Eminyakeni yamuva nje, ukusetshenziswa kwezinto ze-SiC embonini ye-semiconductor kuye kwanda kancane kancane, ikakhulukazi kuma-electronics anamandla, amadivayisi e-optoelectronic kanye nemishini yemvamisa ephezulu, lapho ukusetshenziswa kwazo kuye kwanda khona. I-SiC, enobulukhuni bayo obuphezulu kakhulu, ukuzinza kokushisa okuhle kakhulu kanye nezakhiwo ezinhle zikagesi, isibe yindlela ebalulekile yokukhetha izinto ze-silicon (Si) embonini. Kodwa-ke, ukuze kufezwe ukukhiqizwa okuphumelelayo nokuseqophelweni eliphezulu kwamadivayisi e-SiC, ngaphezu kokuba nezidingo eziqinile zenqubo yokukhiqiza ama-wafer e-SiC, ubuchwepheshe bokusekela ama-wafer abunakunganakwa futhi. Kule nqubo, indima ye-SiC Wafer Holder iba ebaluleke kakhulu.
A Isibambi se-SiC Waferiyithuluzi eliklanyelwe ngqo ukusekela nokulungisa ama-wafer e-SiC. Ama-wafer adinga ukudlula ezinqubweni eziningi enqubweni yokukhiqiza ama-semiconductor, okuhlanganisa ukufakwa kwe-chemical vapor (CVD), ukufakwa kwefilimu encane, i-photolithography, ukuqopha, njll. Zonke lezi zinqubo zidinga indawo eqondile kanye nokusekelwa okuzinzile kwama-wafer. I-SiC Wafer Holder yenzelwe ngokunembile ukunikeza ukwesekwa okuzinzile, ukuqinisekisa ukuthi ama-wafer awaguquki, awagobi noma awaguquki phakathi nalezi zinqubo. Ngenxa yobunzima obuphezulu kakhulu kanye nokumelana nokushisa okuphezulu kwezinto ze-SiC, izibambo ze-SiC Wafer zivame ukwenziwa ngezinto ezinokumelana nokushisa okuphezulu kanye nokumelana nokugqwala, futhi zidinga ukuba nokushisa okuhle kanye nokuqina kwamakhemikhali.
Enqubweni yokukhiqiza i-semiconductor, ama-wafer e-SiC ngokuvamile adinga ukucutshungulwa endaweni enokushisa okuphezulu kanye nokucindezela okuphezulu. Ngaphansi kwalezi zimo zenqubo, ama-wafer athambekele ekuthonyweni yimithelela yangaphandle yomzimba, ukwanda kokushisa kanye nezinye izici, okuholela ekuguqukeni, ekuklwebhekeni noma ekungcoleni kwama-wafer. Indima ye-SiC Wafer Holder iwukuvimbela ngqo lezi zinkinga ukuthi zenzeke ngokunikeza amandla okusekela aqinile futhi azinzile.
Isicelo
- I-CVD (Ukufakwa Komusi Wekhemikhali): Enqubweni ye-CVD, inganikeza ukwesekwa okunembile kokubekwa kwe-wafer, iqinisekise ukufakwa okufanayo kwefilimu emoyeni.
- I-Lithography kanye ne-Etching: Ingaqinisekisa ukuqondaniswa okunembile kwe-wafer, igweme amaphethini ahlukile futhi angalingani, futhi iqinisekise ukunemba komphumela we-etching
- I-PVD: Ezinqubweni ezifana ne-PVD kanye nokubhoboza, kuyadingeka ukunikeza ukwesekwa okuhle futhi ukwazi ukumelana nomthelela wezinhlayiya ezinamandla aphezulu ukuze kugcinwe ukusebenza okuzinzile.
- Ukuhlola Nokupakisha: Ngesikhathi sokuhlolwa nokupakisha amadivayisi e-semiconductor, ikakhulukazi ekuhlolweni kwamadivayisi asebenzisa imvamisa ephezulu kanye namandla aphezulu, kudingeka uhlelo lokusekela olunembe kakhulu.
Isikhathi sokuthunyelwe: Agasti-08-2025