hanganga taputapu kiato, he ngāwari te huri whakauru maha-teihana, ā, he pai te huri.
Hei whakapai ake i te whai huatanga o te whakaputa me te whakatutuki i ngā hiahia o ngā raina whakaputa haurua-ira, ko ngā taputapu huri arumoni e hangai ana ki te mātāpono o te huri hurihuri o te anga silicon he hanganga maha-pouaka maha-teihana, ka taea te whakaoti i te huri taratara me te huri pai i roto i te uta me te tango i te kotahi. I te whakakotahitanga me ētahi atu whare āwhina, ka taea te whakatutuki i te huri aunoa o ngā anga silicon karaihe kotahi "whakamaroke-roto/whakamaroke-waho" me te "rīpene ki te rīpene".

Te huri taha-rua:

Ina tukatukahia e te huri hurihuri o te wafer silicon ngā mata o runga me raro o te wafer silicon, me huri te mea mahi, ā, me mahi i roto i ngā taahiraa, ka whakawhāiti i te whai huatanga. I taua wā anō, he hapa mata tārua (tārua) me ngā tohu huri (tohu huri) kei te huri hurihuri o te wafer silicon, ā, kāore e taea te tango pai i ngā hapa pēnei i te rangorangi me te whakawhāiti i runga i te mata o te wafer silicon kotahi-kiriata i muri i te tapahi waea (maha-kanohi), e whakaaturia ana i te Pikitia 4. Hei whakakore i ngā hapa o runga ake nei, i puta mai te hangarau huri taha-rua (huri taha-rua) i ngā tau 1990, ā, ko tōna kaupapa matua e whakaaturia ana i te Pikitia 5. Ka tohatohahia ngā rawhi i ngā taha e rua mā te rawhi i te wafer silicon kotahi-kiriata ki roto i te mowhiti pupuri, ā, ka huri mārire mā te roera. Kei ngā taha e rua o te wafer silicon kotahi-kiriata he takirua wira huri taimana āhua kapu. Mā te huri i te miro hiko e kawe ana i te hau, ka huri rātou ki ngā taha rerekē, ā, ka whāngai ki te taha tuaka hei whakatutuki i te huri taha-rua o te wafer silicon kotahi-kiriata. E kitea ana i te pikitia, ka taea e te huri taha-rua te tango i te ngaru me te whāiti o te mata o te angaanga silicon kotahi-kiritaki i muri i te tapahi waea. E ai ki te ahunga whakatakotoranga o te tuaka wira huri, ka taea te huri taha-rua ki te whakapae me te poutū. I roto i ēnei, ka taea e te huri taha-rua whakapae te whakaiti i te awe o te huringa o te angaanga silicon i puta mai i te taumaha mate o te angaanga silicon ki te kounga o te huri, ā, he ngāwari ki te whakarite kia ōrite ngā āhuatanga o te tukanga huri i ngā taha e rua o te angaanga silicon kotahi-kiritaki, ā, kāore e ngāwari te noho o ngā matūriki whakakoi me ngā maramara huri ki te mata o te angaanga silicon kotahi-kiritaki. He tikanga huri tino pai tēnei.

Pikitia 4, "Hapa tārua" me ngā hapa tohu kakahu i roto i te huri hurihuri o te anga silicon

Pikitia 5, hoahoa kauwhata o te mātāpono huri taha-rua

E whakaatu ana te Ripanga 1 i te whakataurite i waenga i te huri me te huri taha-rua o ngā momo e toru o ngā papa silicon kotahi-kiriata i runga ake nei. Ko te huri taha-rua te nuinga o te wā e whakamahia ana mō te tukatuka papa silicon i raro i te 200mm, ā, he nui te hua o te papa. Nā te whakamahinga o ngā wira huri whakakoi pumau, ka taea e te huri o ngā papa silicon kotahi-kiriata te whiwhi i te kounga mata teitei ake i te huri taha-rua. Nō reira, ka taea e te huri hurihuri papa silicon me te huri taha-rua te whakatutuki i ngā whakaritenga kounga tukatuka o ngā papa silicon 300mm matua, ā, koinei ngā tikanga tukatuka whakaparaha nui rawa atu i tēnei wā. I te wā e whiriwhiri ana i tētahi tikanga tukatuka whakaparaha papa silicon, me whakaaro whānui ki ngā whakaritenga o te rahi o te diameter, te kounga o te mata, me te hangarau tukatuka papa oro o te papa silicon kotahi-kiriata. Ko te whakaparaha whakamuri o te papa ka taea anake te whiriwhiri i tētahi tikanga tukatuka taha-kotahi, pērā i te tikanga huri hurihuri papa silicon.

Haunga te whiriwhiri i te tikanga huri i roto i te huri i te papa silicon, me whakatau hoki i te whiriwhiri i ngā tawhā tukanga whaitake pēnei i te pēhanga pai, te rahi o te witi wira huri, te here wira huri, te tere o te wira huri, te tere o te papa silicon, te matotoru o te wai huri me te tere rere, me ētahi atu, me te whakatau i te ara tukanga whaitake. I te nuinga o te wā, ka whakamahia he tukanga huri wāhanga tae atu ki te huri taratara, te huri haurua-whakaoti, te huri whakaoti, te huri kore-mura me te whakamuri puhoi hei whiwhi i ngā papa silicon karaihe kotahi me te pai o te tukatuka, te papatahi o te mata me te iti o te kino o te mata.