Isingeniso kubuchwepheshe bokufakwa kwefilimu encane yamakhemikhali (i-CVD)

Ukufakwa Komhwamuko Wamakhemikhali (i-CVD) ubuchwepheshe obubalulekile bokufaka ifilimu encane, obuvame ukusetshenziselwa ukulungiselela amafilimu ahlukahlukene asebenzayo nezinto ezingqimba ezincane, futhi busetshenziswa kabanzi ekukhiqizweni kwe-semiconductor nakweminye imikhakha.

1. Isimiso sokusebenza se-CVD

Enqubweni ye-CVD, isandulela segesi (i-compound eyodwa noma ngaphezulu yesandulela segesi) ihlanganiswa nomphezulu we-substrate bese ishiswa ekushiseni okuthile ukuze kubangele ukusabela kwamakhemikhali bese kufakwa ebusweni be-substrate ukuze kwakheke ungqimba lwefilimu noma ungqimba olufunwayo. Umkhiqizo walokhu kusabela kwamakhemikhali kuyinto eqinile, ngokuvamile inhlanganisela yezinto ezifunwayo. Uma sifuna ukunamathelisa i-silicon endaweni ethile, singasebenzisa i-trichlorosilane (SiHCl3) njengegesi eyandulelayo: I-SiHCl3 → Si + Cl2 + HCl I-Silicon izobopha kunoma yimuphi umphezulu oveziwe (wangaphakathi nangaphandle), kuyilapho amagesi e-chlorine ne-hydrochloric acid azokhishwa ekamelweni.

2. Ukuhlukaniswa kwe-CVD

I-CVD Eshisayo: Ngokufudumeza igesi eyandulelayo ukuze ibole futhi iyibeke phezu kwe-substrate. I-CVD Ethuthukisiwe Ye-Plasma (PECVD): I-Plasma yengezwa ku-CVD eshisayo ukuze kuthuthukiswe izinga lokusabela futhi kulawulwe inqubo yokufaka. I-CVD Yensimbi Engokwemvelo (MOCVD): Kusetshenziswa amakhemikhali ensimbi angokwemvelo njengamagesi andulelayo, kungalungiswa amafilimu amancane ezinsimbi kanye nama-semiconductor, futhi avame ukusetshenziswa ekwenziweni kwamadivayisi afana nama-LED.

3. Isicelo

(1) Ukukhiqizwa kwama-semiconductor

Ifilimu ye-silicide: esetshenziselwa ukulungiselela izendlalelo zokuvikela, izisekelo, izendlalelo zokuhlukanisa, njll. Ifilimu ye-nitride: esetshenziselwa ukulungiselela i-silicon nitride, i-aluminium nitride, njll., esetshenziswa kuma-LED, kumadivayisi kagesi, njll. Ifilimu yensimbi: esetshenziselwa ukulungiselela izendlalelo zokuhambisa umoya, izendlalelo ezenziwe ngensimbi, njll.

(2) Ubuchwepheshe bokubonisa

Ifilimu ye-ITO: Ifilimu ye-okside eqhubayo ebonakalayo, evame ukusetshenziswa ezikrinini ezisicaba kanye nasezikrinini zokuthinta. Ifilimu yethusi: isetshenziselwa ukulungisa izendlalelo zokupakisha, imigqa eqhubayo, njll., ukuthuthukisa ukusebenza kwamadivayisi okubonisa.

(3) Ezinye izinkambu

Izembozo ezibonakalayo: kufaka phakathi izembozo ezingabonisi ukukhanya, izihlungi ezibonakalayo, njll. Izembozo ezingabonisi ukukhanya: ezisetshenziswa ezingxenyeni zezimoto, kumadivayisi ezindiza, njll.

4. Izici zenqubo ye-CVD

Sebenzisa indawo enokushisa okuphezulu ukukhuthaza isivinini sokuphendula. Ngokuvamile kwenziwa endaweni engenamanzi. Ukungcola okungaphezulu kwengxenye kumele kususwe ngaphambi kokupenda. Inqubo ingaba nemikhawulo ezindaweni ezingambozwa, okungukuthi imikhawulo yokushisa noma imikhawulo yokusabela. Isembozo se-CVD sizomboza zonke izindawo zengxenye, kufaka phakathi imicu, izimbobo ezingaboni kanye nezindawo zangaphakathi. Kunganciphisa ikhono lokufihla izindawo ezithile eziqondiwe. Ubukhulu befilimu bunqunyelwe yinqubo kanye nezimo zezinto. Ukunamathela okuphezulu.