Cov thev naus laus zis txhawb nqa tseem ceeb tshaj plaws rau semiconductors yog dab tsi?

Nyob rau xyoo tas los no, kev siv cov ntaub ntawv SiC hauv kev lag luam semiconductor tau maj mam nce ntxiv, tshwj xeeb tshaj yog hauv cov khoom siv hluav taws xob, cov khoom siv optoelectronic thiab cov khoom siv zaus siab, qhov twg lawv daim ntawv thov tau dhau los ua dav dav. SiC, nrog nws qhov nyuaj heev, kev ruaj khov thermal zoo heev thiab cov khoom siv hluav taws xob zoo, tau dhau los ua lwm txoj hauv kev tseem ceeb rau cov ntaub ntawv silicon (Si) hauv kev lag luam. Txawm li cas los xij, kom ua tiav kev tsim khoom zoo thiab zoo ntawm SiC cov khoom siv, ntxiv rau kev muaj cov kev cai nruj rau cov txheej txheem tsim khoom ntawm SiC wafers, cov thev naus laus zis txhawb nqa wafer tsis tuaj yeem tsis quav ntsej. Hauv cov txheej txheem no, lub luag haujlwm ntawm SiC Wafer Holder tau dhau los ua qhov tseem ceeb tshwj xeeb.

A SiC Wafer Holderyog ib lub cuab yeej tsim tshwj xeeb rau kev txhawb nqa thiab kho SiC wafers. Wafers yuav tsum tau dhau ntau yam txheej txheem hauv cov txheej txheem tsim khoom semiconductor, suav nrog cov tshuaj vapor deposition (CVD), cov zaj duab xis nyias nyias, photolithography, etching, thiab lwm yam. Tag nrho cov txheej txheem no xav tau qhov chaw tseeb thiab kev txhawb nqa ruaj khov ntawm cov wafers. Lub SiC Wafer Holder tau tsim tshwj xeeb los muab kev txhawb nqa ruaj khov, xyuas kom meej tias cov wafers tsis txav, khoov lossis deform thaum lub sijhawm no. Vim yog qhov nyuaj heev thiab kev tiv taus kub ntawm cov khoom SiC, SiC Wafer tuav feem ntau yog ua los ntawm cov ntaub ntawv uas muaj kev tiv taus kub thiab kev tiv taus corrosion, thiab xav tau kev ua tau zoo thermal thiab kev ruaj khov tshuaj lom neeg.

Hauv cov txheej txheem tsim khoom semiconductor, SiC wafers feem ntau yuav tsum tau ua tiav hauv qhov kub thiab txias thiab siab. Nyob rau hauv cov txheej txheem no, wafers feem ntau raug cuam tshuam los ntawm kev cuam tshuam sab nraud, thermal nthuav dav thiab lwm yam, ua rau deformation, khawb lossis ua qias tuaj ntawm wafers. Lub luag haujlwm ntawm SiC Wafer Holder yog kom tiv thaiv cov teeb meem no los ntawm kev muab lub zog txhawb nqa muaj zog thiab ruaj khov.

Daim Ntawv Thov

• CVD (Kev Tso Tshuaj Vapor): Hauv cov txheej txheem CVD, nws tuaj yeem muab kev txhawb nqa qhov chaw tseeb rau lub wafer, kom ntseeg tau tias cov yeeb yaj kiab sib xws hauv huab cua
• Lithography thiab Etching: Nws tuaj yeem ua kom ntseeg tau tias qhov sib dhos ntawm lub wafer, zam kev sib txawv thiab cov qauv asymmetrical, thiab lav qhov tseeb ntawm cov nyhuv etching
• PVD: Hauv cov txheej txheem xws li PVD thiab sputtering, nws yog qhov tsim nyog los muab kev txhawb nqa zoo thiab tseem tuaj yeem tiv taus qhov cuam tshuam ntawm cov khoom siv hluav taws xob siab kom tswj tau kev ua haujlwm ruaj khov
• Kev Ntsuas thiab Ntim Khoom: Thaum lub sijhawm sim thiab ntim cov khoom siv semiconductor, tshwj xeeb tshaj yog hauv kev sim cov khoom siv zaus siab thiab muaj zog siab, xav tau lub kaw lus txhawb nqa meej heev.