Wāhanga Haurua Marama Karāwhite Panipani SiChe wāhanga matua e whakamahia ana i roto i ngā tukanga hanga semiconductor, inā koa mō ngā taputapu epitaxial SiC. Ko tōna hoahoa hanganga me ngā āhuatanga rauemi ka whakatau tika i te kounga me te whai huatanga o te whakaputanga o ngā wafers epitaxial.
Te hanganga o te rūma tauhohenga:
E rua ngā wāhanga o te wāhanga haurua-marama, arā, ko ngā wāhanga o runga me ngā wāhanga o raro, he mea here tahi hei hanga i tētahi rūma tipu kua kati, hei whakanoho i te paparanga silicon carbide (ko te tikanga he 4H-SiC, he 6H-SiC rānei) ā, ka tutuki te tipu o te paparanga epitaxial mā te whakahaere tika i te mara rere hau (pērā i te ranunga o SiH₄, C₃H₈, me te H₂).
Te whakahaere i te mara pāmahana:
Ka taea e te turanga graphite teitei-parakore me te koiri whakamahana arataki te pupuri i te pāmahana rūma (i roto i te ±5°C) i te pāmahana teitei o te 1500-1700°C kia rite ai te matotoru o te paparanga epitaxial.
Aratohu rere hau:
Mā te hoahoa i te tūranga o te tomokanga me te putanga o te hau (pērā i te tomokanga taha me te putanga hau o runga o te tinana oumu whakapae), ka arahina te rere o te hau tauhohenga i roto i te mata o te papa hei whakaiti i ngā hapa tipu i puta mai i te aueue.
Rauemi turanga: karāpeti parakore teitei
Ngā whakaritenga parakore:te ihirangi waro ≥99.99%, te ihirangi pungarehu ≤5ppm, kia kore ai he poke e puta hei whakapoke i te paparanga epitaxial i ngā pāmahana tiketike.
Ngā painga mahi:
Te kawe wera teitei:Ka eke te kawe wera i te pāmahana rūma ki te 150W/(m・K), e tata ana ki te taumata o te parahi, ā, ka taea te whakawhiti wera tere.
Tauwehenga whakawhanui iti:5×10-6/℃ (25-1000℃), e ōrite ana ki te paparanga silicon carbide (4.2×10-6/℃), te whakaiti i te ngatata o te paninga i puta mai i te ahotea wera.
Te tika o te tukatuka:Ka tutukihia te ātete ā-ahu o te ±0.05mm mā te miihini CNC hei whakarite i te hiri o te rūma.
Ngā tono rerekē o te CVD SiC me te CVD TaC
| Paninga | Tukanga | Whakataurite | Te tono noa |
| CVD-SiC | Pāmahana: 1000-1200℃ Pēhanga: 10-100 Torr | Pakeke HV2500, matotoru 50-100um, ātete pai ki te waikura (pūmau i raro i te 1600℃) | Ngā oumu epitaxial whānui, e tika ana mō ngā hau tuku iho pērā i te hauwai me te silane |
| CVD-TaC | Pāmahana: 1600-1800℃ Pēhanga: 1-10 Torr | Te pakeke HV3000, te matotoru 20-50um, he tino ātete ki te waikura (ka taea te tu atu ki ngā hau waikura pēnei i te HCl, NH₃, me ētahi atu) | Ngā taiao tino waikura (pērā i te taputapu epitaxy me te whakairo GaN), ngā tukanga motuhake rānei e hiahia ana ki ngā pāmahana tino teitei o te 2600°C |
He kaihanga ngaio a VET Energy e arotahi ana ki te R&D me te hanga rauemi matatau teitei pēnei i te graphite, te silicon carbide, te quartz, me te maimoatanga rauemi pēnei i te paninga SiC, te paninga TaC, te paninga waro karāhe, te paninga waro pyrolytic, me ētahi atu. E whakamahia whānuitia ana ēnei hua i roto i te photovoltaic, te semiconductor, te pūngao hou, te metallurgy, me ētahi atu.
Nō ngā umanga rangahau ā-rohe matua tā mātou tīma hangarau, ā, ka taea e rātou te whakarato i ngā otinga rauemi ngaio ake māu.
Ko ngā painga o VET Energy ko:
• He wheketere ake, he taiwhanga ngaio hoki;
• Ngā taumata parakore me te kounga matua o te ahumahi;
• Utu whakataetae me te wā tuku tere;
• Ngā hononga mahi tahi maha puta noa i te ao;
Nau mai ki te toro mai ki tā mātou wheketere me te taiwhanga i ngā wā katoa!
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