I ngā tau tata nei, kua piki haere te whakamahinga o ngā rauemi SiC i roto i te umanga haurua-ira, inā koa i roto i ngā hikohiko mana, ngā taputapu optoelectronic me ngā taputapu auau-teitei, ā, kua whānui haere te whakamahinga o aua rauemi. Ko te SiC, me tōna pakeke tino teitei, tōna pumau wera pai me ōna āhuatanga hiko pai, kua noho hei huarahi kē atu ki ngā rauemi silicon (Si) i roto i te umanga. Heoi, kia tutuki ai te whakaputanga pai me te kounga teitei o ngā taputapu SiC, me te whai i ngā whakaritenga tino pakari mō te tukanga hanga o ngā anga SiC, kāore e taea te wareware i te hangarau tautoko anga. I roto i tēnei tukanga, ka tino hira te tūranga o te Kaimau Anga SiC.
A Pupuri Wafer SiCHe taputapu i hangaia mō te tautoko me te whakapiri i ngā anga SiC. Me whai ngā anga i ngā tukanga maha i roto i te tukanga hanga haurua-ira, tae atu ki te whakatakotoranga kohu matū (CVD), te whakatakotoranga kiriata angiangi, te whakaahua-ipurangi, te whakairo, me ētahi atu. Me tika te tūnga me te tautoko pumau o ngā anga i ēnei tukanga katoa. He mea hanga tika te Pupuri Anga SiC hei whakarato tautoko pumau, kia kore ai ngā anga e neke, e piko, e hē rānei i roto i ēnei tukanga. Nā te tino pakeke me te ātete pāmahana teitei o te rauemi SiC, ko ngā pupuri anga SiC he mea hanga i ngā rauemi he ātete pāmahana teitei me te ātete waikura, ā, me pai te kawe wera me te pumau matū.
I roto i te tukanga hanga haurua-ira, me tukatuka ngā papa SiC i roto i te taiao pāmahana teitei me te pēhanga teitei. I raro i ēnei āhuatanga tukanga, ka ngāwari ngā papa ki te awe o ngā pānga ā-tinana o waho, te whakawhānui wera me ētahi atu āhuatanga, ka arahi ki te whakarerekētanga, te karawarawa, te poke rānei o ngā papa. Ko te mahi a te Pupuri Papa SiC he ārai i ēnei raruraru mā te whakarato i te kaha tautoko kaha me te pumau.
Tono
- CVD (Te Whakatakotoranga Kohu Matū): I roto i te tukanga CVD, ka taea e ia te tautoko i te tūnga tika mō te anga, kia rite ai te whakatakotoranga o te kiriata ki te āhuarangi.
- Te Whakairoiro me te Whakairo: Ka taea e ia te whakarite i te whakaritenga tika o te anga, te karo i ngā tauira taupatupatu me ngā tauira kore taurite, me te whakamana i te tika o te pānga whakairo
- PVD: I roto i ngā tukanga pēnei i te PVD me te sputtering, me whakarato he tautoko pai, me te kaha hoki ki te tu atu i te pānga o ngā matūriki kaha-teitei kia mau tonu ai te mahi pumau.
- Te Whakamātautau me te Tākai: I te wā e whakamātautau ana, e tākai ana hoki i ngā taputapu haurua-ira, inā koa i te whakamātautau i ngā taputapu auau-tiketike me te mana-tiketike, me whai pūnaha tautoko tino tika.
Wā tuku: Akuhata-08-2025