Chophimba cholimba cha SiC chinakonzedwa pamwamba pa graphite pogwiritsa ntchito njira ya CVD

Chophimba cha SiC chingakonzedwe pogwiritsa ntchito mankhwala oika nthunzi (CVD), kusintha kwa precursor, kupopera plasma, ndi zina zotero. Chophimba chokonzedwa pogwiritsa ntchito CHEMICAL nthunzi ndi chofanana komanso chopapatiza, ndipo chili ndi kapangidwe kabwino. Pogwiritsa ntchito methyl trichlosilane. (CHzSiCl3, MTS) ngati gwero la silicon, chophimba cha SiC chokonzedwa pogwiritsa ntchito njira ya CVD ndi njira yokhwima yogwiritsira ntchito chophimbachi.
Chophimba cha SiC ndi graphite zimagwirizana bwino ndi mankhwala, kusiyana kwa kutentha pakati pawo ndi kochepa, kugwiritsa ntchito chophimba cha SiC kungathandize kwambiri kukana kuwonongeka ndi kukana okosijeni kwa zinthu za graphite. Pakati pawo, chiŵerengero cha stoichiometric, kutentha kwa reaction, mpweya wosungunuka, mpweya wodetsedwa ndi zina zimakhudza kwambiri zomwe zimachitika.