Paninga karawiti silicon,E mōhiotia whānuitia ana ko te paninga SiC, e pā ana ki te tukanga o te paninga i tētahi paparanga o te silicon carbide ki runga i ngā mata mā roto i ngā tikanga pēnei i te Chemical Vapor Deposition (CVD), te Physical Vapor Deposition (PVD), te rehu wera rānei. Ka whakarei ake tēnei paninga uku silicon carbide i ngā āhuatanga mata o ngā momo papa mā te whakarato i te ātete kakahu tino pai, te pumau wera, me te tiaki i te waikura. E mōhiotia ana te SiC mō ōna āhuatanga ā-tinana me te matū tino pai, tae atu ki te ira rewa teitei (tata ki te 2700℃), te pakeke rawa (Mohs 9 tauine), te ātete waikura me te waikura tino pai, me te mahi whakawetiweti tino pai.
Ngā Painga Matua o te Paninga Silicon Carbide i roto i ngā Mahi Ahumahi
Nā ēnei āhuatanga, e whakamahia whānuitia ana te paninga silicon carbide i roto i ngā mara pēnei i te rererangi, ngā taputapu patu, me te tukatuka semiconductor. I roto i ngā taiao tino kino, inā koa i roto i te awhe 1800-2000℃, he tino pai te pumau o te paninga SiC ki te pāmahana me te ātete ki te tango, he mea tino pai mō ngā tono pāmahana teitei. Heoi, kāore i te silicon carbide anake te hanganga e hiahiatia ana mō ngā tono maha, nō reira ka whakamahia ngā tikanga paninga hei whakamahi i ōna āhuatanga ahurei me te kore e whakararu i te kaha o ngā wāhanga. I roto i te hanga semiconductor, ka whakaratohia e ngā huānga paninga silicon carbide he tiaki pono me te pumau mahi i roto i ngā taputapu e whakamahia ana i roto i ngā tukanga MOCVD.
Ngā Tikanga Noa mō te Whakarite Paninga Silicon Carbide
Ⅰ● Paninga Whakatakotoranga Kohu Matū (CVD) Silicon Carbide
I tēnei tikanga, ka hangaia ngā paninga SiC mā te whakanoho i ngā papa ki roto i tētahi rūma tauhohenga, ka mahi te methyltrichlorosilane (MTS) hei matū mua. I raro i ngā āhuatanga whakahaeretia—ko te tikanga he 950-1300°C me te pēhanga kino—ka pirau te MTS, ā, ka whakatakotoria te silicon carbide ki runga i te mata. Mā tēnei tukanga paninga CVD SiC ka whakarite he paninga matotoru, ōrite me te piri pai, he mea tino pai mō ngā tono tino tika i roto i ngā rāngai semiconductor me te rererangi.
Tuarua● Tikanga Whakawhitinga Tūmua (Whakakī me te Whakapūkara Polymer – PIP)
Ko tētahi atu huarahi whai hua mō te paninga rehu silicon carbide ko te tikanga huringa precursor, arā, ko te tuku i te tauira kua tukatukahia i mua ki roto i te otinga precursor uku. Whai muri i te whakakorekore i te tāke whakakī me te pēhanga i te paninga, ka whakamahanahia te tauira, ka hua ake he paninga silicon carbide i te wā e whakamatao ana. He pai ake tēnei tikanga mō ngā wāhanga e hiahia ana kia rite te matotoru o te paninga me te ātete ki te kakahu.
Ngā Āhuatanga Ā-tinana o te Paninga Silicon Carbide
He āhuatanga pai ngā paninga karawiti silicon e pai ai mō ngā tono ahumahi uaua. Kei roto i ēnei āhuatanga:
Te Arahi Wera: 120-270 W/m·K
Tauwehenga o te Whakawhanuitanga Wera: 4.3 × 10^(-6)/K (i te 20~800℃)
Ātete Hiko: 10^5– 10^6Ω·cm
Pakari: Tauine Mohs 9
Ngā Whakamahinga o te Paninga Silicon Carbide
I roto i te hanga haurua-haurua, ka tiakina ngā taputapu nui e te paninga silicon carbide mō te MOCVD me ētahi atu tukanga pāmahana-tiketike, pērā i ngā tauhohenga me ngā kaiwhakaū, mā te tuku i te ātete pāmahana-tiketike me te pumau. I roto i te rererangi me te tiaki whenua, ka pania ngā paninga uku silicon carbide ki ngā wāhanga me tu atu ki ngā pānga tere-tiketike me ngā taiao waikura. Hei tāpiri, ka taea hoki te whakamahi i te peita silicon carbide, i ngā paninga rānei ki ngā taputapu hauora e hiahia ana kia roa te mau i raro i ngā tikanga whakahoromata.
He aha i whiriwhiri ai i te paninga Silicon Carbide?
Me te wheako kua whakamātauhia ki te whakaroa i te roa o te ora o ngā wāhanga, ka whakaratohia e ngā paninga silicon carbide te pakari me te pumau o te pāmahana, ka whai hua ai mō te whakamahinga roa. Mā te whiriwhiri i tētahi mata kua pania ki te silicon carbide, ka whai hua ngā ahumahi i te whakaiti i ngā utu tiaki, te whakapai ake i te pono o ngā taputapu, me te whakapai ake i te whai huatanga o te mahi.
He aha i whiriwhiri ai a VET ENERGY?
He kaihanga ngaio a VET ENERGY, he wheketere hoki mō ngā hua paninga silicon carbide i Haina. Ko ngā hua paninga SiC matua ko te whakamahana paninga uku silicon carbide,Paninga Carbide CVD Silicon Carbide MOCVD Ārai, Kawe Karāhe MOCVD me te Paninga CVD SiC, Ngā Kawe Tūāpapa Graphite Paninga SiC, Papanga Karāpiti Panipanihia ki te Silicon Carbide mō te Semiconductor,Papa/Papa Whakarewa SiC/Papa Whakarewa Karāwhite mō te Ārahi-ā-Waka, Poi Poti CFC Hikoi-waro Kua Pania ki te CVD SiCE whakapau kaha ana a VET ENERGY ki te whakarato i ngā hangarau matatau me ngā otinga hua mō te umanga haurua-ira. Ko tā mātou e tino tumanako nei kia noho hei hoa mahi roa māu i Haina.
Wā tuku: Hepetema-02-2023
