A cikin 'yan shekarun nan, amfani da kayan SiC a masana'antar semiconductor ya ƙaru a hankali, musamman a cikin na'urorin lantarki masu amfani da wutar lantarki, na'urorin optoelectronic da kayan aiki masu yawan mita, inda aikace-aikacensu ya zama ruwan dare. SiC, tare da tsananin tauri, kyakkyawan kwanciyar hankali na zafi da kyawawan halayen lantarki, ya zama muhimmin madadin kayan silicon (Si) a masana'antu. Duk da haka, don cimma ingantaccen samarwa na na'urorin SiC, ban da samun tsauraran buƙatu don tsarin kera wafers na SiC, ba za a iya yin watsi da fasahar tallafawa wafer ba. A cikin wannan tsari, rawar da Mai Rike Wafer na SiC ya taka muhimmiyar rawa.
A Mai Rike Wafer na SiCNa'ura ce da aka tsara musamman don tallafawa da gyara wafers na SiC. Wafers suna buƙatar yin ayyuka da yawa a cikin tsarin kera semiconductor, gami da adana tururin sinadarai (CVD), adana fim mai siriri, ɗaukar hoto, etching, da sauransu. Duk waɗannan hanyoyin suna buƙatar daidaitaccen matsayi da goyon bayan wafers mai ƙarfi. An tsara Mai riƙe SiC Wafer daidai don samar da tallafi mai ƙarfi, tabbatar da cewa wafers ba sa canzawa, lanƙwasa ko lalacewa yayin waɗannan hanyoyin. Saboda tsananin tauri da juriyar kayan SiC mai zafi, masu riƙe SiC Wafer yawanci ana yin su ne da kayan da ke da juriyar zafi da juriyar tsatsa, kuma suna buƙatar samun kyakkyawan yanayin zafi da kwanciyar hankali na sinadarai.
A tsarin kera wafers na semiconductor, yawanci ana buƙatar sarrafa wafers na SiC a cikin yanayi mai zafi da matsin lamba mai yawa. A ƙarƙashin waɗannan yanayin aikin, wafers suna fuskantar tasirin tasirin zahiri na waje, faɗaɗa zafi da sauran abubuwa, wanda ke haifar da nakasa, ƙaiƙayi ko gurɓata wafers. Matsayin Mai Riƙe Wafer na SiC shine don hana waɗannan matsalolin faruwa ta hanyar samar da ƙarfi da ƙarfi na tallafi.
Aikace-aikace
- CVD (Sinadarin Tururi Mai Tsami): A cikin tsarin CVD, yana iya samar da ingantaccen tallafin matsayi ga wafer, yana tabbatar da adana fim ɗin a cikin yanayi iri ɗaya.
- Lithography da Etching: Yana iya tabbatar da daidaiton daidaiton wafer ɗin, guje wa yanayin daidaitawa da rashin daidaituwa, da kuma tabbatar da daidaiton tasirin etching ɗin
- PVD: A cikin matakai kamar PVD da sputtering, ya zama dole a samar da tallafi mai kyau kuma a iya jure tasirin ƙwayoyin cuta masu ƙarfi don kiyaye aiki mai dorewa
- Gwaji da Marufi: A lokacin gwaji da marufi na na'urorin semiconductor, musamman a gwajin na'urori masu yawan mitoci da ƙarfi, ana buƙatar tsarin tallafi mai matuƙar daidaito.
Lokacin Saƙo: Agusta-08-2025