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Te whakairo o te Poly me te SiO2:
Whai muri i tēnei, ka tangohia atu te Poly me te SiO2 taikaha, arā, ka tangohia. I tēnei wā, ka whakamahia te arongawhakairoe whakamahia ana. I roto i te whakarōpūtanga o te whakairo, he whakarōpūtanga o te whakairo ahunga me te whakairo kore-ahu. Ko te whakairo ahunga e pā ana kiwhakairoi tētahi ahunga, ko te whakairo kore-ahu he kore-ahu (he nui rawa aku kōrero. I roto i te poto, ko te tango i te SiO2 i tētahi ahunga mā roto i ngā waikawa me ngā kawa motuhake). I tēnei tauira, ka whakamahia e mātou te whakairo whakararo hei tango i te SiO2, ā, ka pēnei te āhua.
Hei whakamutunga, tangohia te ātete whakaahua. I tēnei wā, ko te tikanga tango i te ātete whakaahua ehara i te whakahohenga mā te hihi mārama kua whakahuatia ake nei, engari mā ētahi atu tikanga, nā te mea kāore e hiahiatia kia tautuhia he rahi motuhake i tēnei wā, engari me tango katoa te ātete whakaahua. Hei whakamutunga, ka rite ki te mea e whakaaturia ana i te pikitia e whai ake nei.
Mā tēnei, kua tutuki i a mātou te whāinga o te pupuri i te tauwāhi motuhake o te Poly SiO2.
Te hanganga o te pūtake me te rerenga wai:
Hei whakamutunga, me whakaaro tātou ki te hanganga o te pūtake me te waikeri. Kei te maumahara tonu te katoa i kōrero tātou mō tēnei i te putanga whakamutunga. Kua whakatōkia te pūtake me te waikeri ki te momo huānga kotahi ki te katote. I tēnei wā, ka taea e tātou te whakamahi i te photoresist hei whakatuwhera i te wāhi pūtake/waikeri e hiahiatia ana kia whakatōkia te momo N. Nā te mea ko te NMOS anake hei tauira, ka whakatuwheratia ngā wāhanga katoa o te ahua i runga ake nei, e whakaaturia ana i te ahua e whai ake nei.
Nā te mea kāore e taea te whakauru i te wāhanga kua hipokina e te ātete whakaahua (kua āraia te mārama), ka whakaurua noa ngā huānga momo-N ki te NMOS e hiahiatia ana. Nā te mea kua āraia te papa i raro i te poly e te poly me te SiO2, kāore e whakaurua, nō reira ka pēnei te āhua.
I tēnei wā, kua hangaia he tauira MOS māmā. I roto i te ariā, ki te tāpirihia te ngaohiko ki te pūtake, te waikeri, te poly me te papa, ka taea e tēnei MOS te mahi, engari kāore e taea te tango noa i tētahi tirotiro me te tāpiri tika i te ngaohiko ki te pūtake me te waikeri. I tēnei wā, me whai waea MOS, arā, i runga i tēnei MOS, honoa ngā waea hei hono i ngā MOS maha. Me titiro tātou ki te tukanga waea.
Te hanga VIA:
Ko te taahiraa tuatahi ko te hipoki i te MOS katoa ki tētahi paparanga o te SiO2, e whakaaturia ana i te pikitia i raro nei:
Ko te tikanga, ka hangaia tēnei SiO2 e te CVD, nā te mea he tino tere, he penapena wā hoki. Ko te tukanga e whai ake nei ko te whakatakoto i te photoresist me te whakaatu. I muri i te mutunga, koinei te āhua.
Kātahi ka whakamahia te tikanga whakairo hei whakairo i tētahi kōhao ki runga i te SiO2, e whakaaturia ana i te wāhanga hina o te pikitia i raro nei. Ka pā tika te hohonutanga o tēnei kōhao ki te mata Si.
Hei whakamutunga, tangohia te ātete whakaahua, ā, ka puta te āhua e whai ake nei.
I tēnei wā, ko te mea me mahi ko te whakakī i te ara iahiko i roto i tēnei kōhao. Mō te aha tēnei ara iahiko? He rerekē ia kamupene, ko te nuinga he koranu tungsten, nō reira me pēhea te whakakī i tēnei kōhao? Ko te tikanga PVD (Physical Vapor Deposition) te tikanga e whakamahia ana, ā, he rite te kaupapa ki te ahua i raro nei.
Whakamahia ngā irahiko, ngā katote rānei, he kaha-teitei te kaha, hei pupuhi i te rauemi ūnga, ā, ka taka te rauemi ūnga pakaru ki raro i te āhua o ngā ngota, ka hanga te paninga i raro. Ko te rauemi ūnga e kitea ana i roto i ngā purongo e pā ana ki te rauemi ūnga i konei.
I muri i te whakakī i te kōhao, penei te āhua.
Ae, ina whakakīia e tātou, kāore e taea te whakahaere i te matotoru o te paninga kia rite tonu ki te hohonutanga o te kōhao, nō reira ka nui ake te tāpiri, nō reira ka whakamahia e tātou te hangarau CMP (Chemical Mechanical Polishing), he ahua tino teitei te tangi, engari he huri, he huri i ngā wāhanga tāpiri. Ko te hua tēnei.
I tēnei wā, kua oti i a mātou te hanga i tētahi paparanga via. Ko te tikanga, ko te hanga via te nuinga mō te waea o te paparanga whakarewa i muri.
Te hanga paparanga whakarewa:
I raro i ngā āhuatanga o runga ake nei, ka whakamahia e mātou te PVD hei tāpiri i tētahi atu paparanga konganuku. Ko tēnei konganuku he koranu parahi te nuinga.
Kātahi ka oti te whakaatu me te whakairo, ka whiwhi tātou i tā tātou e hiahia ana. Kātahi ka haere tonu te whakarārangi kia tutuki rā anō ā tātou hiahia.
Ina tuhia e mātou te tahora, ka kī atu mātou ki a koe e hia ngā paparanga whakarewa, ā, mā te tukanga e whakamahia ana ka taea te whakarārangi i te nuinga, arā, e hia ngā paparanga ka taea te whakarārangi.
Hei whakamutunga, ka whiwhi tātou i tēnei hanganga. Ko te papa o runga te pine o tēnei maramara, ā, i muri i te tākai, ka noho koia te pine ka kitea e tātou (ko te tikanga, i tuhia matapōkeretia e au, kāore he tikanga mahi, hei tauira noa iho).
Koinei te tukanga whānui mō te hanga maramara. I roto i tēnei putanga, i ako mātou mō te whakaaturanga tino nui, te whakairo, te whakaurunga katote, ngā ngongo oumu, CVD, PVD, CMP, me ētahi atu i roto i te whare whakarewa haurua-ira.
Wā tuku: 23 o Ākuhata-2024