Waa maxay dahaarka carbide-ka ee silicon?

Dahaarka carbide-ka ee silikoon,oo loo yaqaan dahaarka SiC, waxaa loola jeedaa habka lagu mariyo lakab kaarbiid silicon ah dusha sare iyada oo loo marayo habab sida Kiimikada Uumiga (CVD), Dhigista Uumiga Jirka (PVD), ama buufinta kuleylka. Dahaarkan dhoobada ah ee silikoon carbide wuxuu kor u qaadaa sifooyinka dusha sare ee substrate-yada kala duwan isagoo siinaya iska caabin gaar ah oo xirasho, xasillooni kuleyl, iyo ilaalin daxaleed. SiC waxaa loo yaqaanaa sifooyinkeeda jireed iyo kiimikada ee heerka sare ah, oo ay ku jiraan dhibic dhalaalid sare (qiyaastii 2700℃), adkeysi xad dhaaf ah (Miisaanka Mohs 9), iska caabin aad u fiican oo daxaleed iyo oksaydh, iyo waxqabad aad u fiican oo ah daxalka.

Faa'iidooyinka Muhiimka ah ee Dahaarka Silicon Carbide ee Codsiyada Warshadaha

Sababo la xiriira sifooyinkan, dahaarka silikoonka carbide waxaa si weyn loogu isticmaalaa meelaha sida hawada sare, qalabka hubka, iyo habaynta semiconductor-ka. Deegaannada aadka u daran, gaar ahaan inta u dhaxaysa 1800-2000℃, dahaarka SiC wuxuu muujiyaa xasillooni kuleyl oo cajiib ah iyo iska caabin ablative, taasoo ka dhigaysa mid ku habboon codsiyada heerkulka sare. Si kastaba ha ahaatee, silikoonka carbide kaligiis ma laha hufnaanta qaab-dhismeedka ee loo baahan yahay codsiyada badan, sidaa darteed hababka dahaarka waxaa loo adeegsadaa si looga faa'iidaysto sifooyinkeeda gaarka ah iyada oo aan wax u dhimin xoogga qaybaha. Wax soo saarka semiconductor-ka, walxaha dahaarka silikoonka carbide waxay bixiyaan ilaalin la isku halleyn karo iyo xasillooni waxqabad gudaha qalabka loo isticmaalo hababka MOCVD.

Hababka Caadiga ah ee Diyaarinta Dahaarka Silicon Carbide

Ⅰ● Kaydinta Uumiga Kiimikada (CVD) Dahaarka Silicon Carbide

Habkan, dahaarka SiC waxaa lagu sameeyaa iyadoo la gelinayo substrates qolka falcelinta, halkaas oo methyltrichlorosilane (MTS) uu u dhaqmo sidii horudhac. Xaaladaha la xakameeyey - caadi ahaan 950-1300°C iyo cadaadis taban - MTS waxay martaa kala daadasho, carbide-ka silicon-kana waxaa lagu shubaa dusha sare. Habkan dahaarka CVD SiC wuxuu hubiyaa dahaar cufan oo isku mid ah oo leh ku-dhaqan aad u fiican, oo ku habboon codsiyada saxnaanta sare leh ee qaybaha semiconductor-ka iyo hawada sare.

Ⅱ● Habka Beddelka Horudhaca (Polymer Impregnation iyo Pyrolysis - PIP)

Habka kale ee wax ku oolka ah ee dahaadhka buufinta ee silikoon carbide waa habka beddelka horudhaca ah, kaas oo ku lug leh in muunadda hore loo daaweeyay lagu dhex geliyo xal hordhac ah oo dhoobo ah. Ka dib marka la faaruqiyo taangiga lagu shubo oo la cadaadiyo dahaarka, muunadda waa la kululeeyaa, taasoo horseedaysa sameynta dahaarka silikoon carbide marka la qaboojiyo. Habkani waxaa loo doorbidayaa qaybaha u baahan dhumucda dahaarka isku midka ah iyo iska caabbinta xirashada oo la xoojiyay.

Sifooyinka Jireed ee Dahaarka Silikoon Carbide

Dahaarka silikoon-ka carbide-ka wuxuu muujiyaa sifooyin ka dhigaya kuwo ku habboon codsiyada warshadaha ee adag. Astaamahan waxaa ka mid ah:

Qaboojinta Kulaylka: 120-270 W/m·K
Isugeynta Ballaarinta Kulaylka: 4.3 × 10^^(-6)/K (20~800℃)
Iska caabinta Korontada: 10^⁵– 10^⁶Ω·cm
Adkaanta: Miisaanka Mohs 9

Codsiyada Dahaarka Silicon Carbide

Soo saarista semiconductor-ka, dahaarka silicon carbide ee MOCVD iyo hababka kale ee heerkulka sare wuxuu ilaaliyaa qalabka muhiimka ah, sida fal-galayaasha iyo susceptors-ka, isagoo bixinaya iska caabin heerkul sare iyo xasillooni labadaba. Hawada sare iyo difaaca, dahaarka dhoobada silicon carbide waxaa lagu dabaqaa qaybaha u adkeysan kara saameynta xawaaraha sare iyo jawiga daxalka. Intaa waxaa dheer, rinjiga silicon carbide ama dahaarka ayaa sidoo kale loo isticmaali karaa aaladaha caafimaadka ee u baahan cimri dherer marka la raacayo hababka nadiifinta.

Maxaad u Dooranaysaa Dahaarka Carbide-ka ee Silicon-ka?

Iyada oo leh diiwaan la xaqiijiyay oo ku saabsan cimriga qaybaha, dahaarka silicon carbide wuxuu bixiyaa cimri dherer aan la barbar dhigi karin iyo xasillooni heerkul, taasoo ka dhigaysa mid kharash-ool ah oo loogu talagalay isticmaalka muddada-dheer. Marka la doorto dusha sare ee silicon carbide dahaarka leh, warshaduhu waxay ka faa'iidaystaan ​​​​kharashka dayactirka oo yaraada, kalsoonida qalabka oo la xoojiyay, iyo hufnaanta hawlgalka oo la wanaajiyay.

Maxaad u Dooranaysaa Tamarta VET?

VET ENERGY waa soo saare xirfadle ah iyo warshad ka shaqeysa alaabada dahaarka silicon carbide ee Shiinaha. Badeecadaha dahaarka SiC ee ugu muhiimsan waxaa ka mid ah kuleyliyaha dahaarka dhoobada ee silicon carbide,Dahaarka Silikoonka Kaarboohaydraytka ee CVD ee Sumeeyaha MOCVD, Gaariga Garaafiga MOCVD oo leh Dahaarka CVD SiC, Sideyaasha Saldhigga Garaafiga ee SiC ee Dahaaran, Substrate Graphite oo Silicon Carbide ah oo loogu talagalay Semiconductor,Dahaarka SiC/Graphite Substrate/Saxan loogu talagalay Semiconductor, CVD SiC oo dahaarka leh oo kaarboon-kaarboon ah oo isku-dhafan CFC Doon Caaryada. VET ENERGY waxay ka go'an tahay inay bixiso tignoolajiyad casri ah iyo xalal wax soo saar oo loogu talagalay warshadaha semiconductor-ka. Waxaan si daacad ah u rajeyneynaa inaan noqono lammaanahaaga muddada dheer ee Shiinaha.