Kedu ihe bụ teknụzụ nkwado kachasị mkpa maka semiconductors?

N'afọ ndị na-adịbeghị anya, ojiji nke ihe SiC na ụlọ ọrụ semiconductor amụbaala nke ukwuu, ọkachasị na ngwa eletrọniki ike, ngwaọrụ optoelectronic na ngwa ugboro ugboro, ebe ojiji ha aghọọla ihe a na-ahụkarị. SiC, nke nwere ike siri ike nke ukwuu, nkwụsi ike okpomọkụ dị mma na ezigbo ihe onwunwe eletriki, aghọwo ihe dị mkpa maka ihe silicon (Si) na ụlọ ọrụ. Agbanyeghị, iji nweta mmepụta dị irè na nke dị elu nke ngwaọrụ SiC, na mgbakwunye na inwe ihe achọrọ siri ike maka usoro mmepụta nke wafers SiC, enweghị ike ileghara teknụzụ nkwado wafer anya. N'ime usoro a, ọrụ nke SiC Wafer Holder na-aghọ ihe dị mkpa karịsịa.

A Ihe njide Wafer SiCbụ ngwaọrụ e mere kpọmkwem maka ịkwado na idozi wafers SiC. Wafers kwesịrị ịgafe ọtụtụ usoro na usoro mmepụta semiconductor, gụnyere nchekwa anwụrụ kemịkalụ (CVD), ntinye ihe nkiri dị gịrịgịrị, fotolithography, etching, wdg. Usoro ndị a niile chọrọ nhazi ziri ezi na nkwado kwụsiri ike nke wafers. E mepụtara SiC Wafer Holder kpọmkwem iji nye nkwado kwụsiri ike, na-ahụ na wafers anaghị agbanwe agbanwe, gbagọọ ma ọ bụ gbanwee n'oge usoro ndị a. N'ihi oke ike na iguzogide okpomọkụ dị elu nke ihe SiC, a na-ejikarị ihe ndị nwere oke iguzogide okpomọkụ na iguzogide nchara eme ihe, ha kwesịkwara inwe ezigbo conductivity okpomọkụ na nkwụsi ike kemịkalụ.

N'usoro mmepụta semiconductor, a na-achọkarị ka a na-ahazi wafer SiC n'ebe okpomọkụ dị elu na nrụgide dị elu. N'okpuru ọnọdụ usoro ndị a, wafers na-enwekarị mmetụta nke mmetụta anụ ahụ mpụga, mgbasa okpomọkụ na ihe ndị ọzọ, na-ebute mgbanwe, ọkọ ma ọ bụ mmetọ nke wafers. Ọrụ nke SiC Wafer Holder bụ kpọmkwem igbochi nsogbu ndị a ime site n'inye ike nkwado siri ike na nke kwụsiri ike.

Ngwa

• CVD (Ntinye Mmiri Kemịkalụ): N'ime usoro CVD, ọ nwere ike inye nkwado nhazi ziri ezi maka wafer ahụ, na-ahụ na edobere ihe nkiri ahụ n'otu ebe n'ikuku
• Lithography na Etching: Ọ nwere ike hụ na nhazi nke wafer ahụ ziri ezi, zere usoro mgbanwe na nke asymmetric, ma hụ na mmetụta etching ziri ezi
• PVD: N'ime usoro dịka PVD na sputtering, ọ dị mkpa inye nkwado dị mma ma nwee ike iguzogide mmetụta nke ihe ndị dị ike iji nọgide na-arụ ọrụ kwụsiri ike
• Nnwale na Nkwakọba: N'oge nnwale na nkwakọ ngwaahịa nke ngwaọrụ semiconductor, ọkachasị n'ule nke ngwaọrụ dị elu na nke dị elu, achọrọ sistemụ nkwado nke ọma.