Kutulutsa nthunzi ya mankhwala (CVD) ndi ukadaulo wofunikira kwambiri woyika filimu yopyapyala, womwe nthawi zambiri umagwiritsidwa ntchito pokonza mafilimu osiyanasiyana ogwira ntchito komanso zinthu zopyapyala, ndipo umagwiritsidwa ntchito kwambiri popanga zinthu za semiconductor ndi madera ena.
1. Mfundo yogwirira ntchito ya CVD
Mu njira ya CVD, choyambira mpweya (choyambira chimodzi kapena zingapo za mpweya) chimalumikizidwa ndi pamwamba pa substrate ndikutenthedwa kutentha kwina kuti chichititse kuti mankhwala ayambe kugwira ntchito ndikuyika pamwamba pa substrate kuti apange filimu kapena chophimba chomwe mukufuna. Chopangidwa ndi mankhwalawa ndi cholimba, nthawi zambiri chimakhala chophatikiza cha zinthu zomwe mukufuna. Ngati tikufuna kumamatira silicon pamwamba, tingagwiritse ntchito trichlorosilane (SiHCl3) ngati mpweya woyambira: SiHCl3 → Si + Cl2 + HCl Silicon imalumikizana ndi malo aliwonse owonekera (mkati ndi kunja), pomwe mpweya wa chlorine ndi hydrochloric acid udzatulutsidwa m'chipindamo.
2. Kugawa kwa matenda a mtima (CVD)
CVD Yotentha: Mwa kutentha mpweya woyambira kuti uwole ndikuuyika pamwamba pa substrate. CVD Yowonjezereka ya Plasma (PECVD): Plasma imawonjezeredwa ku CVD yotentha kuti iwonjezere liwiro la reaction ndikuwongolera njira yoyika. CVD Yopangidwa ndi Chitsulo (MOCVD): Pogwiritsa ntchito mankhwala achitsulo ngati mpweya woyambira, mafilimu opyapyala a zitsulo ndi ma semiconductor amatha kukonzedwa, ndipo nthawi zambiri amagwiritsidwa ntchito popanga zipangizo monga ma LED.
3. Kugwiritsa ntchito
(1) Kupanga ma semiconductor
Filimu ya silicide: imagwiritsidwa ntchito pokonzekera zigawo zotetezera kutentha, zinthu zosungiramo zinthu, zigawo zodzipatula, ndi zina zotero. Filimu ya nitride: imagwiritsidwa ntchito pokonzekera silicon nitride, aluminiyamu nitride, ndi zina zotero, zomwe zimagwiritsidwa ntchito mu ma LED, zipangizo zamagetsi, ndi zina zotero. Filimu yachitsulo: imagwiritsidwa ntchito pokonzekera zigawo zoyendetsera mpweya, zigawo zopangidwa ndi zitsulo, ndi zina zotero.
(2) Ukadaulo wowonetsera
Filimu ya ITO: Filimu yowonekera bwino ya okosijeni, yomwe imagwiritsidwa ntchito kwambiri m'mawonekedwe a flat panel ndi zowonetsera zogwira. Filimu ya mkuwa: imagwiritsidwa ntchito pokonzekera zigawo zolongedza, mizere yowongolera, ndi zina zotero, kuti iwonjezere magwiridwe antchito a zida zowonetsera.
(3) Magawo ena
Zophimba zowala: kuphatikizapo zophimba zowala, zosefera zowala, ndi zina zotero. Zophimba zowala: zomwe zimagwiritsidwa ntchito m'magalimoto, zida zam'mlengalenga, ndi zina zotero.
4. Makhalidwe a njira ya CVD
Gwiritsani ntchito malo otentha kwambiri kuti mulimbikitse liwiro la kuchitapo kanthu. Nthawi zambiri zimachitikira pamalo opanda mpweya. Zoipitsa pamwamba pa gawolo ziyenera kuchotsedwa musanazipente. Njirayi ikhoza kukhala ndi zoletsa pa zinthu zomwe zingathe kuphimbidwa, mwachitsanzo, kuchepetsa kutentha kapena zoletsa kuchitapo kanthu. Chophimba cha CVD chidzaphimba madera onse a gawolo, kuphatikizapo ulusi, mabowo osawona ndi malo amkati. Chingachepetse kuthekera kobisa madera enaake. Kukhuthala kwa filimu kumachepa ndi momwe zinthu zilili. Kumangirira bwino.
5. Ubwino wa ukadaulo wa CVD
Kufanana: Kutha kuyika mofanana pa malo akuluakulu.
Kuwongolera: Kuchuluka kwa mpweya woyikidwa ndi mawonekedwe a filimu zitha kusinthidwa powongolera kuchuluka kwa mpweya woyambira ndi kutentha kwake.
Kusinthasintha: Koyenera kuyika zinthu zosiyanasiyana, monga zitsulo, ma semiconductor, ma oxide, ndi zina zotero.
Nthawi yotumizira: Meyi-06-2024