Okwu Mmalite na teknụzụ ntinye ihe nkiri dị gịrịgịrị nke kemịkalụ (CVD)

Ngwuputa Mmiri Kemịkal (CVD) bụ teknụzụ dị mkpa maka itinye ihe nkiri dị gịrịgịrị, nke a na-ejikarị akwadebe ihe nkiri dị iche iche na ihe ndị dị gịrịgịrị, a na-ejikwa ya eme ihe n'ịmepụta semiconductor na mpaghara ndị ọzọ.

1. Ụkpụrụ ọrụ nke CVD

N'ime usoro CVD, a na-eme ka ihe na-ebute gas (otu ma ọ bụ karịa ihe ndị na-ebute gas) banye n'elu ihe ahụ ma kpoo ya ọkụ ruo n'ọnọdụ okpomọkụ ụfọdụ iji mee ka mmeghachi omume kemịkalụ wee tinye ya n'elu ihe ahụ iji mepụta ihe nkiri ma ọ bụ mkpuchi achọrọ. Ihe si na mmeghachi omume kemịkalụ a pụta bụ ihe siri ike, nke na-abụkarị ngwakọta nke ihe achọrọ. Ọ bụrụ na anyị chọrọ ịrapara silicon n'elu, anyị nwere ike iji trichlorosilane (SiHCl3) dị ka gas na-ebute ụzọ: SiHCl3 → Si + Cl2 + HCl Silicon ga-ejikọta na elu ọ bụla ekpughere (ma n'ime ma n'èzí), ebe a ga-ewepụ gas chlorine na hydrochloric acid site na ụlọ ahụ.

2. Nhazi CVD

CVD nke na-ekpo ọkụ: Site n'ikpo ọkụ gas nke na-ebute ụzọ iji gbazee ma tinye ya n'elu ihe ndị dị n'elu ala. Plasma Enhanced CVD (PECVD): A na-agbakwunye plasma na CVD nke na-ekpo ọkụ iji mee ka ọnụego mmeghachi omume dịkwuo elu ma chịkwaa usoro nkwụnye. Metal Organic CVD (MOCVD): Site na iji ihe ndị dị n'ime ígwè dị ka gas ndị na-ebute ụzọ, enwere ike ịkwadebe ihe nkiri dị gịrịgịrị nke ígwè na semiconductor, a na-ejikarịkwa ha eme ihe n'ịmepụta ngwaọrụ dịka LED.

3. Ngwa

(1) Mmepụta semiconductor

Ihe nkiri siliki: eji akwadebe akwa mkpuchi, ihe ndị e ji kpuchie elu, akwa iche iche, wdg. Ihe nkiri nitride: eji akwadebe silicon nitride, aluminum nitride, wdg., nke a na-eji na LED, ngwaọrụ ike, wdg. Ihe nkiri ígwè: eji akwadebe akwa nduzi, akwa ígwè, wdg.

(2) Teknụzụ ngosi

Ihe nkiri ITO: Ihe nkiri oxide na-eduzi ihe nke ọma, nke a na-ejikarị eme ihe na ngosipụta panel dị larịị na ihuenyo mmetụ aka. Ihe nkiri ọla kọpa: a na-eji akwadebe akwa nkwakọ ngwaahịa, ahịrị ndị na-eduzi ihe, wdg, iji melite arụmọrụ nke ngwaọrụ ngosi.

(3) Ubi ndị ọzọ

Mkpuchi anya: gụnyere mkpuchi mgbochi-mgbapụta, nzacha anya, wdg. Mkpuchi mgbochi-mgbapụta: eji ya na akụkụ ụgbọala, ngwaọrụ ikuku, wdg.

4. Àgwà nke usoro CVD

Jiri gburugburu okpomọkụ dị elu iji kwalite ọsọ mmeghachi omume. A na-emekarị ya n'ebe ikuku na-adịghị. A ga-ewepụ ihe ndị dị n'elu akụkụ ahụ tupu e see ya. Usoro a nwere ike ịnwe oke na ihe ndị e ji kpuchie, dịka oke okpomọkụ ma ọ bụ oke mmeghachi omume. Mkpuchi CVD ga-ekpuchi akụkụ niile nke akụkụ ahụ, gụnyere eriri, oghere kpuru ìsì na elu dị n'ime. Nwere ike igbochi ikike ikpuchi ebe ndị a kapịrị ọnụ. Oke ihe nkiri ahụ na-ejedebe site na usoro na ọnọdụ ihe. Nrapado dị elu.