Tsarin Tashin Tururi na Sinadarai (CVD) muhimmin fasahar adana fim ne mai siriri, wanda galibi ana amfani da shi don shirya fina-finai daban-daban masu aiki da kayan sirara, kuma ana amfani da shi sosai a masana'antar semiconductor da sauran fannoni.
1. Ka'idar aiki ta CVD
A cikin tsarin CVD, ana haɗa wani abu mai haɓaka iskar gas (ɗaya ko fiye da mahaɗan da ke haifar da iskar gas) da saman substrate sannan a dumama shi zuwa wani zafin jiki don haifar da amsawar sinadarai da kuma ajiyewa a saman substrate don samar da fim ko shafi da ake so. Samfurin wannan amsawar sinadarai abu ne mai ƙarfi, yawanci mahaɗan kayan da ake so. Idan muna son manna silicon a saman, za mu iya amfani da trichlorosilane (SiHCl3) azaman gas mai haɓaka iskar gas: SiHCl3 → Si + Cl2 + HCl Silicon zai ɗaure zuwa kowane saman da aka fallasa (na ciki da na waje), yayin da za a fitar da iskar gas ta chlorine da hydrochloric acid daga ɗakin.
2. Rarraba CVD
CVD na thermal: Ta hanyar dumama iskar gas mai gabatarwa don ruɓewa da kuma sanya ta a saman substrate. Plasma Enhanced CVD (PECVD): Ana ƙara plasma a cikin thermal CVD don haɓaka ƙimar amsawa da kuma sarrafa tsarin ajiya. Metal Organic CVD (MOCVD): Ta amfani da mahaɗan ƙarfe na halitta azaman gas mai gabatarwa, ana iya shirya siririn fim na ƙarfe da semiconductor, kuma galibi ana amfani da su wajen ƙera na'urori kamar LEDs.
3. Aikace-aikace
(1) Kera na'urorin Semiconductor
Fim ɗin siliki: ana amfani da shi don shirya yadudduka masu rufi, substrates, yadudduka na keɓewa, da sauransu. Fim ɗin nitride: ana amfani da shi don shirya silicon nitride, aluminum nitride, da sauransu, ana amfani da shi a cikin LEDs, na'urorin wutar lantarki, da sauransu. Fim ɗin ƙarfe: ana amfani da shi don shirya yadudduka masu sarrafawa, yadudduka masu ƙarfe, da sauransu.
(2) Fasahar nuni
Fim ɗin ITO: Fim ɗin oxide mai haske, wanda aka saba amfani da shi a cikin nunin faifai da allon taɓawa. Fim ɗin jan ƙarfe: ana amfani da shi don shirya yadudduka na marufi, layukan mai sarrafawa, da sauransu, don inganta aikin na'urorin nuni.
(3) Sauran filayen
Rufin gani: gami da rufin hana haske, matatun gani, da sauransu. Rufin hana lalata: ana amfani da shi a sassan motoci, na'urorin sararin samaniya, da sauransu.
4. Halayen tsarin CVD
Yi amfani da yanayin zafi mai yawa don haɓaka saurin amsawa. Yawanci ana yin sa a cikin yanayin injin tsabtace iska. Dole ne a cire gurɓatattun abubuwa a saman ɓangaren kafin a fenti. Tsarin na iya samun ƙuntatawa akan abubuwan da za a iya shafa, misali iyakokin zafin jiki ko iyakokin amsawa. Rufin CVD zai rufe dukkan sassan ɓangaren, gami da zare, ramukan makafi da saman ciki. Yana iya iyakance ikon rufe takamaiman wuraren da aka nufa. Kauri na fim yana iyakance ta hanyar tsari da yanayin kayan. Mannewa mai kyau.
5. Fa'idodin fasahar CVD
Daidaito: Yana iya cimma daidaiton ajiya a kan manyan wurare.
Ikon sarrafawa: Ana iya daidaita ƙimar ajiya da halayen fim ta hanyar sarrafa ƙimar kwarara da zafin jiki na iskar gas mai gabatarwa.
Sauƙin Amfani: Ya dace da adana kayayyaki iri-iri, kamar ƙarfe, semiconductors, oxides, da sauransu.
Lokacin Saƙo: Mayu-06-2024