Ka taea te whakarite i te paninga SiC mā te whakatakoto kohu matū (CVD), te whakawhiti matū, te rehu plasma, me ētahi atu. He ōrite, he kiato hoki te paninga i whakaritea mā te whakatakoto kohu MATUA, ā, he pai te hoahoa. Mā te whakamahi i te methyl trichlosilane (CHzSiCl3, MTS) hei pūtake silicon, he tikanga pakari te paninga SiC i whakaritea mā te tikanga CVD mō te tono i tēnei paninga.
He pai te hototahitanga matū o te paninga SiC me te karāpeti, he iti noa te rerekētanga o te tauwehenga whānui wera i waenganui i a rāua, mā te whakamahi i te paninga SiC ka taea te whakapai ake i te ātete kakahu me te ātete waikura o te rauemi karāpeti. I roto i ēnei, he nui te pānga o te ōwehenga stoichiometric, te pāmahana tauhohenga, te hau waimeha, te hau poke me ētahi atu āhuatanga ki te tauhohenga.
Wā tuku: Hepetema-14-2022