Silicon Carbide Coated Graphite Substrate for Semiconductor, MOCVD Susceptor

Short Description:

VET Energy SiC Coated Susceptor is a high-performance product designed to provide consistent and reliable performance over an extended period. It has super good heat resistance and thermal uniformity, high purity, erosion resistance, making it the perfect solution for wafer processing applications.

  • Place of Origin: Zhejiang, China (Mainland)
  • Model Number: Model Number:
  • Chemical Composition: SiC coated graphite
  • Flexural strength: 470Mpa
  • Thermal conductivity: 300 W/mK
  • Quality: Perfect
  • Function: CVD-SiC
  • Application: Semiconductor /Photovoltaic
  • Density: 3.21 g/cc
  • Thermal expansion: 4 10-6/K
  • Ash: <5ppm
  • Sample: Avaliable
  • HS Code: 6903100000
  • Product Detail

    Product Tags

    SiC Coated Graphite Susceptor is a key component used in various semiconductor manufacturing processes. we use our patented technology to make the silicon carbide carrier with extremely high purity, good coating uniformity and an excellent service life, as well as high chemical resistance and thermal stability properties.


    Features of our products:

    1. High temperature oxidation resistance up to 1700℃.
    2. High purity and thermal uniformity
    3. Excellent corrosion resistance: acid, alkali, salt and organic reagents.

    4. High hardness, compact surface, fine particles.
    5. Longer service life and more durable

    CVD SiC薄膜基本物理性能

    Basic physical properties of CVD SiC coating

    性质 / Property

    典型数值 / Typical Value

    晶体结构 / Crystal Structure

    FCC β phase 多晶,主要为(111)取向

    密度 / Density

    3.21 g/cm³

    硬度 / Hardness

    2500 维氏硬度(500g load)

    晶粒大小 / Grain SiZe


    纯度 / Chemical Purity


    热容 / Heat Capacity

    640 J·kg-1·K-1

    升华温度 / Sublimation Temperature


    抗弯强度 / Flexural Strength

    415 MPa RT 4-point

    杨氏模量 / Young' s Modulus

    430 Gpa 4pt bend, 1300℃

    导热系数 / ThermaConductivity


    热膨胀系数 / Thermal Expansion(CTE)




    VET Energy is the real manufacturer of customized graphite and silicon carbide products with different coatings like SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc., can supply various customized parts for semiconductor and photovoltaic industry. 

    Our technical team comes from top domestic research institutions, can provide more professional material solutions for you.

    We continuously develop advanced processes to provide more advanced materials, and have worked out an exclusive patented technology, which can make the bonding between the coating and the substrate tighter and less prone to detachment.

    Warmly welcome you to visit our factory, let's have further discussion!






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