Ni iyihe koranabuhanga ry'ingenzi rifasha abakora ibikoresho bya semiconductors

Mu myaka ya vuba aha, ikoreshwa ry'ibikoresho bya SiC mu nganda za semiconductor ryagiye ryiyongera buhoro buhoro, cyane cyane mu bikoresho by'ikoranabuhanga bikoresha ingufu, ibikoresho bya optoelectronic n'ibikoresho bikoresha inshuro nyinshi, aho ikoreshwa ryabyo ryarushijeho gukwirakwira. SiC, ifite ubukana bwayo bukabije, ubushyuhe bwayo buhamye n'ubushobozi bwayo bwiza bw'amashanyarazi, yabaye ikindi kintu cy'ingenzi gisimbura ibikoresho bya silicon (Si) mu nganda. Ariko, kugira ngo ibikoresho bya SiC bikoreshwe neza kandi mu buryo bwiza, uretse kuba bifite ibisabwa bikomeye mu gukora wafer za SiC, ikoranabuhanga ryo gushyigikira wafer naryo ntirishobora kwirengagizwa. Muri iki gikorwa, uruhare rwa SiC Wafer Holder ruba ingenzi cyane.

A Igikoresho cyo kubikamo ifu ya SiCni igikoresho cyagenewe gushyigikira no gusana wafer za SiC. Wafer zigomba kunyura mu nzira nyinshi mu gukora semiconductor, harimo chemical vapor deposition (CVD), thin film deposition, photolithography, etching, nibindi. Izi nzira zose zisaba ahantu nyaho no gushyigikira neza wafer. SiC Wafer Holder yagenewe gutanga inkunga ihamye, igenzura ko wafer zidahinduka, zidahinduka cyangwa ngo zihinduke muri izi nzira. Bitewe n'ubukana bwinshi cyane n'ubushyuhe bwinshi bw'ibikoresho bya SiC, SiC Wafer holders isanzwe ikorwa mu bikoresho bifite ubushyuhe bwinshi n'ubudahangarwa, kandi igomba kugira imikorere myiza y'ubushyuhe n'ubudahangarwa bw'imiti.

Mu gikorwa cyo gukora semiconductor, SiC wafers zikunze gutunganywa ahantu hari ubushyuhe bwinshi kandi hashyushye cyane. Muri ubu buryo, wafers zikunze kugira ingaruka ku ngaruka zikomoka ku bintu byo hanze, kwaguka k'ubushyuhe n'ibindi bintu, bigatuma wafers zihinduka, zicika cyangwa zanduzwa. Uruhare rwa SiC Wafer Holder ni ukurinda ko ibyo bibazo bibaho binyuze mu gutanga imbaraga zikomeye kandi zihamye zo gushyigikira.

Porogaramu

• CVD (Gushyiramo umwuka wa chimique): Muri gahunda ya CVD, ishobora gutanga ubufasha buhamye ku gipimo cya wafer, bigatuma firime ishyirwa mu kirere kimwe.
• Lithography na Etching: Ishobora kwemeza ko wafer igororotse, kwirinda imiterere idahuye n'iy'urukiramende, kandi ikagaragaza ko ingaruka zo gushushanya ari ukuri.
• PVD: Mu bikorwa nka PVD no gusohora amazi, ni ngombwa gutanga inkunga nziza no kwihanganira ingaruka z'uduce dufite ingufu nyinshi kugira ngo dukomeze gukora neza.
• Gupima no Gupakira: Mu gihe cyo gupima no gupakira ibikoresho bya semiconductor, cyane cyane mu gupima ibikoresho bifite imbaraga nyinshi n'izikoresha imbaraga nyinshi, hakenewe uburyo bwo kubishyigikira bunoze cyane.